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公开(公告)号：US07760065B2
公开(公告)日：2010-07-20
申请号：US11772039
申请日：2007-06-29
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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公开(公告)号：US07554046B2
公开(公告)日：2009-06-30
申请号：US12173889
申请日：2008-07-16
IPC分类号： H01H57/00
CPC分类号： H01H29/06 , H01H59/0009 , H01H2029/008
摘要： An apparatus comprising a liquid switch. The liquid switch comprises a substrate having a surface with first and second regions thereon and a fluid configured to contact both of the regions. The regions each comprise electrically connected fluid-support-structures, wherein each of the fluid-support-structures have at least one dimension of about 1 millimeter or less. The regions are electrically isolated from each other.
摘要翻译： 一种包括液体开关的装置。 液体开关包括具有其上具有第一和第二区域的表面的衬底和配置成接触两个区域的流体。 这些区域各自包括电连接的流体支撑结构，其中每个流体支撑结构具有约1毫米或更小的至少一个尺寸。 这些区域彼此电隔离。
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公开(公告)号：US06504641B2
公开(公告)日：2003-01-07
申请号：US09727557
申请日：2000-12-01
申请人： Edward Chan , Arman Gasparyan
发明人： Edward Chan , Arman Gasparyan
IPC分类号： G02F103
CPC分类号： G02B26/0841 , Y10S359/904
摘要： A driver for use with a micro-electromechanical system (MEMS) device, method of operation thereof and a MEMS device employing the driver and method. In one embodiment, the driver includes an actuation subsystem that provides an actuation voltage to alter an angle of an optical element of the MEMS device. The driver also includes a bias subsystem, coupled to the actuation subsystem, that applies a bias voltage between the optical element and the actuation subsystem, thereby reducing the actuation voltage.
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公开(公告)号：US07005593B2
公开(公告)日：2006-02-28
申请号：US10816569
申请日：2004-04-01
IPC分类号： H01H29/00
CPC分类号： H01H59/0009 , H01H29/00 , H01H2029/008
摘要： A liquid electrical switch is disclosed that uses a plurality of droplets of conducting liquid to form an electrical path. In a first embodiment, at least a first voltage differential is used to create a separation distance between two droplets. The droplets are illustratively contained within a housing and surrounded by an immiscible, insulating liquid. In this embodiment, the at least a first voltage differential draws at least a portion of at least one of the droplets away from a second droplet, thus preventing electrical current from flowing from the at least one droplet to the second droplet. In another embodiment, the at least a first voltage differential is changed in a way such that at least one liquid droplet is made to come into contact with a second droplet, thus creating an electrical path between the two droplets.
摘要翻译： 公开了一种液体电气开关，其使用多个导液液滴形成电路径。 在第一实施例中，使用至少第一电压差来产生两个液滴之间的间隔距离。 液滴被示例性地包含在壳体内并被不混溶的绝缘液体包围。 在该实施例中，至少第一电压差将至少一个液滴的至少一部分从第二液滴中抽出，从而防止电流从至少一个液滴流向第二液滴。 在另一个实施例中，至少第一电压差以这样的方式改变，使得至少一个液滴与第二液滴接触，从而在两个液滴之间产生电路径。
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5.发明申请公开(公告)号：US20050054128A1
公开(公告)日：2005-03-10
申请号：US10967900
申请日：2004-10-18
申请人： Arman Gasparyan , Sungho Jin , Herbert Shea , Robert Van Dover , Wei Zhu
发明人： Arman Gasparyan , Sungho Jin , Herbert Shea , Robert Van Dover , Wei Zhu
IPC分类号： B81B3/00 , G02B6/32 , G02B6/35 , H01L21/00 , H01L31/0232
CPC分类号： G02B6/3518 , B81B3/0035 , B81B2201/042 , G02B6/32 , G02B6/3544 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B6/3594
摘要： The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.
摘要翻译： 本发明提供一种微电子机械系统（MEMS）装置，因此制造方法以及包括该微机电系统的光通信系统。 该器件包括位于衬底上方的电极和位于接近并电耦合到衬底的电荷耗散层。 该装置还可以包括位于电极上方的可移动元件。
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公开(公告)号：US07973637B2
公开(公告)日：2011-07-05
申请号：US12732752
申请日：2010-03-26
IPC分类号： H01H61/01
CPC分类号： H01H1/0036 , B81B3/0024 , B81B2201/014 , B81B2201/031 , H01H37/00 , H01H2001/0047 , H01H2037/008 , H01H2061/006 , H01H2061/008
摘要： The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
摘要翻译： 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。
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7.发明授权公开(公告)号：US07488614B2
公开(公告)日：2009-02-10
申请号：US11113782
申请日：2005-04-25
申请人： Susanne Arney , Arman Gasparyan , Sungho Jin , Omar D. López , Herbert R. Shea
发明人： Susanne Arney , Arman Gasparyan , Sungho Jin , Omar D. López , Herbert R. Shea
IPC分类号： H01L21/00
CPC分类号： H01G5/16 , B81B3/0086 , G02B26/0841 , H01G5/019
摘要： In one embodiment, an electrode is disposed on a surface of a first portion of the dielectric, with the first portion and the electrode forming an electrode region of the device. A charge-dissipation structure is then formed by implanting ions into the electrode region and a second portion of the dielectric located outside of the electrode region. In another embodiment, a charge-dissipation structure is formed by implanting ions into the dielectric of a movable part of an electro-mechanical system. Advantageously, ion implantation can be performed without masking, lithography, or elevated temperatures; the electrical properties of the resulting charge dissipation structure can be controlled relatively easily; and portions of the charge dissipation structure are protected from oxidation and/or corrosion by the dielectric material.
摘要翻译： 在一个实施例中，电极设置在电介质的第一部分的表面上，其中第一部分和电极形成器件的电极区域。 然后通过将离子注入电极区域和位于电极区域外部的电介质的第二部分来形成电荷耗散结构。 在另一个实施例中，通过将离子注入到机电系统的可移动部分的电介质中来形成电荷 - 耗散结构。 有利地，可以进行离子注入而不进行掩蔽，光刻或升高的温度; 可以相对容易地控制所得电荷耗散结构的电性能; 并且电荷耗散结构的部分被电介质材料保护免受氧化和/或腐蚀。
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公开(公告)号：US20080273281A1
公开(公告)日：2008-11-06
申请号：US12173889
申请日：2008-07-16
IPC分类号： H01H47/00
CPC分类号： H01H29/06 , H01H59/0009 , H01H2029/008
摘要： An apparatus comprising a liquid switch. The liquid switch comprises a substrate having a surface with first and second regions thereon and a fluid configured to contact both of the regions. The regions each comprise electrically connected fluid-support-structures, wherein each of the fluid-support-structures have at least one dimension of about 1 millimeter or less. The regions are electrically isolated from each other.
摘要翻译： 一种包括液体开关的装置。 液体开关包括具有其上具有第一和第二区域的表面的衬底和配置成接触两个区域的流体。 这些区域各自包括电连接的流体支撑结构，其中每个流体支撑结构具有约1毫米或更小的至少一个尺寸。 这些区域彼此电隔离。
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公开(公告)号：US06944008B2
公开(公告)日：2005-09-13
申请号：US10323522
申请日：2002-12-18
申请人： Susanne Arney , Arman Gasparyan , Sungho Jin , Omar D. López , Herbert R. Shea
发明人： Susanne Arney , Arman Gasparyan , Sungho Jin , Omar D. López , Herbert R. Shea
CPC分类号： H01G5/16 , B81B3/0086 , G02B26/0841 , H01G5/019
摘要： A charge-dissipation structure is formed within the dielectric of an electrostatically driven device, such as a micro-electro-mechanical systems (“MEMS”) device, by ion implantation. Electrical and other properties of the charge-dissipation structure may be controlled by selection of the species, energy, and dose of implanted ions. With appropriate properties, such a charge-dissipation structure can reduce the effect on device operation of mobile charges in or on the dielectric.
摘要翻译： 通过离子注入在静电驱动装置（例如微机电系统（MEMS））装置的电介质内形成电荷消散结构。 可以通过选择植入离子的种类，能量和剂量来控制电荷和电荷耗散结构的其它性质。 具有适当的特性，这种电荷耗散结构可以减少电介质中或电介质上的移动电荷对器件操作的影响。
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10.发明申请公开(公告)号：US20050196891A1
公开(公告)日：2005-09-08
申请号：US11113782
申请日：2005-04-25
申请人： Susanne Arney , Arman Gasparyan , Sungho Jin , Omar Lopez , Herbert Shea
发明人： Susanne Arney , Arman Gasparyan , Sungho Jin , Omar Lopez , Herbert Shea
CPC分类号： H01G5/16 , B81B3/0086 , G02B26/0841 , H01G5/019
摘要： In one embodiment, an electrode is disposed on a surface of a first portion of the dielectric, with the first portion and the electrode forming an electrode region of the device. A charge-dissipation structure is then formed by implanting ions into the electrode region and a second portion of the dielectric located outside of the electrode region. In another embodiment, a charge-dissipation structure is formed by implanting ions into the dielectric of a movable part of an electromechanical system. Advantageously, ion implantation can be performed without masking, lithography, or elevated temperatures; the electrical properties of the resulting charge dissipation structure can be controlled relatively easily; and portions of the charge dissipation structure are protected from oxidation and/or corrosion by the dielectric material.
摘要翻译： 在一个实施例中，电极设置在电介质的第一部分的表面上，其中第一部分和电极形成器件的电极区域。 然后通过将离子注入电极区域和位于电极区域外部的电介质的第二部分来形成电荷耗散结构。 在另一个实施例中，通过将离子注入到机电系统的可移动部分的电介质中来形成电荷 - 耗散结构。 有利地，可以进行离子注入而不进行掩蔽，光刻或升高的温度; 可以相对容易地控制所得电荷耗散结构的电性能; 并且电荷耗散结构的部分被电介质材料保护免受氧化和/或腐蚀。
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