公开(公告)号：US20130167639A1

公开(公告)日：2013-07-04

申请号：US13775856

申请日：2013-02-25

Applicant: Anolog Devices, Inc.

Inventor： Jinbo Kuang ,  William A. Clark ,  John A. Geen

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01P15/09 ,  Y10T29/42

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract translation: 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。