Multi-metal layer MEMS structure and process for making the same

    公开(公告)号:US20050000932A1

    公开(公告)日:2005-01-06

    申请号:US10902984

    申请日:2004-07-30

    摘要: The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating devices from such a structure, and the devices fabricated from such a structure. In one embodiment, a first metal layer is carried by a substrate. A first sacrificial layer is carried by the first metal layer. A second metal layer is carried by the sacrificial layer. The second metal layer has a portion forming a micro-machined metal mesh. When the portion of the first sacrificial layer in the area of the micro-machined metal mesh is removed, the micro-machined metal mesh is released and suspended above the first metal layer a height determined by the thickness of the first sacrificial layer. The structure may be varied by providing a base layer of sacrificial material between the surface of the substrate and the first metal layer. In that manner, a portion of the first metal layer may form a micro-machined mesh which is released when a portion of the base sacrificial layer in the area of the micro-machined mesh is removed. Additionally, a second layer of sacrificial material and a third metal layer may be provided. A micro-machined mesh may be formed in a portion of the third metal layer. The structure of the present invention may be used to construct variable capacitors, switches and, when certain of the meshes are sealed, microspeakers and microphones.

    Load sensing system
    82.
    发明授权
    Load sensing system 失效
    负载感应系统

    公开(公告)号:US5900592A

    公开(公告)日:1999-05-04

    申请号:US919949

    申请日:1997-08-29

    CPC分类号: G01G7/06

    摘要: A load sensing system inexpensively monitors the weight and temperature of stored nuclear material for long periods of time in widely variable environments. The system can include an electrostatic load cell that encodes weight and temperature into a digital signal which is sent to a remote monitor via a coaxial cable. The same cable is used to supply the load cell with power. When multiple load cells are used, vast inventories of stored nuclear material can be continuously monitored and inventoried of minimal cost.

    摘要翻译: 负载感测系统在广泛可变的环境中可以廉价地监测储存的核材料的重量和温度长时间。 该系统可以包括将重量和温度编码成经由同轴电缆发送到远程监视器的数字信号的静电负载传感器。 相同的电缆用于为称重传感器供电。 当使用多个称重传感器时,存储的核材料的大量库存可以以最低的成本进行连续监测和盘点。

    Variable capacitor
    83.
    发明授权
    Variable capacitor 失效
    可变电容器

    公开(公告)号:US5818683A

    公开(公告)日:1998-10-06

    申请号:US699792

    申请日:1996-08-19

    申请人: Yasutaka Fujii

    发明人: Yasutaka Fujii

    摘要: A small variable capacitor including a movable section composed of a movable electrode supported by a supporting section. A driving electrode and a detecting electrode are provided facing the movable electrode. When an external bias voltage is applied between the movable electrode and the driving electrode, Coulomb force is generated between them. Due to that, the movable section is attracted toward the driving electrode while keeping a balance between its own resilience force and the Coulomb force. At this time, part of the movable section facing the detecting element is displaced more than the other part of the movable section facing the driving electrode. Thereby, because an electrostatic capacity between the movable section and the detecting electrode is inversely proportional to the average distance, a large electrostatic capacity may be obtained and variability of the electrostatic capacity becomes large.

    摘要翻译: 一种小型可变电容器,包括由支撑部支撑的可动电极构成的可动部。 面向可动电极设置驱动电极和检测电极。 当在可动电极和驱动电极之间施加外部偏置电压时,它们之间产生库仑力。 由此,可动部分被吸引到驱动电极,同时保持其自身的弹性力与库仑力之间的平衡。 此时,面对检测元件的可动部分的一部分比可动部的面向驱动电极的另一部分移动。 因此,由于可动部和检测电极之间的静电电容与平均距离成反比,所以可以获得大的静电容量,并且静电电容的变化性变大。

    Mechanical capacitor
    84.
    发明授权
    Mechanical capacitor 失效
    机械电容器

    公开(公告)号:US5644349A

    公开(公告)日:1997-07-01

    申请号:US301952

    申请日:1994-09-07

    申请人: Russel A. Martin

    发明人: Russel A. Martin

    摘要: A mechanical capacitor includes a fixed electrode, a movable electrode separated from the fixed electrode by a gap, a spring attached to the movable electrode suspending it above the fixed electrode, opposing the fixed electrode and an insulator formed over either the fixed or the movable electrode in between the two electrodes. The movable electrode, the gap, the insulator and the fixed electrode form a mechanical capacitor. The capacitance of the mechanical capacitor is changed by applying a control voltage between the movable and the fixed electrodes. When a control voltage across the mechanical capacitor is increased, the movable electrode moves closer to the fixed electrode, which causes the mechanical capacitor capacitance to increase. When the control voltage across the mechanical capacitor is decreased, the movable electrode is moved farther away from the fixed electrode by the operation of the spring. This movement of the movable electrode away from the fixed electrode decreases the capacitance of the mechanical capacitor.

    摘要翻译: 机械电容器包括固定电极,通过间隙与固定电极分离的可动电极,安装在可动电极上的弹簧,悬挂在固定电极上方,与固定电极相对,以及形成在固定电极或可动电极上的绝缘体 在两个电极之间。 可动电极,间隙,绝缘体和固定电极形成机械电容器。 通过在可动电极和固定电极之间施加控制电压来改变机械电容器的电容。 当机械电容器两端的控制电压增加时,可动电极移动靠近固定电极,这导致机械电容器电容增加。 当机械电容器两端的控制电压减小时,通过弹簧的操作使可动电极远离固定电极。 可移动电极远离固定电极的移动降低了机械电容器的电容。

    Variable capacitor having safety end switches disposed on an adjustable
screw at end face of capacitor housing
    85.
    发明授权
    Variable capacitor having safety end switches disposed on an adjustable screw at end face of capacitor housing 失效
    可变电容器,其安全端开关设置在电容器壳体的端面上的可调螺钉上

    公开(公告)号:US5590015A

    公开(公告)日:1996-12-31

    申请号:US561005

    申请日:1995-11-21

    IPC分类号: H01G5/06 H01G5/01 H01G5/00

    CPC分类号: H01G5/01

    摘要: The variable capacitor (1) is characterized by the fact that the safety end switches (6, 7) as well as a displacement detector (10) are integrated in the housing (1) or in an additional housing (5) provided at one of the front ends of the capacitor housing (1). Due to this construction, the entire device becomes more compact and more precise in operation.

    摘要翻译: 可变电容器(1)的特征在于,安全端开关(6,7)以及位移检测器(10)被集成在壳体(1)中或者设置在另外的壳体(5)中的附加壳体 电容器壳体(1)的前端。 由于这种结构,整个装置在操作中变得更加紧凑和更精确。

    Liquid filled variable capacitor
    86.
    发明授权
    Liquid filled variable capacitor 失效
    充满液体的可变电容器

    公开(公告)号:US5162972A

    公开(公告)日:1992-11-10

    申请号:US363691

    申请日:1982-03-30

    IPC分类号: H01G4/04 H01G5/00 H01G5/013

    CPC分类号: H01G5/0132

    摘要: A liquid filled variable capacitor or PFL which provides variable frequen impedance, and pulse length without changing the capacitor or PFL hardware. The capacitor is constructed from two or more conducting surfaces. A dielectric fluid mixture separates the conductors. A fluid supply system furnishes the dielectric fluid mixture to the conductors and provides for varying of the dielectric constant of the fluid and thus the capacitor operating characteristics, by varying the mixture composition. The fluid supply system has a mixing tank connected to both a supply of high dielectric constant fluid and a supply of low dielectric constant fluid. The high dielectric constant fluid and low dielectric constant fluid are mixed proportionally to obtain a dielectric fluid having the desired dielectric constant. A pump conveys the dielectric fluid between the mixing tank and the conductors while a heat exchanger controls the temperature of the dielectric fluid.

    摘要翻译: 一种充满液体的可变电容器或PFL,可在不改变电容器或PFL硬件的情况下提供可变频率,阻抗和脉冲长度。 电容器由两个或更多个导电表面构成。 介质流体混合物分离导体。 流体供应系统通过改变混合物组成将介电流体混合物提供给导体并且提供改变流体的介电常数并因此改变电容器的操作特性。 流体供应系统具有连接到高介电常数流体供应和低介电常数流体供应的混合罐。 高介电常数流体和低介电常数流体按比例混合,以获得具有所需介电常数的电介质流体。 当热交换器控制介电流体的温度时,泵将混合罐和导体之间的介质流体传送。

    Rotary Electric devices
    87.
    发明授权
    Rotary Electric devices 失效
    旋转电器

    公开(公告)号:US4774490A

    公开(公告)日:1988-09-27

    申请号:US682932

    申请日:1984-12-18

    申请人: Yukihiro Azuchi

    发明人: Yukihiro Azuchi

    CPC分类号: H01C10/005 H01C1/01 H01G5/00

    摘要: In a rotary electric device such as a trimmer capacitor or a variable resistor comprising a rotor contained in a case which is provided with an opening for receiving a screwdriver for rotating the rotor from the outside with a clearance being defined between an edge defining the opening and the rotor, a cover sheet is formed in a state covering the clearance and bonded to both of the case and the rotor, whereby the rotary electric device is closed. When the rotor is rotated in an adjusting stage, the cover sheet is readily broken and respective broken and separated parts of the cover sheet are individually retained by the case and the rotor.

    摘要翻译: 在诸如微调电容器或可变电阻器的旋转电气装置中,包括转子,所述转子包含在壳体中,该壳体设置有开口,用于接收用于从外部旋转转子的螺丝刀,其间隙限定在限定开口的边缘和 所述转子在覆盖所述间隙的状态下形成覆盖片,并且与所述壳体和所述转子结合,由此所述旋转电气装置关闭。 当转子在调节阶段中旋转时,盖板容易断裂,并且盖板的相应破碎和分离的部件被壳体和转子分别保持。

    Framing projector for use in a track lighting system
    88.
    发明授权
    Framing projector for use in a track lighting system 失效
    用于轨道照明系统的框架式投影机

    公开(公告)号:US4636925A

    公开(公告)日:1987-01-13

    申请号:US714010

    申请日:1985-03-18

    申请人: Paul Kristofek

    发明人: Paul Kristofek

    IPC分类号: F21S8/00 F21V21/34 H01G5/00

    摘要: A framing projector providing for alternatively mounting different optical lighting effect elements is disclosed. The projector includes a housing having a low voltage light source mounted to a removeable rear end-cap at the rear of the housing for directing a beam of light through a removeable optical effect element mounted to a removeable front end-cap. The front end-cap is adapted to alternatively mount a framing shutter system, an adjustable iris assembly, or a photographic slide and template holder. An adjustable double convex asymmetrical lens system is mounted to the front end-cap forwardly of the optical effect element and projects and focuses the image created by the optical effect element.

    摘要翻译: 公开了一种框架式投影仪,用于替代地安装不同的光学照明效果元件。 该投影仪包括壳体,该壳体具有安装在壳体后部的可移除后端盖的低电压光源,用于将光束引导通过安装到可移除的前端盖的可移除的光学效应元件。 前端盖适于交替安装框架挡板系统,可调节虹膜组件或照相滑板和模板夹。 可调双凸不对称透镜系统安装在光学效应元件前面的前端盖上,并投影并聚焦由光学效应元件产生的图像。

    Rotor shaft support mechanism in oscillator
    89.
    发明授权
    Rotor shaft support mechanism in oscillator 失效
    振子中的转子轴支撑机构

    公开(公告)号:US4589055A

    公开(公告)日:1986-05-13

    申请号:US697286

    申请日:1985-02-01

    CPC分类号: H01G5/00 H01G5/01

    摘要: In an oscillator having a frame, a variable capacitor mounted in the frame and having a rotor and a stator, the rotor having a rotor shaft rotatably supported on the frame, a rotor shaft support mechanism comprises: two sets of rotor shaft support portions provided in the frame, one of the two sets of rotor support portions being formed in the opposing side plates of the frame and being adapted to support the rotor shaft in a transverse direction, and the other one of the rotor shaft support portions being formed in the upper and lower plates of the frame and being adapted to support the rotor shaft in another vertical direction, whereby the rotor shaft can be supported by desiredly selected one of the two sets of rotor support portions.

    摘要翻译: 在具有框架的振荡器中,安装在框架中并具有转子和定子的可变电容器,转子具有可旋转地支撑在框架上的转子轴,转子轴支撑机构包括:两组转子轴支撑部分,设置在 所述框架,所述两组转子支撑部中的一组形成在所述框架的相对的侧板中,并且适于在横向方向上支撑所述转子轴,并且所述转子轴支撑部分中的另一个形成在所述上部 和下板,并且适于在另一垂直方向上支撑转子轴,由此转子轴可以由两组转子支撑部分中的期望选择的一个支撑。

    Method of manufacturing capacitance-type material level indicator probe
    90.
    发明授权
    Method of manufacturing capacitance-type material level indicator probe 失效
    制造电容型材料级指示器探头的方法

    公开(公告)号:US4499641A

    公开(公告)日:1985-02-19

    申请号:US419776

    申请日:1982-09-20

    IPC分类号: G01F23/26 H01G5/00

    摘要: A capacitance probe and method of probe manufacture for material level sensing systems and like applications. The probe includes a probe rod, a tubular guard coaxially surrounding the rod intermediate the rod ends, and insulation material formed as an integral piece in an injection molding operation surrounding the rod between the rod and guard and also surrounding and radially overlapping axially spaced ends of the tubular guard. One end of the rod and a portion of the guard intermediate its ends are exposed through the insulation material. The molded assembly is captured within a nipple or the like for mounting to a material vessel such that the exposed surfaces of the rod and guard are disposed internally of the vessel for capacitance coupling to material therewithin.

    摘要翻译: 电容探头和材料级感应系统等类似应用的探头制造方法。 探针包括探针杆,在棒端部之间同轴地围绕杆的管状护罩以及围绕杆和护罩之间的杆的注射成型操作中形成为整体件的绝缘材料,并且还包围和径向重叠的轴向间隔开的端部 管状护罩。 杆的一端和其端部之间的一部分防护件通过绝缘材料暴露。 模制组件被捕获在乳头或类似物内,用于安装到材料容器,使得杆和护罩的暴露表面设置在容器的内部,用于电容耦合到其中的材料。