摘要:
The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating devices from such a structure, and the devices fabricated from such a structure. In one embodiment, a first metal layer is carried by a substrate. A first sacrificial layer is carried by the first metal layer. A second metal layer is carried by the sacrificial layer. The second metal layer has a portion forming a micro-machined metal mesh. When the portion of the first sacrificial layer in the area of the micro-machined metal mesh is removed, the micro-machined metal mesh is released and suspended above the first metal layer a height determined by the thickness of the first sacrificial layer. The structure may be varied by providing a base layer of sacrificial material between the surface of the substrate and the first metal layer. In that manner, a portion of the first metal layer may form a micro-machined mesh which is released when a portion of the base sacrificial layer in the area of the micro-machined mesh is removed. Additionally, a second layer of sacrificial material and a third metal layer may be provided. A micro-machined mesh may be formed in a portion of the third metal layer. The structure of the present invention may be used to construct variable capacitors, switches and, when certain of the meshes are sealed, microspeakers and microphones.
摘要:
A load sensing system inexpensively monitors the weight and temperature of stored nuclear material for long periods of time in widely variable environments. The system can include an electrostatic load cell that encodes weight and temperature into a digital signal which is sent to a remote monitor via a coaxial cable. The same cable is used to supply the load cell with power. When multiple load cells are used, vast inventories of stored nuclear material can be continuously monitored and inventoried of minimal cost.
摘要:
A small variable capacitor including a movable section composed of a movable electrode supported by a supporting section. A driving electrode and a detecting electrode are provided facing the movable electrode. When an external bias voltage is applied between the movable electrode and the driving electrode, Coulomb force is generated between them. Due to that, the movable section is attracted toward the driving electrode while keeping a balance between its own resilience force and the Coulomb force. At this time, part of the movable section facing the detecting element is displaced more than the other part of the movable section facing the driving electrode. Thereby, because an electrostatic capacity between the movable section and the detecting electrode is inversely proportional to the average distance, a large electrostatic capacity may be obtained and variability of the electrostatic capacity becomes large.
摘要:
A mechanical capacitor includes a fixed electrode, a movable electrode separated from the fixed electrode by a gap, a spring attached to the movable electrode suspending it above the fixed electrode, opposing the fixed electrode and an insulator formed over either the fixed or the movable electrode in between the two electrodes. The movable electrode, the gap, the insulator and the fixed electrode form a mechanical capacitor. The capacitance of the mechanical capacitor is changed by applying a control voltage between the movable and the fixed electrodes. When a control voltage across the mechanical capacitor is increased, the movable electrode moves closer to the fixed electrode, which causes the mechanical capacitor capacitance to increase. When the control voltage across the mechanical capacitor is decreased, the movable electrode is moved farther away from the fixed electrode by the operation of the spring. This movement of the movable electrode away from the fixed electrode decreases the capacitance of the mechanical capacitor.
摘要:
The variable capacitor (1) is characterized by the fact that the safety end switches (6, 7) as well as a displacement detector (10) are integrated in the housing (1) or in an additional housing (5) provided at one of the front ends of the capacitor housing (1). Due to this construction, the entire device becomes more compact and more precise in operation.
摘要:
A liquid filled variable capacitor or PFL which provides variable frequen impedance, and pulse length without changing the capacitor or PFL hardware. The capacitor is constructed from two or more conducting surfaces. A dielectric fluid mixture separates the conductors. A fluid supply system furnishes the dielectric fluid mixture to the conductors and provides for varying of the dielectric constant of the fluid and thus the capacitor operating characteristics, by varying the mixture composition. The fluid supply system has a mixing tank connected to both a supply of high dielectric constant fluid and a supply of low dielectric constant fluid. The high dielectric constant fluid and low dielectric constant fluid are mixed proportionally to obtain a dielectric fluid having the desired dielectric constant. A pump conveys the dielectric fluid between the mixing tank and the conductors while a heat exchanger controls the temperature of the dielectric fluid.
摘要:
In a rotary electric device such as a trimmer capacitor or a variable resistor comprising a rotor contained in a case which is provided with an opening for receiving a screwdriver for rotating the rotor from the outside with a clearance being defined between an edge defining the opening and the rotor, a cover sheet is formed in a state covering the clearance and bonded to both of the case and the rotor, whereby the rotary electric device is closed. When the rotor is rotated in an adjusting stage, the cover sheet is readily broken and respective broken and separated parts of the cover sheet are individually retained by the case and the rotor.
摘要:
A framing projector providing for alternatively mounting different optical lighting effect elements is disclosed. The projector includes a housing having a low voltage light source mounted to a removeable rear end-cap at the rear of the housing for directing a beam of light through a removeable optical effect element mounted to a removeable front end-cap. The front end-cap is adapted to alternatively mount a framing shutter system, an adjustable iris assembly, or a photographic slide and template holder. An adjustable double convex asymmetrical lens system is mounted to the front end-cap forwardly of the optical effect element and projects and focuses the image created by the optical effect element.
摘要:
In an oscillator having a frame, a variable capacitor mounted in the frame and having a rotor and a stator, the rotor having a rotor shaft rotatably supported on the frame, a rotor shaft support mechanism comprises: two sets of rotor shaft support portions provided in the frame, one of the two sets of rotor support portions being formed in the opposing side plates of the frame and being adapted to support the rotor shaft in a transverse direction, and the other one of the rotor shaft support portions being formed in the upper and lower plates of the frame and being adapted to support the rotor shaft in another vertical direction, whereby the rotor shaft can be supported by desiredly selected one of the two sets of rotor support portions.
摘要:
A capacitance probe and method of probe manufacture for material level sensing systems and like applications. The probe includes a probe rod, a tubular guard coaxially surrounding the rod intermediate the rod ends, and insulation material formed as an integral piece in an injection molding operation surrounding the rod between the rod and guard and also surrounding and radially overlapping axially spaced ends of the tubular guard. One end of the rod and a portion of the guard intermediate its ends are exposed through the insulation material. The molded assembly is captured within a nipple or the like for mounting to a material vessel such that the exposed surfaces of the rod and guard are disposed internally of the vessel for capacitance coupling to material therewithin.