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公开(公告)号：US20240400378A1
公开(公告)日：2024-12-05
申请号：US18663172
申请日：2024-05-14
Applicant: Robert Bosch GmbH
Inventor： Peter Engelhart , Bernhard Gehl , Christoph Schelling
IPC: B81B3/00
Abstract: A MEMS transducer interacting with a fluid. The MEMS transistor includes: a layer stack of at least three MEMS layer structures in a layer sequence, an active MEMS layer structure being formed between a lower MEMS layer structure and an upper MEMS layer structure; at least one lamella formed in the active MEMS layer structure and deflectable laterally for interacting with the fluid; and a drive device for deflecting the movable lamella in a lateral direction perpendicular to the layer sequence, with a lower and/or upper electrode structure, which is formed adjacent to the active MEMS layer structure on the lower and/or upper MEMS layer structure. For applying an electrical voltage to the upper and/or lower electrode structure, a through-connection of the upper or lower MEMS layer structure is provided, which is electrically conductively connected to a contact element formed in the active MEMS layer structure.
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82.发明授权公开(公告)号：US11709354B2
公开(公告)日：2023-07-25
申请号：US16966425
申请日：2019-01-24
Applicant: Robert Bosch GmbH
Inventor： Christian Huber , Marc Schmid , Reinhold Roedel , Christoph Schelling , Christoph Daniel Kraemmer
CPC classification number: G02B26/0833 , G02B26/001
Abstract: A micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device are disclosed. The mirror device comprises a first mirror element, which is flat, and a second mirror element, which is flat. The first and second mirror elements are arranged substantially plane-parallel. An intermediate space between the first and second mirror elements has a lower index of refraction than one or both of the first mirror element and second mirror element. The first and second mirror elements are locally spaced apart from each other by at least one support structure. The support structure overlaps with the first and second mirror elements in an axial direction, which is perpendicular to the first and second mirror elements. The support structure includes a material that is different from a material from which one or both of the first and second mirror elements are formed.
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公开(公告)号：US20220003936A1
公开(公告)日：2022-01-06
申请号：US16919545
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Christoph Schelling , Alexander Huebel , Hartmut Kueppers , Stefan Pinter , Uma Krishnamoorthy
Abstract: An optical switch includes a bus waveguide supported by a substrate, an actuation electrode supported by the substrate, the actuation electrode having fins that protrude in a direction perpendicular to the substrate and to the bus waveguide, and a reaction electrode having interdigitated fins configured to form a comb drive with the actuation electrode. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the reaction electrode is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the reaction electrode is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.
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公开(公告)号：US20220003925A1
公开(公告)日：2022-01-06
申请号：US16919602
申请日：2020-07-02
Applicant: Robert Bosch GmbH
Inventor： Ning Wang , Alexander Huebel , Christoph Schelling , Jan Niklas Caspers , Hartmut Kueppers , Stefan Pinter
Abstract: An optical switch includes a first bus waveguide supported by a substrate, an optical antenna suspended over the first bus waveguide via a spring, and interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.
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公开(公告)号：US20210381850A1
公开(公告)日：2021-12-09
申请号：US17287027
申请日：2020-01-20
Applicant: Robert Bosch GmbH
Inventor： Christoph Schelling , Kerrin Doessel
Abstract: A method for operating a capacitive device. The method includes providing a pulsed readout signal having a pulse frequency at a readout signal channel, to which at least one capacitor unit of the capacitive device is electrically connected, and reading out the at least one capacitor unit of the capacitive device, which has a natural frequency with a natural frequency period duration tres, using the pulsed readout signal. Each voltage pulse of the pulsed readout signal is applied to the readout signal channel in n temporally offset voltage stages, n being a natural number greater than or equal to 2, and a time offset Δti is maintained between each two consecutively applied voltage stages in such a way that the following is true for at least one time offset Δti between the voltage stages: Δ t i = m * t res + t res n , m being a natural number greater than or equal to zero.
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Patent Agency Ranking
公开(公告)号：US10988373B2
公开(公告)日：2021-04-27
申请号：US15807811
申请日：2017-11-09
Applicant: Robert Bosch GmbH
Inventor： Christoph Schelling
Abstract: A MEMS component including a first substrate having at least one first insulating layer and a first metallic coating on a first side; and including a second substrate having at least one second insulating layer and a second metallic coating on a second side, the second substrate including a micromechanical functional element, which is connected electroconductively to the second metallic layer. The first side and the second side are positioned on each other, the first insulating layer and the second insulating layer being interconnected, and the first metallic coating and the second metallic coating being interconnected. A method for manufacturing a MEMS component is also described.
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87.发明申请公开(公告)号：US20210033847A1
公开(公告)日：2021-02-04
申请号：US16966425
申请日：2019-01-24
Applicant: Robert Bosch GmbH
Inventor： Christian Huber , Marc Schmid , Reinhold Roedel , Christoph Schelling , Christoph Daniel Kraemmer
Abstract: A micromechanical mirror device, a mirror system, and a method for producing a micromechanical mirror device are disclosed. The mirror device comprises a first mirror element, which is flat, and a second mirror element, which is flat. The first and second mirror elements are arranged substantially plane-parallel. An intermediate space between the first and second mirror elements has a lower index of refraction than one or both of the first mirror element and second mirror element. The first and second mirror elements are locally spaced apart from each other by at least one support structure. The support structure overlaps with the first and second mirror elements in an axial direction, which is perpendicular to the first and second mirror elements. The support structure includes a material that is different from a material from which one or both of the first and second mirror elements are formed.
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公开(公告)号：US20200255285A1
公开(公告)日：2020-08-13
申请号：US16733891
申请日：2018-06-27
Applicant: Robert Bosch GmbH
Inventor： Christian Doering , Christoph Schelling , Franziska Rohlfing , Johannes Kenntner , Thomas Friedrich , Timo Lindemann
Abstract: A micromechanical sensor device and a corresponding production method, in which the micromechanical sensor device is equipped with a sensor substrate having a front side and a rear side, a sensor region provided on the front side that can be brought into contact with an environmental medium, and a capping device, attached on the front side, for capping the sensor region. In the capping device and/or in the sensor substrate, one or more capillaries are formed for conducting the environmental medium onto the sensor region, a liquid-repellent layer being provided at least in some regions on the inner walls of the capillaries.
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公开(公告)号：US20200048072A1
公开(公告)日：2020-02-13
申请号：US16340770
申请日：2017-09-25
Applicant: Robert Bosch GmbH
Inventor： Christoph Schelling , Jochen Beintner
Abstract: A micromechanical sensor is described that includes: a substrate; a first functional layer that is situated on the substrate; a second functional layer that is situated on the first functional layer and that includes movable micromechanical structures; a cavity in the substrate that is situated below the movable mechanical structures; and a vertical trench structure that surrounds the movable micromechanical structures of the second functional layer and extends into the substrate down to the cavity.
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公开(公告)号：US10217926B2
公开(公告)日：2019-02-26
申请号：US14759137
申请日：2014-01-10
Applicant: Robert Bosch GmbH
Inventor： Tjalf Pirk , Andreas Krauss , Friedjof Heuck , Stefan Leidich , Christoph Schelling
IPC: H01L41/08 , H01L41/293 , H01L41/297 , H01L41/083 , H01L41/27 , H01L21/311
Abstract: A method for producing a multi-layer electrode system includes providing a carrier substrate having a recess in a top side of the carrier substrate. At least one wall of the recess is inclined in relation to a bottom side of the carrier substrate, which is opposite to the top side. The method also includes applying a multi-layer stack, which includes at least a first electrode layer, a second electrode layer, and a piezoelectric layer arranged between the first electrode layer and the second electrode layer, to the top side of the carrier substrate. At least the wall and a bottom of the recess are covered by at least a portion of the multi-layer stack.
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