公开(公告)号：US06339469B1

公开(公告)日：2002-01-15

申请号：US09601398

申请日：2000-12-15

Applicant: Laurent Bruel ,  Jérôme Belledent

Inventor： Laurent Bruel ,  Jérôme Belledent

IPC: G01J100

CPC classification number: G01J1/4257 ,  G01J9/00 ,  G03H1/0866 ,  G03H2001/0816 ,  G03H2226/13

Abstract: A method and device for determining the intensity and phase distribution of a coherent light beam, in a plane, including measuring the intensity Ii, i=1 . . . N, of the beam, in N planes, N≧3, having the plane wherein intensity and phase distribution is to be determined, choosing, for plane i=1, an initial phase matrix &phgr;1 and calculating a complex amplitude matrix, by term-wise multiplying the phase matrix ei&phgr;1 by the corresponding amplitude matrix A1, for each plane j>1: determining a propagated complex matrix B′j from the measured amplitude matrix Aj−1 of plane j−1 and the phase matrix &phgr; of plane j−1, extracting, from B′j, a phase matrix of plane j, and iterating the method up to convergence, with j=1 when j−1=N.

Abstract translation: 一种用于确定相干光束在平面中的强度和相位分布的方法和装置，包括测量强度I i，i = 1。 。 。 N，在N平面中，N> = 3，具有要确定强度和相位分布的平面，对于平面i = 1，选择初始相位矩阵phi1并且通过项计算复振幅矩阵 对于每个平面j> 1，将相位矩阵eiphi1乘以相应的幅度矩阵A1：从测量的平面j-1的振幅矩阵Aj-1和平面j的相位矩阵phi确定传播的复数矩阵B'j -1，从B'j提取平面j的相位矩阵，并且迭代该方法直到收敛，当j-1 = N时j = 1。

公开(公告)号：US06288408B1

公开(公告)日：2001-09-11

申请号：US05902587

申请日：1978-05-04

Applicant: Hector R. Durocher ,  John R. Kreick

Inventor： Hector R. Durocher ,  John R. Kreick

IPC: G01J100

CPC classification number: F41G7/224 ,  F41H11/02 ,  F41J2/02

Abstract: An infrared countermeasures system is provided by ganging a plurality of modulators each of which modulates the output of a radiant source to generate at least one collimated beam of radiation. The modulators are so disposed with respect to each other that the beams generated the reby are staggered in angular phase. When the modulators are rotated together they will provide at a point in space remote therefrom a signal comprising a burst of pulses followed by a dead time when no signal is present.

Abstract translation: 通过组合多个调制器来提供红外对策系统，每个调制器调制辐射源的输出以产生至少一个准直的辐射束。 调制器相对于彼此被布置成使得产生reby的光束以角相交错。 当调制器一起旋转时，它们将在远处的空间中提供包括脉冲串的信号，随后是没有信号存在的死区时间。

公开(公告)号：US06257045B1

公开(公告)日：2001-07-10

申请号：US09392110

申请日：1999-09-08

Applicant: Akihiro Hosokawa ,  Richard Ernest Demaray ,  Makoto Inagawa ,  Ravi Mullapudi ,  Harlan L. Halsey ,  Michael T. Starr

Inventor： Akihiro Hosokawa ,  Richard Ernest Demaray ,  Makoto Inagawa ,  Ravi Mullapudi ,  Harlan L. Halsey ,  Michael T. Starr

IPC: G01J100

CPC classification number: G05B19/41815 ,  G05B19/401 ,  G05B19/402 ,  Y02P90/08

Abstract: Automated systems and methods for processing substrates are described. An automated processing system includes: a vacuum chamber; a substrate support located inside the vacuum chamber and constructed and arranged to support a substrate during processing; and a substrate alignment detector constructed and arranged to detect if the substrate is misaligned as the substrate is transferred into the vacuum chamber based upon a change in a physical condition inside the system. The substrate alignment detector may include a vibration detector coupled to the substrate support. A substrate may be transferred into the vacuum chamber. The position of the substrate may be recorded as it is being transferred into the vacuum chamber. Misalignment of the substrate with respect to the substrate support may be detected. The substrate may be processed. The processed substrate may be unloaded from the vacuum chamber. The position of the processed substrate may be recorded as it is being unloaded from the vacuum chamber. Any substrate misalignment may be compensated for based upon the difference in the recorded substrate positions.

公开(公告)号：US06236046B1

公开(公告)日：2001-05-22

申请号：US09167996

申请日：1998-10-07

Applicant: Yoshifumi Watabe ,  Yoshiaki Honda ,  Kouichi Aizawa ,  Tsutomu Ichihara

Inventor： Yoshifumi Watabe ,  Yoshiaki Honda ,  Kouichi Aizawa ,  Tsutomu Ichihara

IPC: G01J100

CPC classification number: G01J5/061 ,  G01J5/04 ,  G01J5/045 ,  G01J5/06 ,  G01J5/10 ,  G01J2005/068 ,  H01L2224/48091 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An infrared sensor is formed with a first infrared detecting element for infrared detection disposed in a container through a supporting substrate, and a second infrared detecting element for temperature compensation also disposed in the container to be shielded by the supporting substrate of the first infrared detecting element from incident infrared within the container, while a temperature sensing section of the first infrared detecting element is born in non-contacting state with respect to a supporting part of the substrate for the element, whereby the sensitivity can be remarkably improved with a simpler arrangement while keeping a high precision and inexpensiveness.

Abstract translation: 红外线传感器形成有用于红外线检测的第一红外线检测元件，其通过支撑基板设置在容器中，并且用于温度补偿的第二红外检测元件也设置在容器中以被第一红外线检测元件的支撑基板屏蔽 从容器内的入射红外线，第一红外线检测元件的温度检测部分相对于用于元件的基板的支撑部分处于非接触状态，由此可以通过更简单的布置显着提高灵敏度，同时 保持高精度和廉价。

公开(公告)号：US06195159B1

公开(公告)日：2001-02-27

申请号：US09223641

申请日：1998-12-30

Applicant: Robert E. MacDonald ,  Danielle M. Berven

Inventor： Robert E. MacDonald ,  Danielle M. Berven

IPC: G01J100

CPC classification number: G01M11/0264 ,  G01M11/0221 ,  G01M11/0228

Abstract: A system which determines one or more properties of a lens includes a light source and a target pattern illuminated by the light source illuminates and substantially positioned at a first conjugate position of the lens. A detector, including an active surface, is positioned at a second conjugate position of the lens such that an image of the target pattern is formed on the active surface. The detector generates an analog electrical signal based on the image and the a generator converts the electrical signal to a representative digital signal for processing. In the system, the detector is movable relative to the lens to test the lens at plural focus positions, and plural detector output signals correspond to a feature of the target pattern at plural focus positions. A memory stores computer-executable process steps, and a processor executes the process steps stored in the memory so as to obtain a modulation transfer function value of the lens based on a position of the detector with respect to the lens, a rotational orientation of the lens about its optical axis, a color of the light and the lens distortion measured at a plurality of field positions.

Abstract translation: 确定透镜的一个或多个属性的系统包括光源，由光源照射的目标图案照亮并基本上位于透镜的第一共轭位置。 包括活性表面的检测器位于透镜的第二共轭位置，使得目标图案的图像形成在活性表面上。 检测器基于图像生成模拟电信号，并且发生器将电信号转换为代表性的数字信号以进行处理。 在该系统中，检测器相对于透镜是可移动的，以在多个聚焦位置测试透镜，并且多个检测器输出信号对应于多个聚焦位置处的目标图案的特征。 存储器存储计算机可执行处理步骤，并且处理器执行存储在存储器中的处理步骤，以便基于检测器相对于透镜的位置获得透镜的调制传递函数值，旋转取向 透镜围绕其光轴，在多个场位置处测量的光的颜色和透镜畸变。

公开(公告)号：US06819413B2

公开(公告)日：2004-11-16

申请号：US10650666

申请日：2003-08-29

Applicant: Daniel R. Neal ,  Richard J. Copland ,  Ron R. Rammage ,  Daniel M. Topa ,  Daniel R. Hamrick

Inventor： Daniel R. Neal ,  Richard J. Copland ,  Ron R. Rammage ,  Daniel M. Topa ,  Daniel R. Hamrick

IPC: G01J100

CPC classification number: G01M11/0257 ,  G01J9/00 ,  G02B7/28 ,  G02B27/30 ,  G02B27/50

Abstract: An enhanced dynamic range wavefront sensing system includes a light source disposed on a first side of an optically transmissive device, a wavefront sensor disposed on a second side of an optically transmissive device, a relay imaging system disposed between the optically transmissive device and the wavefront sensor, and means for adjusting a distance between the light source and the optically transmissive device. Beneficially, the relay imaging system includes a range-limiting aperture to insure that the wavefront sensor never goes out of range so that a feedback system can be employed to move the light source one focal length away from the optically transmissive device.

Abstract translation: 增强型动态范围波前感测系统包括设置在光学透射装置的第一侧上的光源，设置在光学透射装置的第二侧上的波前传感器，设置在光学透射装置和波前传感器之间的中继成像系统 以及用于调节光源和光学透射装置之间的距离的装置。 有利的是，继电器成像系统包括范围限定孔径，以确保波前传感器永远不会超出范围，使得可以采用反馈系统将光源的一个焦距移动远离光学透射装置。

公开(公告)号：US06774366B1

公开(公告)日：2004-08-10

申请号：US10637092

申请日：2003-08-07

Applicant: Melvin H. Friedman ,  John M. Hall

Inventor： Melvin H. Friedman ,  John M. Hall

IPC: G01J100

CPC classification number: G01S17/89 ,  G01S7/4816

Abstract: An apparatus and method for enhancing an image relayed by a central beam of collimated light centered on the optical axis of a lens with an aperture area of A and focused on the focal plane of the lens. The apparatus having an aperture at least n times as big as A centered on the optical axis of the lens to admit a collimated relay beam including the central beam and a diverter means for separating the relay beam into n collimated facet beams equal to the central beam, but exclusive thereof, and redirecting them through the lens aperture to produce n additional images on the same focal plane. The apparatus also including a processor with a separate opto-electronic device for each image that converts it between electronic and photonic states, the electronic images being stored in the processor.

Abstract translation: 一种用于增强以具有孔径区域A的透镜的光轴为中心的聚焦在透镜的焦平面上的由准直光中央束中继的图像的装置和方法。 该装置的孔径至少为以透镜中心的A为中心的n倍，以允许包括中心光束的准直中继光束以及用于将中继光束分成等于中心光束的n个准直小面光束的转向装置 ，但不排他，并通过镜头孔径重定向，以在同一焦平面上产生n个附加图像。 该装置还包括具有用于每个图像的单独的光电子装置的处理器，其在电子和光子状态之间转换它，电子图像被存储在处理器中。

公开(公告)号：US06741338B2

公开(公告)日：2004-05-25

申请号：US09974520

申请日：2001-10-09

Applicant: Bruce B. McArthur ,  Adlai H. Smith

Inventor： Bruce B. McArthur ,  Adlai H. Smith

IPC: G01J100

CPC classification number: G01M11/0264 ,  G01J9/00 ,  G01M11/0207 ,  G03F7/70591 ,  G03F7/706

Abstract: A process of measuring the radiant intensity profile of an effective source of a projection image system that has an effective source, an object plane, an imaging objective, an exit pupil, and an image plane. The improved process consists of selecting at least one field point and a corresponding aperture plane aperture and projecting a plurality of images of the selected field point through the corresponding selected aperture plane aperture at a plurality of various intensities of the effective source. By analyzing the recorded images of the effective source at various intensities it is possible to determine a radiant intensity profile of the image source at the selected field point.

Abstract translation: 测量具有有效源，物平面，成像物镜，出射光瞳和图像平面的投影图像系统的有效光源的辐射强度分布的过程。 改进的过程包括选择至少一个场点和对应的孔径平面孔径，并且以有效源的多个不同强度的多个强度投射所选择的场点的多个图像通过对应的所选孔径平面孔径。 通过以各种强度分析有效源的记录图像，可以在所选择的场点确定图像源的辐射强度分布。

公开(公告)号：US06737637B1

公开(公告)日：2004-05-18

申请号：US10193826

申请日：2002-07-12

Applicant: Michael A. Balster ,  Arthur N. Hicks

Inventor： Michael A. Balster ,  Arthur N. Hicks

IPC: G01J100

CPC classification number: G01J1/00

Abstract: A plurality of image sensors are tested concurrently by supplying light emitted by a light source to a first integrating sphere having an input port that receives the light emitted by the light source and having an output port providing output light. The output light of the first integrating sphere is spatially divided to provide a plurality of divided lights and the plurality of divided lights are supplied to a plurality of second integrating spheres respectively, each second integrating sphere having an input port that receives a divided light and an output port providing an output light. The output lights of the second integrating spheres are directed onto active regions of respective image sensors.

Abstract translation: 多个图像传感器通过将由光源发射的光提供给具有接收由光源发射的光并具有提供输出光的输出端口的输入端口的第一积分球同时测试。 第一积分球的输出光在空间上被分割以提供多个分光，并且多个分光被分别提供给多个第二积分球，每个第二积分球具有接收分光的输入端和 输出端口提供输出光。 第二积分球的输出光被引导到各个图像传感器的有效区域。

公开(公告)号：US06720566B2

公开(公告)日：2004-04-13

申请号：US10224549

申请日：2002-08-20

Applicant: Robert Michael Blandford

Inventor： Robert Michael Blandford

IPC: G01J100

CPC classification number: F26B3/28

Abstract: A shutter for use with a light source is provided. The shutter includes a first section that has an inner receiving surface for receiving at least part of a reflector liner. A second section is present and has an inner receiving surface for receiving at least part of the reflector liner. The second section is removably securable to the first section. The sections cooperate to provide adequate force to the reflector liner to cause the reflector liner to be retained on the inner receiving surfaces between engaging projections on the sections during attachment between the first and second sections. Detachment of the second section from the first section allows for the removal of the reflector liner from the receiving surfaces.

Abstract translation: 提供了一种用于光源的快门。 快门包括具有用于接收反射器衬垫的至少一部分的内部容纳表面的第一部分。 存在第二部分并且具有用于容纳至少部分反射器衬垫的内部接纳表面。 第二部分可拆卸地固定到第一部分。 所述部分协作以向所述反射器衬垫提供足够的力，以使得所述反射器衬套在所述第一部分和第二部分之间的附接期间被保持在所述部分上的接合突起之间的所述内部接收表面上。 从第一部分分离第二部分允许从接收表面移除反射器衬垫。