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公开(公告)号：US3358194A
公开(公告)日：1967-12-12
申请号：US44436065
申请日：1965-03-31
申请人： IND CONTROLS INC
发明人： GEORGE WINTRISS
IPC分类号： G01P15/135
CPC分类号： G01P15/135
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公开(公告)号：US2867382A
公开(公告)日：1959-01-06
申请号：US44029954
申请日：1954-06-29
申请人： WEAVER PRESTON R
发明人： WEAVER PRESTON R
IPC分类号： G01P15/135
CPC分类号： G01P15/135
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公开(公告)号：US2662956A
公开(公告)日：1953-12-15
申请号：US28596152
申请日：1952-05-03
发明人： BAREFORD ROBERT E
IPC分类号： G01C9/22 , G01P15/12 , G01P15/135
CPC分类号： G01C9/22 , G01P15/12 , G01P15/135
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公开(公告)号：US2549863A
公开(公告)日：1951-04-24
申请号：US66163346
申请日：1946-04-12
申请人： THORNTON THEODORE W
发明人： THORNTON THEODORE W
IPC分类号： G01P15/135 , H01H35/14
CPC分类号： H01H35/145 , G01P15/135
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公开(公告)号：US2311637A
公开(公告)日：1943-02-23
申请号：US41347641
申请日：1941-10-03
申请人： BUCHANAN JAMES A
发明人： BUCHANAN JAMES A
IPC分类号： G01P15/135
CPC分类号： G01P15/135 , Y10S439/913
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公开(公告)号：US2053436A
公开(公告)日：1936-09-08
申请号：US48014730
申请日：1930-09-06
发明人： KNOWLES DEWEY D
IPC分类号： G01P15/135
CPC分类号： G01P15/135
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公开(公告)号：US1921833A
公开(公告)日：1933-08-08
申请号：US51847831
申请日：1931-02-26
申请人： MCGORUM WILLIAM B
发明人： MCGORUM WILLIAM B
IPC分类号： G01P15/135
CPC分类号： G01P15/135
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公开(公告)号：US12123891B2
公开(公告)日：2024-10-22
申请号：US17873799
申请日：2022-07-26
发明人： Kenta Sato
IPC分类号： G01P15/08 , G01L1/10 , G01P1/02 , G01P15/097 , G01P15/135 , G01P15/18
CPC分类号： G01P15/0802 , G01P1/023 , G01P15/097 , G01P15/135 , G01P15/18 , G01L1/106
摘要： A physical quantity sensor includes: a base portion; a first arm portion, a second arm portion, and a third arm portion that are coupled to the base portion and that are provided with fixing portions; a movable portion disposed between the first arm portion and the second arm portion and between the first arm portion and the third arm portion in a plan view; a constricted portion that is disposed between the base portion and the movable portion, and that couples the base portion and the movable portion; and a physical quantity detection element that is disposed across the constricted portion in the plan view and that is attached to the base portion and the movable portion. Thin portions are formed at least at two positions in at least one of the second arm portion and the third arm portion.
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公开(公告)号：US11867716B2
公开(公告)日：2024-01-09
申请号：US18162874
申请日：2023-02-01
发明人： Fumiya Ito
IPC分类号： G01P15/135 , G01P15/08 , G01P15/125 , B81B7/00
CPC分类号： G01P15/135 , B81B7/0016 , G01P15/0802 , G01P15/125 , B81B2201/0235 , G01P2015/0831 , G01P2015/0871
摘要： A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.
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公开(公告)号：US09977046B2
公开(公告)日：2018-05-22
申请号：US15231662
申请日：2016-08-08
IPC分类号： G01P15/135 , G01P15/097 , G01P15/16 , G01P15/08
CPC分类号： G01P15/135 , G01P15/0802 , G01P15/097 , G01P15/16 , G01P2015/0805 , H01H35/14
摘要： A device includes two electrically isolated metalized posts attached in close proximity to each other on a bendable substrate. When the bendable substrate bends concavely with respect to the surface onto which the posts are mounted, the distance between the tops of the two posts decreases. At a fixed bending curvature, the two posts will meet and complete an electrical circuit. The posts comprise a flexible material so that the meeting of the posts has minimal effect on the spring constant or damping coefficient of the harmonic oscillation.
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