摘要:
Disclosed is an automatic constant pressure polishing apparatus. The automatic constant pressure polishing apparatus comprises a housing having a hollow section therein, a rubber pad installed in the housing and having superior expansion and contraction characteristics, a pressure fixture having a male screw section, which is formed on an outer peripheral surface thereof in order to press and fix the rubber pad, and a central hole formed at a central portion thereof, a slider screw-coupled into the housing to adjust pressure in the housing according to a rotational degree of the rotating shaft, and a polishing pad installed at a front end portion of the housing.
摘要:
The present invention provides a chuck for receiving and supporting a semiconductor workpiece for processing. The chuck includes a body for supporting the workpiece. The body is porous or has a plurality of openings, apertures or channels. A compressible corrosion resistant member is disposed around the outer periphery of the supporting body. The chuck includes a means for evacuating air from the pores or plurality of openings, apertures or channels in the body to create a vacuum. In operation, a workpiece is placed onto the supporting body. The device side of the workpiece is preferably placed on the compressible corrosion resistant member. Upon evacuating the air (or other gas) from the pores or openings in the supporting body, a vacuum is created, drawing the workpiece toward the supporting body. A seal is created and maintained between the device side of the workpiece and the compressible corrosion resistant member. Consequently, the entire backside of the workpiece is exposed for processing while at the same time the device side of the workpiece is protected from any potentially damaging process fluids. By exposing the backside of the workpiece to a chemical etchant, semiconductor workpieces can be thinned to a desired thickness.
摘要:
A grinding-band swaying device for a band grinding machine includes a motor pivotally connected with a machine base and driving an endless grinding band around two rollers and forming a fulcrum for swaying, a speed-reducing unit and an eccentric wheel. The speed-reducing unit is positioned under the motor, having a shaft connected with the eccentric wheel. An elastic compressing unit is provided between the speed-reducing unit or the motor and the machine base, and then the eccentric wheel is kept to elastically urge the machine base. When the motor together with the speed-reducing unit rotates the eccentric wheel, the speed-reducing unit, the motor and the roller sway regularly with the fulcrum and then the endless grinding band moves forward and also sways regularly synchronously to perform grinding against a work with grinding angles constantly altered to achieve balanced grinding result.
摘要:
The bench for machining elongate objects such as strips of marble and the like comprises a generally boxlike body having a surface over which a portable profiling machine can be moved and a side comprising means for holding elongate objects or strips or the like in position by means of a plurality of pneumatic suction inlets which, by the action of low pressure, hold the elongate object stably during its machining.
摘要:
A carrier fixture that does not include transport channels or openings for directing a slurry to a substrate being polished. The carrier fixture may have an inner support coupled to a ring member that contacts a substrate during polishing. The carrier fixture may also have outer supports coupled to the ring member. The carrier fixture is used to manufacture integrated circuits.
摘要:
A polishing work holder for supporting a lens to be polished for use in a lens polishing machine is disclosed. The work holder comprises a holder body rotatably supported by a housing and having a recess portion formed on a rotating shaft of one end face thereof and a suction hole opened at the end face, a lens receptacle having a hole communicated with the suction hole to suck and hold a lens at one end surface, a spherical body intervened between the recess portion of the holder body and the lens holder so as to contact the another end face and for carrying the lens receptacle tiltably and movably in the crossing direction to the axis of the holder body, a fitting ring secured to the holder body concentrically and loosely fitted onto an outer periphery face of the lens or an outer periphery face of the lens receptacle so as to limit the tilting of the lens and the moving in the diametrical direction, and a sealing member provided between the holder body and the receptacle at outside of the suction hole.
摘要:
A rotary polisher of the kind used for polishing hand held objects such as dentures has a drive motor mounted in a base frame with a main drive wheel connected for direct drive by the drive motor. A tool holder drive shaft has a rotary tool at one end and a tool drive wheel which is engagable with the main drive wheel to rotate the tool holder drive shaft and rotary tool. A manually operated lever mechanism is connected between the base frame and the tool holder drive shaft to move the tool drive wheel into and out of engagement with the main drive wheel for controlling rotation of the rotary tool.
摘要:
An improved vacuum chuck for holding a thin fragile workpiece, such as a silicon wafer used as an electronic component, as the workpiece is being polished. The improved chuck has a removable and replaceable ring surrounding the workpiece to hold the workpiece in the event of an accidental loss of vacuum, and the chuck is grooved to distribute the differential pressure across the wafer over the entire wafer to avoid distortion due to localized pressure differences. The increased holding power of the chuck permits the use of higher downward pressures on the workpiece which speeds the polishing action both by increased abrasion and by increased chemical erosion which is accelerated by the higher heat of friction.
摘要:
An apparatus for grinding the faces of edge-supported workpieces such as metal slabs, billets, coil, strip and the like by means of a vertically disposed grinding head which can include an abrasive belt, with the apparatus including guide apparatus whereby the workpiece can be presented to the abrasive belt, and if desired, can be presented a plurality of times in reverse directions to the abrasive belt surface whereby several cuts can be made on the same surface, with the guide apparatus including a turntable whereby the workpiece can be turned 180* for grinding both sides.