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公开(公告)号：US20200229404A1
公开(公告)日：2020-07-23
申请号：US16754948
申请日：2018-10-09
发明人： Yuji Miyashita , Akira Nakanishi , Saori Koto
摘要： [Problem] To provide a fish egg processing apparatus capable of performing predetermined processing on fertilized eggs with higher efficiency, and collecting proper fish eggs.[Solution] When a housing recess that houses fish eggs one by one is conveyed to a predetermined processing position, and a capillary is raised and lowered to inject a gene solution, the housing recess is imaged from a direction that intersects a depth direction and a conveying-in direction, and an injection operation by the capillary is controlled by determining, along a possibility determination flow, whether to inject a predetermined substance into each of the fish eggs before processing, based on a previously determined condition.
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公开(公告)号：US10672632B2
公开(公告)日：2020-06-02
申请号：US15554135
申请日：2016-02-05
IPC分类号： H01L21/67 , B01D53/40 , B01D53/42 , C12M1/12 , F24F13/28 , F24F6/00 , F24F7/06 , H01L21/687 , B01D53/04 , F24F7/00 , B65G49/07 , H01L21/677
摘要： To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).
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公开(公告)号：US20200168495A1
公开(公告)日：2020-05-28
申请号：US16774758
申请日：2020-01-28
IPC分类号： H01L21/677 , H01L21/67 , H01L21/673
摘要： Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system. The door opening/closing system is provided with: a base which constitutes a part of a wall isolating a conveyance space from an external space, an opening portion provided in the base; a door which is capable of opening and closing the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door, a sealed space which is constituted by the base, the first seal member, the second seal member, a lid member, and the door when the container is in a state of contact with the opening portion with the first seal member therebetween, a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit 88 which evacuates the sealed space.
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公开(公告)号：US10658217B2
公开(公告)日：2020-05-19
申请号：US15554152
申请日：2016-02-05
IPC分类号： H01L21/677 , H01L21/67 , H01L21/673 , H01L21/02
摘要： The transfer chamber transfers a wafer (W) as a transferred object to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) as a chemical filter provided in the midstream of the circulation path (CL), a humidity detector (HG2) as a humidity detection means which detects internal humidity, a gas supply means (NS) which supplies gas to the inside of the transfer chamber (1), and a moisture supply means (HS) which supplies moisture content to the inside of the transfer chamber (1). The moisture supply means (HS) is made to operate in accordance with a humidity detection value by the humidity detection means.
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65.发明申请公开(公告)号：US20200071092A1
公开(公告)日：2020-03-05
申请号：US16521010
申请日：2019-07-24
发明人： Saori Koto , Akira Nakanishi
IPC分类号： B65G51/03
摘要： A soft spherical object conveying apparatus according to the present invention comprising: a water tank into which at least one soft spherical object is introduced; a conveying rotary member that rotates in the water tank and has a peripheral part provided with a plurality of housing recesses housing each one of the soft spherical objects; a guide member disposed along part of the peripheral part of the conveying rotary member in the water tank; and a removing roller that rotates on an upstream side of the guide member in the water tank in a rotation direction of the conveying rotary member, such that a part of the removing roller opposed to the peripheral part of the conveying rotary member moves in a direction away from the guide member.
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公开(公告)号：US10361107B2
公开(公告)日：2019-07-23
申请号：US15738027
申请日：2016-06-08
发明人： Haruki Takeuchi , Kazuhiro Tsuji , Minetaka Maeda
IPC分类号： H01L21/677 , H01L21/673 , A61L2/20
摘要： Reliability in the restriction of the movement of a container is improved.A content moving device 1 includes: a table portion 20 on which a container 50 is placed; and a restricting mechanism 30. A flange 55 of the container 50 is shaped to provide a recessed portion 56a. A restricting mechanism 30 includes: a collar portion 31; a first restricting portion 32 configured to be located in the recessed portion 56a; a second restricting portion 33a provided above the first restricting portion 32 and inward of the collar portion 31; and a second moving mechanism. The second moving mechanism is configured to move the second restricting portion 33a along an extending direction B between a first position, in which the second restricting portion 33a is opposed to the flange 55 of the container 50 in an up-down direction A, and a second position, in which the second restricting portion 33a is opposed to the recessed portion 56a in the up-down direction A without being opposed to the flange 55 in the up-down direction A.
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公开(公告)号：US10340168B2
公开(公告)日：2019-07-02
申请号：US14607667
申请日：2015-01-28
发明人： Mitsutoshi Ochiai , Takaaki Nakano
IPC分类号： H01L21/67 , H01L21/677
摘要： A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
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公开(公告)号：US20180282675A1
公开(公告)日：2018-10-04
申请号：US15766037
申请日：2016-10-04
发明人： Haruki TAKEUCHI , Yoshimasa SUDA
摘要： A connection mechanism includes two connection parts. Each connection part includes a first flange including a through hole and an attaching portion by which the first flange is attached to a partial wall portion while the through hole faces an opening. The attaching portion includes: a vertical adjuster which adjusts the attaching position of the first flange so that a surface of the first flange, which is opposite to a surface of the first flange facing the partial wall portion, is vertical; and a rotation adjuster which adjusts the attaching position of the first flange about a horizontal axis passing the center of the through hole and extending in the thickness direction. The attaching position of a first flange can be individually adjusted.
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公开(公告)号：US20180204753A1
公开(公告)日：2018-07-19
申请号：US15750379
申请日：2016-07-12
IPC分类号： H01L21/677 , H01L21/673 , H01L21/67
摘要： A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.
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公开(公告)号：US20170194850A1
公开(公告)日：2017-07-06
申请号：US15463247
申请日：2017-03-20
IPC分类号： H02K33/18
CPC分类号： H02K33/18 , H02K33/16 , H02K41/035
摘要： The linear actuator includes an inner core (2), and an outer core (3) provided outside the inner core in a radial direction while being supported by a pair of flat springs (41 and 42). Permanent magnets (23 and 24) are formed at one of the inner core and the outer core, and magnetic pole portions (31a and 32a) are formed at the other of the inner core and the outer core to face the permanent magnet with predetermined gaps formed therebetween. Spacers (71 and 72) are respectively provided between the inner core and the flat springs, abutting portions are respectively configured by abutting facing surfaces of the spacers and the inner core and facing surfaces of the spacers and the flat springs adjacent to the spacers in the axial direction, and at least an engagement portion including a recess and a protrusion are arranged at the abutting portions.
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