CRYOPUMP
    636.
    发明申请
    CRYOPUMP 有权

    公开(公告)号:US20210222685A1

    公开(公告)日:2021-07-22

    申请号:US16305730

    申请日:2018-03-07

    Abstract: The embodiments of the present disclosure relates a cryopump including a pump housing including a suction port, a cold head located within the pump housing, a shielding element located within the pump housing and covering the cold head, a baffle at the suction port, the baffle including a gas passage with an inlet and an outlet, an orthographic projection of the baffle to the cross section of the pump housing completely covers an orthographic projection of the suction port thereto, the gas passage includes a first portion and a second portion intersecting with each other, the inlet is defined by one end of the first portion, the outlet is defined by one end of the second portion.

    METHOD FOR FABRICATING ARRAY SUBSTRATE, ARRAY SUBSTRATE, DISPLAY PANEL AND DISPLAY DEVICE

    公开(公告)号:US20210202543A1

    公开(公告)日:2021-07-01

    申请号:US16075272

    申请日:2018-01-04

    Abstract: An array substrate, its fabricating method, a display panel and a display device are disclosed. The method includes forming an active layer on a substrate, forming a gate layer on a side of the active layer facing or away from the substrate; forming an interlayer dielectric layer on a side of the active layer away from the substrate, which includes a first, second, third and fourth film stacked in this order in a direction away from the substrate; forming a via hole extending from the interlayer dielectric layer to the active layer; forming a source and drain layer on a side of the interlayer dielectric layer away from the substrate, and in a region not covered by the source and drain layer, removing the fourth film in the interlayer dielectric layer at a same time as forming the source and drain layer.

Patent Agency Ranking