公开(公告)号：US08436295B2

公开(公告)日：2013-05-07

申请号：US13421762

申请日：2012-03-15

Applicant: Yoshiro Shiokawa ,  Megumi Nakamura ,  Qiang Peng

Inventor： Yoshiro Shiokawa ,  Megumi Nakamura ,  Qiang Peng

IPC: H05H3/02 ,  G01V5/04 ,  G01V5/00

CPC classification number: G01L21/32

Abstract: The present invention provides a device for measuring a mean free path capable of measuring directly the mean free path of a charged particle, a vacuum gauge, and a method for measuring a mean free path. The device for measuring a mean free path according to one embodiment of the invention includes an ion source for generating an ion, a collector (24a) for detecting the number of first charged particles being charged particles having a first flight distance L1 that is a flight distance of zero or more from the ion source, and a collector (24b) for detecting the number of second charged particles having a second flight distance longer than the first flight distance. The control part of the device calculates the mean free path from a ratio between the numbers of the first and second charged particles.

Abstract translation: 本发明提供了一种用于测量能够直接测量带电粒子的平均自由程，平均自由程的平均自由程的装置，以及用于测量平均自由程的方法。 根据本发明的一个实施例的用于测量平均自由路径的装置包括用于产生离子的离子源，用于检测第一带电粒子的数量的收集器（24a），其是具有作为飞行的第一飞行距离L1的带电粒子 距离离子源的距离为零以上，以及用于检测具有比第一飞行距离长的第二飞行距离的第二带电粒子的数量的收集器（24b）。 设备的控制部分根据第一和第二带电粒子的数量之间的比率计算平均自由程。

公开(公告)号：US20110062961A1

公开(公告)日：2011-03-17

申请号：US12860050

申请日：2010-08-20

Applicant: Gerardo A. Brucker

Inventor： Gerardo A. Brucker

IPC: G01L21/30

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

公开(公告)号：US07791350B2

公开(公告)日：2010-09-07

申请号：US11877590

申请日：2007-10-23

Applicant: Lin Xiao ,  Pi-Jin Chen ,  Zhao-Fu Hu ,  Yang Wei ,  Liang Liu ,  Shou-Shan Fan

Inventor： Lin Xiao ,  Pi-Jin Chen ,  Zhao-Fu Hu ,  Yang Wei ,  Liang Liu ,  Shou-Shan Fan

IPC: G01L21/30 ,  H01J49/10

CPC classification number: G01L21/34 ,  G01L21/32

Abstract: An ionization vacuum gauge includes a linear cathode, an anode, and an ion collector. The linear cathode, the anode, and the ion collector are concentrically aligned and arranged from center to outer, in that order. The linear cathode includes a linear base and a field emission film deposited coating on the linear base. The ionization vacuum gauge with low power consumption can be used in a high vacuum system and/or some special vacuum system that is sensitive to heat and light. Such a gauge can be used to determine, simply yet accurately, pressures at relatively high vacuum levels.

Abstract translation: 电离真空计包括线性阴极，阳极和离子收集器。 线性阴极，阳极和离子收集器按照顺序从中心到外部同心对准和布置。 线性阴极包括在线性基底上的线性基底和场发射膜沉积的涂层。 具有低功耗的电离真空计可用于高真空系统和/或一些对热和光敏感的特殊真空系统。 这样的量规可以用于简单而准确地确定在相对高的真空度下的压力。

公开(公告)号：US20050184735A1

公开(公告)日：2005-08-25

申请号：US10799446

申请日：2004-03-12

Applicant: Paul Arnold ,  Paul Rutt

Inventor： Paul Arnold ,  Paul Rutt

IPC: G01L21/32 ,  H01J41/00 ,  H01J41/04 ,  G01N27/62

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.

Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积并将电子保持在阳极区域中的阳极。 电离计可以具有多个电子源和/或集电极。 集电极可以位于阳极体积内或阳极体积外。 电离计可以具有用于基于质荷比分离离子的质量过滤器。 电离计可以是衡量压力的Bayard-Alpert型，也可以是确定气体类型的残留气体分析仪。

公开(公告)号：US06515482B2

公开(公告)日：2003-02-04

申请号：US09770656

申请日：2001-01-29

Applicant: Yousuke Kawasaki

Inventor： Yousuke Kawasaki

IPC: G01L2130

CPC classification number: G01L21/32 ,  H01J41/02

Abstract: An ionization vacuum gauge which can stably perform measurements of pressure in the intermediate vacuum to high vacuum regions, that is performed by an ionization-type first measurement element, as well as in the measurement region intrinsic to a second measurement element. This ionization vacuum gauge comprises a measurement element vessel, and first and second measurement parts provided within this measurement element vessel. The first measurement part comprises component electrodes including a filament, grid and ion collector, and is of an ionization-type construction for measurement of the pressure of vacuum states. The second measurement part is of a construction having different functions from those of the first measurement part, and is disposed in a space that is near the extension of the grid axis, and is away from the principal space for flying of thermal electrons emitted from the filament. A shield plate is provided between the second measurement part and the component electrodes, to spatially separate the second measurement part and the component electrodes. The second measurement part is fixed to an element fastening plate made from a material with excellent thermal conductivity.

Abstract translation: 一种电离真空计，其可以稳定地执行中间真空中的压力到高真空区域的测量，其由电离型第一测量元件以及第二测量元件固有的测量区域进行。 该电离真空计包括测量元件容器，以及设置在该测量元件容器内的第一和第二测量部件。 第一测量部件包括包括灯丝，栅格和离子收集器的元件电极，并且是用于测量真空状态的压力的电离型结构。 第二测量部件具有与第一测量部件不同的功能的结构，并且设置在靠近网格轴的延伸部的空间中，并且远离主空间，用于使从 灯丝。 在第二测量部件和部件电极之间设置屏蔽板，以在空间上分离第二测量部件和部件电极。 第二测量部件被固定到由具有优异导热性的材料制成的元件紧固板。

公开(公告)号：US06257069B1

公开(公告)日：2001-07-10

申请号：US09194793

申请日：1998-10-28

Applicant: Howard M. Brady ,  Emil Drubetsky ,  Ronald H. Goehner ,  Bruce R. F. Kendall

Inventor： Howard M. Brady ,  Emil Drubetsky ,  Ronald H. Goehner ,  Bruce R. F. Kendall

IPC: G01L900

CPC classification number: G01L21/34 ,  G01L21/32

Abstract: A Bayard-Alpert gas pressure measuring gauge with x-ray effect neutralization comprising collector and shield electrodes that comprise the same substantially inert electrically conductive substances. Said inert substance may be gold or another substance from the group consisting of platinum and rhodium, and mixtures thereof, and alloys comprising gold, platinum or rhodium; or said substance may be selected from the group consisting of the oxides of indium, chromium, vanadium and tin, mixtures thereof, and alloys comprising one of these. An electrical potential is applied to the shield that is more negative than the potential applied to the collector, said potential on the shield being in the range from about zero volts to about −50 volts when the collector is operated at a positive potential. Said negative potential with respect to the collector enhances the reverse x-ray effect for cancellation of the forward x-ray effect in the gauge. The gauge may also comprise a modified collector geometry to further enhance the reverse x-ray effect to achieve neutralization of the total x-ray effect. A method for neutralization of the x-ray effect by modulating the shield potential is also disclosed.

Abstract translation: 具有x射线效应中和的Bayard-Alpert气体压力测量计包括收集器和屏蔽电极，其包含相同的基本惰性的导电物质。 所述惰性物质可以是金或来自铂和铑的其它物质及其混合物，以及包含金，铂或铑的合金; 或所述物质可以选自铟，铬，钒和锡的氧化物，其混合物和包含这些之一的合金。 电势被施加到比施加到集电极的电位更负的屏蔽上，当集电极处于正电位时，屏蔽上的电位在约零伏至约-50伏的范围内。 相对于收集器的所述负电位增强反向X射线效应以消除量规中的前X射线效应。 量规还可以包括改进的收集器几何形状，以进一步增强反向x射线效应以实现总X射线效应的中和。 还公开了通过调制屏蔽电位来中和x射线效应的方法。

公开(公告)号：US5296817A

公开(公告)日：1994-03-22

申请号：US906665

申请日：1992-06-30

Applicant: Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

Inventor： Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

IPC: G01L21/30 ,  G01L21/32 ,  G01L27/00 ,  H01J41/04

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.; (c) the ion collector extends at its free end at least through one of the partial end caps of the anode; (d) the electron source is not substantially longer axially than the region within the anode volume in which the electric field is predominantly directed radially inward and where the electron source is located substantially only adjacent to the foregoing region; (e) the anode is provided with a substantially uniformly transparent grid structure in the regions where the electrons enter the anode volume and where they exit from the anode volume.

Abstract translation: 电离计及其操作方法，其中量规可以是Bayard-Alpert型，并且包括完全包围电子源，阳极和集电极的屏蔽，使得屏蔽外部的电位不会扰乱电荷分布 在屏蔽体积内，从而稳定仪表的灵敏度。 电离计进一步的特征在于以下特征，其可以单独存在或组合存在，包括：（a）阳极设置有端盖，其径向向内延伸至阳极半径的至少25％但不大于75 半径的百分比; （b）离子收集器的直径不小于0.015英寸，不大于0.080英寸。 （c）离子收集器至少通过阳极的部分端盖之一在其自由端处延伸; （d）电子源基本上不比阳极体积内的区域基本上更长，其中电场主要指向径向向内并且电子源基本上仅与前述区域相邻; （e）阳极在其中电子进入阳极体积并且它们从阳极体积排出的区域中具有基本均匀的透明网格结构。

公开(公告)号：US4902977A

公开(公告)日：1990-02-20

申请号：US295720

申请日：1989-01-10

Applicant: Michael B. Kenny ,  Larry R. Barnett ,  Richard W. Grow ,  J. Mark Baird

Inventor： Michael B. Kenny ,  Larry R. Barnett ,  Richard W. Grow ,  J. Mark Baird

IPC: G01L21/32

CPC classification number: G01L21/32

Abstract: A gas ionization type vacuum gauge for testing the internal vacuum levels to below 10.sup.-6 torr is disclosed which uses a multipactor discharge means as the source for the electron current used to ionize residual gas molecules. The invention comprises an RF field enhancing cavity which can be constructed of high-vacuum-compatible materials, able to withstand bake-out microwave temperatures and a negatively biased ion collection wave, wire, or grid. A simple ceramic RF feed-through permits simple and noninvasive pressure measurements. The device can be made much smaller than conventional gauges.

Abstract translation: 公开了一种用于测试内部真空度至低于10 -6乇的气体离子型真空计，其使用多功能放电装置作为用于电离残余气体分子的电子电流源。 本发明包括RF场增强腔，其可由能够承受烘烤微波温度的高真空兼容材料和负偏压的离子采集波，线或栅格构成。 简单的陶瓷射频馈电允许简单和无创的压力测量。 该装置可以比传统的量规小得多。

公开(公告)号：US4714891A

公开(公告)日：1987-12-22

申请号：US778719

申请日：1985-09-23

Applicant: Charles F. Morrison, Jr.

Inventor： Charles F. Morrison, Jr.

IPC: G01L21/32 ,  G01N27/62 ,  H02H3/00

CPC classification number: G01L21/32

Abstract: Different approaches are described, in ionization gauges or the like, which either prevent dangerous open ground conditions and/or sense the presence of the open ground whereby the controller power may be automatically turned off. Circuitry for extending the measurement range of ionization gauges is also described.

Abstract translation: 在电离计等中描述了不同的方法，其可以防止危险的开放地面条件和/或感测开放地面的存在，从而控制器电力可以自动关闭。 还描述了用于扩展电离计的测量范围的电路。

公开(公告)号：US4471661A

公开(公告)日：1984-09-18

申请号：US374933

申请日：1982-05-05

Applicant: David Edwards, Jr.

Inventor： David Edwards, Jr.

IPC: G01L19/14 ,  G01L21/14 ,  G01L21/32

CPC classification number: G01L21/32 ,  G01L19/14 ,  G01L21/14

Abstract: In electronic devices for measuring pressures in vacuum systems, the metal elements which undergo thermal deterioration are made readily replaceable by making them parts of a simple plug-in unit. Thus, in ionization gauges, the filament and grid or electron collector are mounted on the novel plug-in unit. In thermocouple pressure gauges, the heater and attached thermocouple are mounted on the plug-in unit. Plug-in units have been designed to function, alternatively, as ionization gauge and as thermocouple gauge, thus providing new gauges capable of measuring broader pressure ranges than is possible with either an ionization gauge or a thermocouple gauge.

Abstract translation: 在用于测量真空系统中的压力的​​电子设备中，通过使它们成为简单的插件单元的部件，可以容易地更换经历热劣化的金属元件。 因此，在电离计中，灯丝和栅格或电子收集器安装在新颖的插入单元上。 在热电偶压力表中，加热器和附加的热电偶安装在插件上。 插入式单元的设计可以用作电离计和热电偶规格，从而提供能够测量比用电离计或热电偶量规更宽的压力范围的新量规。