公开(公告)号：US20090114246A1

公开(公告)日：2009-05-07

申请号：US11933770

申请日：2007-11-01

Applicant: Nishant Sinha ,  Gurtej S. Sandhu

Inventor： Nishant Sinha ,  Gurtej S. Sandhu

IPC: B08B6/00 ,  B08B3/00

CPC classification number: B08B3/10 ,  B08B7/02 ,  B24C3/322 ,  B24C7/0007 ,  H01L21/02052 ,  H01L21/02057 ,  H01L21/67051

Abstract: Some embodiments include methods for treating surfaces. Beads and/or other insolubles may be dispersed within a liquid carrier to form a dispersion. A transfer layer may be formed across a surface. The dispersion may be directed toward the transfer layer, and the insolubles may impact the transfer layer. The impacting may generate force in the transfer layer, and such force may be transferred through the transfer layer to the surface. The surface may be a surface of a semiconductor substrate, and the force may be utilized to sweep contaminants from the semiconductor substrate surface. The transfer layer may be a liquid, and in some embodiments may be a cleaning solution.

Abstract translation: 一些实施方案包括用于处理表面的方法。 珠和/或其他不溶物可以分散在液体载体中以形成分散体。 可以跨越表面形成转印层。 分散体可以指向转移层，并且不溶物可能影响转移层。 冲击可能在转移层中产生力，并且这种力可以通过转移层转移到表面。 表面可以是半导体衬底的表面，并且该力可用于从半导体衬底表面扫除污染物。 转移层可以是液体，并且在一些实施方案中可以是清洁溶液。

公开(公告)号：US07371685B2

公开(公告)日：2008-05-13

申请号：US10794738

申请日：2004-03-03

Applicant: Paul Fischer

Inventor： Paul Fischer

IPC: H01L21/302

CPC classification number: H01L21/7684 ,  B24B37/042 ,  B24C1/04 ,  B24C3/322 ,  B24C7/0007 ,  H01L21/32115 ,  H01L21/76807 ,  H01L21/76865

Abstract: Apparatus and methods of fabricating an interconnect in a dielectric material, such as by a damascene or dual damascene processes. In specific, with the use of a barrier layer, such as to contain copper-containing materials used in the fabrication of the interconnect, a slurry jet is used to remove the barrier layer without significantly damaging underlying dielectric material. Such a process is particularly useful when low-k dielectrics are used as the dielectric material, as low-k dielectrics can be easily damaged by known barrier layer removal techniques.

Abstract translation: 在介电材料中制造互连的装置和方法，例如通过镶嵌或双镶嵌工艺。 具体地说，通过使用阻挡层，例如包含用于制造互连件的含铜材料，使用浆料射流去除阻挡层，而不会明显损坏下面的介电材料。 当使用低k电介质作为介电材料时，这种方法特别有用，因为低k电介质可能被已知的阻挡层去除技术容易地损坏。

公开(公告)号：US20070298282A1

公开(公告)日：2007-12-27

申请号：US11808404

申请日：2007-06-08

Applicant: Gunilla Andersson ,  Anders Karlsson ,  Katarina Dahl ,  Jan Kjellgren ,  Peter Littecke

Inventor： Gunilla Andersson ,  Anders Karlsson ,  Katarina Dahl ,  Jan Kjellgren ,  Peter Littecke

IPC: B32B9/00

CPC classification number: C23C16/56 ,  B24C1/10 ,  B24C7/0007 ,  C23C16/36 ,  C23C16/403 ,  C23C30/005 ,  Y10T407/27 ,  Y10T428/24975 ,  Y10T428/265

Abstract: A CVD-coated cutting tool insert with improved toughness properties having the ability to withstand high temperatures without sacrificing edge line security is disclosed. The insert coating comprises a TiCxNy-layer with a low tensile stress level of 50-500 MPa and an α-Al2O3-layer with a high surface smoothness with a mean Ra

Abstract translation: 公开了具有改进的韧性的具有能够承受高温但不牺牲边缘线安全性的CVD涂层的切削刀具刀片。 插入涂层包括具有50-500MPa的低拉伸应力水平和α-Al 2 O 3的TiC x N z N层 具有高表面光滑度的平均Ra <0.12μm的AFM技术测定的层3，其通过对涂层进行强力的湿式喷砂操作获得。

公开(公告)号：US07267605B2

公开(公告)日：2007-09-11

申请号：US11638261

申请日：2006-12-12

Applicant: Michael William Gadd

Inventor： Michael William Gadd

IPC: B24B1/00

CPC classification number: B24B57/00 ,  B24C7/0007 ,  B24C9/006 ,  Y02P70/179

Abstract: The present invention provides a method of handling abrasive solids materials used in an abrasive cutting procedure which jets a high-pressure abrasive slurry through a nozzle (7) onto a work piece over and/or in a catcher tank (8). This handling method includes catching the used abrasive slurry together with work piece kerf material in the catcher tank, and passing at least some abrasive solids collected in the catcher tank as a slurry to a partitioning apparatus which includes a vibratory sieve (27). The handling method also includes partitioning the slurry with the partitioning apparatus in order to provide at least two solids streams. One of the solid streams passes through the sieve and the other passes across the sieve whilst entrained as a slurry. The handling method further includes passing as a slurry to the nozzle (7) for jetting a pressurised or pressurisable slurry that has partitioned solids stream which has passed through the sieve (27).

公开(公告)号：US20070093179A1

公开(公告)日：2007-04-26

申请号：US11638261

申请日：2006-12-12

Applicant: Michael Gadd

Inventor： Michael Gadd

IPC: B24B49/00 ,  B24C1/00 ,  B24C9/00

CPC classification number: B24B57/00 ,  B24C7/0007 ,  B24C9/006 ,  Y02P70/179

Abstract: The present invention provides a method of handling abrasive solids materials used in an abrasive cutting procedure which jets a high-pressure abrasive slurry through a nozzle (7) onto a work piece over and/or in a catcher tank (8). This handling method includes catching the used abrasive slurry together with work piece kerf material in the catcher tank, and passing at least some abrasive solids collected in the catcher tank as a slurry to a partitioning apparatus which includes a vibratory sieve (27). The handling method also includes partitioning the slurry with the partitioning apparatus in order to provide at least two solids streams. One of the solid streams passes through the sieve and the other passes across the sieve whilst entrained as a slurry. The handling method further includes passing as a slurry to the nozzle (7) for jetting a pressurised or pressurisable slurry that has partitioned solids stream which has passed through the sieve (27).

公开(公告)号：US20070093178A1

公开(公告)日：2007-04-26

申请号：US11638250

申请日：2006-12-12

Applicant: Michael Gadd

Inventor： Michael Gadd

IPC: B24B49/00 ,  B24C1/00 ,  B24C9/00

CPC classification number: B24B57/00 ,  B24C7/0007 ,  B24C9/006 ,  Y02P70/179

Abstract: The present invention provides a method of handling abrasive solids materials used in an abrasive cutting procedure which jets a high-pressure abrasive slurry through a nozzle (7) onto a work piece over and/or in a catcher tank (8). This handling method includes catching the used abrasive slurry together with work piece kerf material in the catcher tank, and passing at least some abrasive solids collected in the catcher tank as a slurry to a partitioning apparatus which includes a vibratory sieve (27). The handling method also includes partitioning the slurry with the partitioning apparatus in order to provide at least two solids streams. One of the solid streams passes through the sieve and the other passes across the sieve whilst entrained as a slurry. The handling method further includes passing as a slurry to the nozzle (7) for jetting a pressurised or pressurisable slurry that has partitioned solids stream which has passed through the sieve (27).

Abstract translation: 本发明提供了一种处理研磨切割过程中使用的磨料固体材料的方法，其将高压磨料浆料通过喷嘴（7）喷射到捕集罐（8）上和/或上的工件上。 这种处理方法包括将捕获罐中的工件切片材料与已使用的磨料浆料一起捕获，并将捕集器中收集的至少一些磨料固体作为浆料送入包括振动筛（27）的分配装置。 处理方法还包括用分配装置分配浆料以便提供至少两个固体物流。 一个固体物流通过筛子，另一个通过筛子，同时作为浆料夹带。 处理方法还包括作为浆料通入喷嘴（7），用于喷射已经通过筛（27）的已分离的固体物流的加压或可加压浆料。

公开(公告)号：US07153186B2

公开(公告)日：2006-12-26

申请号：US10930695

申请日：2004-08-30

Applicant: Ross Popescu ,  Clarence Tamargo ,  Shan Jiang

Inventor： Ross Popescu ,  Clarence Tamargo ,  Shan Jiang

IPC: B24B5/00 ,  H01L21/301

CPC classification number: B24C3/322 ,  B24C1/045 ,  B24C3/02 ,  B24C7/0007 ,  B24C9/006 ,  H01L21/67092 ,  H05K3/0052 ,  Y02P70/179 ,  Y10T117/10

Abstract: Techniques for singulating a substrate into a plurality of component parts is disclosed. The singulation techniques include generating a jet stream in order to cut through large components so as to produce smaller components. The techniques are particularly suitable for singulating surface mount devices such as chip scale packages, ball grid arrays (BGA), flip chips, lead less packages (QFN) and the like. The techniques are also suitable for singulating photonic devices.

Abstract translation: 公开了将衬底分离成多个部件的技术。 分割技术包括产生喷射流以切割大的部件以便产生更小的部件。 这些技术特别适用于分离表面贴装器件，例如芯片级封装，球栅阵列（BGA），倒装芯片，无铅封装（QFN）等。 该技术也适用于单光子器件。

公开(公告)号：US20050186888A1

公开(公告)日：2005-08-25

申请号：US10500418

申请日：2002-12-27

Applicant: Michael Gadd

Inventor： Michael Gadd

IPC: B24C9/00 ,  B24B1/00

CPC classification number: B24B57/00 ,  B24C7/0007 ,  B24C9/006 ,  Y02P70/179

Abstract: The present invention provides a method of handling abrasive solids materials used in an abrasive cutting procedure which jets a high-pressure abrasive slurry through a nozzle (7) onto a work piece over and/or in a catcher tank (8). This handling method includes catching the used abrasive slurry together with work piece kerf material in the catcher tank, and passing at least some abrasive solids collected in the catcher tank as a slurry to a partitioning apparatus which includes a vibratory sieve (27) . The handling method also includes partitioning the slurry with the partitioning apparatus in order to provide at least two solids streams. One of the solid streams passes through the sieve and the other passes across the sieve whilst entrained as a slurry. The handling method further includes passing as a slurry to the nozzle (7) for jetting a pressurised or pressurisable slurry that has partitioned solids stream which has passed through the sieve (27).

Abstract translation: 本发明提供了一种处理研磨切割过程中使用的磨料固体材料的方法，其将高压磨料浆料通过喷嘴（7）喷射到捕集罐（8）上和/或上的工件上。 这种处理方法包括将捕获罐中的工件切片材料与已使用的磨料浆料一起捕获，并将捕集器中收集的至少一些磨料固体作为浆料送入包括振动筛（27）的分配装置。 处理方法还包括用分配装置分配浆料以便提供至少两个固体物流。 一个固体物流通过筛子，另一个通过筛子，同时作为浆料夹带。 处理方法还包括作为浆料通入喷嘴（7），用于喷射已经通过筛（27）的已分离的固体物流的加压或可加压浆料。

公开(公告)号：US20040198179A1

公开(公告)日：2004-10-07

申请号：US10475692

申请日：2004-05-10

Inventor： William Michael Gadd

IPC: B24C003/00

CPC classification number: B24C1/045 ,  B24C7/0007

Abstract: The invention provides an abrasive jet system having a high-pressure fluid supply (10) means supplying fluid to a vessel (11) which includes a layer of abrasive slurry and a top layer that contains substantially of fluid over the layer of abrasive slurry. The system also includes a first conduit (14) which leads from the fluid supply means to the top layer of fluid in the vessel and as high-pressure fluid is fed into the vessel, causes displacement of abrasive slurry from a discharge conduit (16). The system further includes a second conduit (21) which connects at different points to the first conduit and the discharge conduit, and including a fluid valve (13) between the operative connection to the first conduit and the discharge conduit, that controls the fluid flow within the second conduit. The fluid valve is closed once the system is pressurised to displace abrasive slurry through the discharge conduit (16) and is opened upon de-pressurization of the system to allow fluid flow from the first conduit (14) to the second conduit and to stop discharge of the abrasive slurry.

Abstract translation: 本发明提供了一种具有高压流体供应（10）的磨料喷射系统，该高压流体供应装置将流体供应到容器（11），容器（11）包括研磨浆料层和在磨料浆层上基本上含有流体的顶层。 该系统还包括第一导管（14），其从流体供应装置引导到容器中的顶层流体，并且当高压流体被供给到容器中时，导致磨料浆料从排放导管（16）的位移， 。 该系统还包括第二管道（21），其在不同点处连接到第一管道和排放管道，并且包括在与第一管道和排放管道的操作连接之间的流体阀（13），其控制流体流动 在第二个导管内。 一旦系统被加压就关闭流体阀，以通过排放管道（16）移动磨料浆料，并在系统减压时打开，以允许流体从第一管道（14）流到第二管道并停止排放 的磨料浆料。

公开(公告)号：US20030203707A1

公开(公告)日：2003-10-30

申请号：US10421605

申请日：2003-04-23

Inventor： Nigel Richard Farrow

IPC: B24B001/00

CPC classification number: B24C1/086 ,  B24C7/0007 ,  B24C11/00 ,  B24C11/005 ,  B44D3/16 ,  B63B59/00

Abstract: A method of removing a coating, such as paint, varnish, biological growth or grime, from a surface, the method comprising selecting a suitable particulate solid having a particular size of from 150-250 mm, and a fluid carrier to form a spray mixture and spraying the mixture as a jet spray so as to impact and at least partially remove the coating. The hardness of the particulate solid is less than 8.0 on the Moh scale. The pressure applied to the spray mixture to generate the spray is from 3x105 to 1.5x106 Nmnull2. An apparatus comprising a blasting post and a compressor to generate the spray mixture and propel it from a nozzle is also disclosed. Heat may be applied to the carrier, either prior to or when mixing with the particulate solid.

Abstract translation: 一种从表面除去涂层如涂料，清漆，生物生长或污垢的方法，该方法包括选择具有150-250mm特定尺寸的合适的颗粒固体和流体载体以形成喷雾混合物 并喷射混合物作为喷射喷雾以便冲击并且至少部分地去除涂层。 颗粒状固体的硬度小于8.0 Moh。 施加到喷雾混合物以产生喷雾的压力为3×10 5至1.5×10 6 Nm -2。 还公开了一种包括爆破柱和压缩机以产生喷雾混合物并从喷嘴推进的装置。 可以在与颗粒状固体混合之前或之后将热量施加到载体上。