公开(公告)号：US20170256631A1

公开(公告)日：2017-09-07

申请号：US15236696

申请日：2016-08-15

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Jian MIN ,  Xiaolong LI ,  Zhengyin XU ,  Ping SONG ,  Youwei WANG

IPC: H01L29/66 ,  H01L29/786 ,  H01L27/12 ,  H01L21/28 ,  H01L21/02 ,  H01L21/3105

CPC classification number: H01L29/66765 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/02675 ,  H01L21/28008 ,  H01L21/31053 ,  H01L27/1218 ,  H01L27/1229 ,  H01L27/1262 ,  H01L27/1296 ,  H01L29/42384 ,  H01L29/78618 ,  H01L29/78636 ,  H01L29/78678

Abstract: The present disclosure provides a TFT, its manufacturing method, an array substrate and a display device. The method includes steps of: forming a pattern of a gate electrode on a base substrate; forming a gate insulation layer with an even surface; forming a pattern of a polysilicon semiconductor layer; and forming patterns of a source electrode and a drain electrode. The step of forming the pattern of the polysilicon semiconductor layer includes: crystallizing the amorphous silicon layer, so as to form the polysilicon semiconductor layer.