Light source device, lighting device, projector, and monitoring device
    42.
    发明授权
    Light source device, lighting device, projector, and monitoring device 有权
    光源装置,照明装置,投影仪和监视装置

    公开(公告)号:US07841746B2

    公开(公告)日:2010-11-30

    申请号:US12183540

    申请日:2008-07-31

    申请人: Shunji Kamijima

    发明人: Shunji Kamijima

    IPC分类号: F21V17/02

    摘要: A light source device includes: a light source which emits light; an optical member through which light emitted from the light source enters; a base on which the light source is mounted; a first holding member which fixes the optical member; and a second holding member which holds the first holding member and stands on the base in the emission direction of the light emitted from the light source.

    摘要翻译: 光源装置包括:发光的光源; 光源从光源射出的光学构件; 安装光源的基座; 固定所述光学构件的第一保持构件; 以及第二保持构件,其保持所述第一保持构件并且沿从所述光源发射的光的发射方向站立在所述基底上。

    Wavelength converting apparatus and image displaying apparatus
    43.
    发明授权
    Wavelength converting apparatus and image displaying apparatus 有权
    波长转换装置和图像显示装置

    公开(公告)号:US07796324B2

    公开(公告)日:2010-09-14

    申请号:US12438114

    申请日:2007-10-09

    IPC分类号: G02F1/35 G02F2/02

    摘要: A wavelength converting apparatus comprising: a laser resonator; a first wavelength converting element that converts a fundamental wave outputted from the laser resonator into a harmonic wave; a first temperature control element that controls the temperature of the first wavelength converting element; a second wavelength converting element that converts a fundamental wave outputted from the first wavelength converting element into a harmonic wave; a second temperature control element that controls the temperature of the second wavelength converting element; a first detecting portion that detects an output of a harmonic wave outputted from the first wavelength converting element; a second detecting portion that detects an output of a harmonic wave outputted from the second wavelength converting element; and a controller that manages temperature control of the first wavelength converting element by the first temperature control element, temperature control of the second wavelength converting element by the second temperature control element, and current value control of a driving current applied to the laser light source.

    摘要翻译: 一种波长转换装置,包括:激光谐振器; 将从激光谐振器输出的基波转换为谐波的第一波长转换元件; 第一温度控制元件,其控制第一波长转换元件的温度; 第二波长转换元件,其将从第一波长转换元件输出的基波转换成谐波; 第二温度控制元件,其控制所述第二波长转换元件的温度; 第一检测部分,检测从第一波长转换元件输出的谐波的输出; 第二检测部分,检测从第二波长转换元件输出的谐波的输出; 以及控制器,其通过第一温度控制元件管理第一波长转换元件的温度控制,通过第二温度控制元件对第二波长转换元件的温度控制以及施加到激光光源的驱动电流的电流值控制。

    Controlling Second Harmonic Efficiency of Laser Beam Interactions
    45.
    发明申请
    Controlling Second Harmonic Efficiency of Laser Beam Interactions 有权
    控制激光束相互作用的二次谐波效率

    公开(公告)号:US20100135344A1

    公开(公告)日:2010-06-03

    申请号:US12628423

    申请日:2009-12-01

    IPC分类号: H01S3/10

    摘要: A method is provided for controlling second harmonic efficiency of laser beam interactions. A laser system generates two laser beams (e.g., a laser beam with two polarizations) for incidence on a nonlinear crystal having a preferred direction of propagation. Prior to incidence on the crystal, the beams are optically processed based on the crystal's beam separation characteristics to thereby control a position in the crystal along the preferred direction of propagation at which the beams interact.

    摘要翻译: 提供了一种用于控制激光束相互作用的二次谐波效率的方法。 激光系统产生两个激光束(例如,具有两个偏振的激光束),用于入射到具有优选传播方向的非线性晶体上。 在晶体入射之前,基于晶体的光束分离特性对光束进行光学处理,从而沿着波束相互作用的优选传播方向来控制晶体中的位置。

    Housing for harmonic generation crystals in solid state laser systems
    46.
    发明授权
    Housing for harmonic generation crystals in solid state laser systems 有权
    固态激光系统谐波产生晶体的外壳

    公开(公告)号:US07715451B2

    公开(公告)日:2010-05-11

    申请号:US11547539

    申请日:2005-03-29

    IPC分类号: H01S3/10

    摘要: Apparatus for effecting harmonic conversion of a laser beam of predetermined frequency, to provide plural harmonic components of the laser beam at frequencies different from the predetermined frequency, includes a housing (40) defining a hermetically sealed chamber able to be maintained at a pressure below atmospheric pressure. Also provided are port means for evacuating the chamber, and means (36, 37) defining an optical path for the laser beam and the components thereof through the housing and the chamber. A plurality of individual holders (70, 72, 74) are arranged for retaining respective frequency conversion crystals at spaced locations in the optical path. The crystals (20, 22, 24) can be aligned individually and heated within the chamber.

    摘要翻译: 用于实现预定频率的激光束的谐波转换以提供不同于预定频率的频率的激光束的多个谐波分量的装置包括限定能够保持在低于大气压的压力的气密密封室的壳体(40) 压力。 还提供了用于抽空腔室的端口装置,以及限定用于激光束的光路及其部件通过壳体和腔室的装置(36,37)。 多个单独的保持器(70,72,74)被布置用于在光路中的间隔位置处保持相应的变频晶体。 晶体(20,22,24)可以单独排列并在室内加热。

    Non-critical phase matching in CLBO to generate sub-213nm wavelengths
    47.
    发明授权
    Non-critical phase matching in CLBO to generate sub-213nm wavelengths 有权
    CLBO中的非临界相位匹配产生亚213nm波长

    公开(公告)号:US07627007B1

    公开(公告)日:2009-12-01

    申请号:US11346021

    申请日:2006-03-10

    IPC分类号: H01S3/10

    摘要: A laser illuminator and illumination method for use in an inspection system, such as a semiconductor wafer inspection system or photomask inspection system is provided. The design comprises generating fundamental frequency laser energy at different fundamental wavelengths, such as 998 nm, converting a portion of the fundamental frequency laser energy to 2nd harmonic frequency laser energy, further converting the 2nd harmonic frequency laser energy to 4th harmonic frequency laser energy, and mixing the 4th harmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce laser energy at a sum frequency. Mixing is accomplished by non-critical phase matching in a crystal of Cesium Lithium Borate (CLBO). Alternately, the design may employ shifting a portion of the fundamental frequency laser energy to laser energy at a Raman line and/or mixing the 2nd harmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce 3rd harmonic frequency laser energy.

    摘要翻译: 提供了一种用于检查系统中的激光照明器和照明方法,例如半导体晶片检查系统或光掩模检查系统。 该设计包括在不同的基本波长(如998nm)产生基频激光能量,将基频激光能量的一部分转换为二次谐波激光能量,进一步将二次谐波激光能量转换为四次谐波激光能量, 将第四谐波激光能量与基频激光能量的一部分混合,以产生激发能量的和频。 在硼酸铯(CLBO)的晶体中通过非关键相位匹配来实现混合。 或者,该设计可以采用将基频激光能量的一部分转换成拉曼线上的激光能量和/或将二次谐波频率激光能量与基频激光能量的一部分混合以产生三次谐波激光能量。