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    Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers
    43.
    发明授权
    Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers 有权
    单片极化控制角扩散器，相关方法和并入受控角扩散器的光刻系统

    公开(公告)号：US07916390B2

    公开(公告)日：2011-03-29

    申请号：US11711854

    申请日：2007-02-28

    申请人： Marc D. Himel ,  Alan D. Kathman

    发明人： Marc D. Himel ,  Alan D. Kathman

    IPC分类号： G02B5/30

    CPC分类号： G03F7/70075 ,  G02B5/0252 ,  G02B5/0263 ,  G02B5/0278 ,  G02B5/1809 ,  G02B27/281 ,  G02B27/286 ,  G03F7/70158 ,  G03F7/70566 ,  Y10T29/49

    摘要： A monolithic polarization controlled angle diffuser includes a system having a first surface and a second surface, a controlled angle diffuser pattern for providing an angular distribution at an illumination plane, the controlled angle diffuser pattern being on one of the first and second surfaces of the substrate, and a polarizing pattern on one of the first and second surfaces of the substrate. The controlled angle diffuser pattern includes at least two controlled angle diffuser elements. Each controlled angle diffuser element outputs different angular distributions. The polarizing pattern includes at least two polarizing elements. Each polarizing element corresponds to a respective controlled angle diffuser element. The at least two polarizing elements output polarizations are rotated with respect to one another.

    摘要翻译： 单片偏振控制角扩散器包括具有第一表面和第二表面的系统，用于在照明平面处提供角度分布的受控角度漫射器图案，所述受控角漫射器图案位于所述基板的第一和第二表面中的一个上 ，以及在基板的第一和第二表面之一上的偏振图案。 受控角度扩散器图案包括至少两个受控角度扩散器元件。 每个受控角度扩散器元件输出不同的角度分布。 偏振图案包括至少两个偏振元件。 每个偏振元件对应于相应的受控角度扩散器元件。 输出极化的至少两个偏振元件相对于彼此旋转。

    Non-etalon wavelength locking optical sub-assembly and associated methods
    45.
    发明授权
    Non-etalon wavelength locking optical sub-assembly and associated methods 有权
    非标准器波长锁定光学子组件及相关方法

    公开(公告)号：US06717682B2

    公开(公告)日：2004-04-06

    申请号：US10033171

    申请日：2001-12-28

    申请人： Alan D. Kathman ,  Robert Russell Boye

    发明人： Alan D. Kathman ,  Robert Russell Boye

    IPC分类号： G01B902

    CPC分类号： G01J9/0246

    摘要： A wavelength detector includes an optical structure receiving an input beam, the optical structure outputting at least three wavelength dependent two-beam interference signals. Each wavelength dependent two-beam interference signal has a different phase offset. A detector receives the at least three wavelength dependent two-beam interference signals and outputs an electrical signal representative of each wavelength dependent two-beam interference. A processor receives the at least three electrical signals from the detector and generates a composite control signal. Alternatively, two of the three signals are periodic with respect to wavelength and the third signal is a reference signal. The two-beam interference signals may be created by providing patterned apertures in respective beam paths. Phase shifting interferometry techniques may be used to determine the wavelength from the periodic signals.

    摘要翻译： 波长检测器包括接收输入光束的光学结构，该光学结构输出至少三个依赖于波长的双光束干涉信号。 每个波长依赖的双光束干涉信号具有不同的相位偏移。 检测器接收至少三个依赖于波长的双光束干涉信号，并输出表示每个波长依赖的双光束干涉的电信号。 处理器从检测器接收至少三个电信号并产生复合控制信号。 或者，三个信号中的两个相对于波长是周期性的，并且第三信号是参考信号。 双光束干涉信号可以通过在各个光束路径中提供图案化的孔来产生。 相移干涉测量技术可用于从周期信号中确定波长。

    Spectrally diverse, spatially sensitive apparatus and associated methods
    47.
    发明申请
    Spectrally diverse, spatially sensitive apparatus and associated methods 审中-公开
    光谱多样，空间敏感的装置和相关方法

    公开(公告)号：US20090073451A1

    公开(公告)日：2009-03-19

    申请号：US12292312

    申请日：2008-11-17

    申请人： Robert D. TeKolste ,  Alan D. Kathman

    发明人： Robert D. TeKolste ,  Alan D. Kathman

    IPC分类号： G01J3/45 ,  G01N21/25

    CPC分类号： H01L27/14685 ,  G01J3/18 ,  G01J3/26 ,  G01J3/36 ,  G01J2003/1213

    摘要： A spectrometer for use with a desired wavelength range includes an array of filters. Each filter outputs at least two non-contiguous wavelength peaks within the desired wavelength range. The array of filters is spectrally diverse over the desired wavelength range, and each filter in the array of filters outputs a spectrum of a first resolution. An array of detectors has a detector for receiving an output of a corresponding filter. A processor receives signals from each detector, and outputs a reconstructed spectrum having a second resolution, the second resolution being higher than any of the first resolution of each filter. Filters and detectors may be arranged into a plurality of imaging units, each imaging unit including first and second filters and first and second photosensing regions. A processor receives signals from each imaging unit, and generates a reconstructed spatial image comprised of discrete spatial units corresponding to each imaging unit.

    摘要翻译： 用于所需波长范围的光谱仪包括一组滤光片。 每个滤波器在期望的波长范围内输出至少两个不连续的波长峰值。 滤波器阵列在期望的波长范围内是频谱多样的，并且滤波器阵列中的每个滤波器输​​出第一分辨率的光谱。 检测器阵列具有用于接收相应滤波器的输出的检测器。 处理器从每个检测器接收信号，并输出具有第二分辨率的重建频谱，第二分辨率高于每个滤波器的任何第一分辨率。 滤光器和检测器可以被布置成多个成像单元，每个成像单元包括第一和第二滤光器以及第一和第二光敏区域。 处理器从每个成像单元接收信号，并且产生由对应于每个成像单元的离散空间单元组成的重构空间图像。

    Optical soft aperture and use thereof
    50.
    发明授权
    Optical soft aperture and use thereof 失效
    光学软光圈及其用途

    公开(公告)号：US6008941A

    公开(公告)日：1999-12-28

    申请号：US833220

    申请日：1997-04-14

    申请人： Michael Feldman ,  Alan D. Kathman ,  W. Hudson Welch ,  Robert Te Kolste

    发明人： Michael Feldman ,  Alan D. Kathman ,  W. Hudson Welch ,  Robert Te Kolste

    IPC分类号： G02B5/18 ,  G02B5/32 ,  G02B27/20 ,  G02B27/58 ,  G02B5/30

    CPC分类号： G02B5/1842 ,  G02B27/20 ,  G02B27/58 ,  G02B5/1871 ,  G02B5/32 ,  Y10S359/90

    摘要： A soft aperture allows gradual attenuation of a light beam dependent upon its location away from the center of a diffractive optical element. Such an optical element may be provided by decreasing a number of phase levels, increasing a number of phase levels, increasing a density of metal patches or diffractive gratings, or decreasing a blaze height and/or duty cycle, all radially from the center. Alternatively, the soft aperture may be defined by a photolithographic process. Such a soft aperture is particularly useful in aiding circularizing of an elliptical light beam. The soft aperture may be used alone or integrated with other optical elements.

    摘要翻译： 软孔径允许光束的逐渐衰减取决于其远离衍射光学元件的中心的位置。 这样的光学元件可以通过减少多个相位级别，增加相位级数，增加金属片或衍射光栅的密度，或者从中心径向减小火焰高度和/或占空比来提供。 或者，软孔可以通过光刻工艺来限定。 这样的软孔径对于辅助椭圆光束的圆化是特别有用的。 软孔可以单独使用或与其它光学元件集成。