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    MONOLITHIC POLARIZING DIFFRACTIVE STRUCTURES AND ASSOCIATED METHODS
    1.
    发明申请
    MONOLITHIC POLARIZING DIFFRACTIVE STRUCTURES AND ASSOCIATED METHODS 审中-公开
    单相极化偏差结构及相关方法

    公开(公告)号：US20110170188A1

    公开(公告)日：2011-07-14

    申请号：US13073845

    申请日：2011-03-28

    申请人： MARC D. HIMEL ,  Alan D. Kathman

    发明人： MARC D. HIMEL ,  Alan D. Kathman

    IPC分类号： G02B27/28 ,  C23F1/02

    CPC分类号： G03F7/70075 ,  G02B5/0252 ,  G02B5/0263 ,  G02B5/0278 ,  G02B5/1809 ,  G02B27/281 ,  G02B27/286 ,  G03F7/70158 ,  G03F7/70566 ,  Y10T29/49

    摘要： A monolithic polarizing diffractive structure includes a system having at least two parallel continuous planar surfaces, a diffractive pattern on one of the at least two parallel continuous surfaces, the diffractive pattern including at least two diffractive elements integral with the one of the at least two continuous surfaces, the at least two diffractive elements defining a monolithic diffractive pattern, and a polarizing pattern on one of the at least two parallel continuous surfaces. The polarizing pattern includes at least two polarizing elements, each polarizing element corresponding to a respective diffractive element, the at least two polarizing elements outputting polarizations rotated with respect to one another, the at least two polarizing elements defining a monolithic polarizing pattern.

    摘要翻译： 单片偏振衍射结构包括具有至少两个平行的连续平面的系统，在所述至少两个平行的连续表面中的一个上的衍射图案，所述衍射图案包括与所述至少两个连续的表面中的一个成一体的至少两个衍射元件 表面，所述至少两个衍射元件限定整体衍射图案，以及在至少两个平行连续表面之一上的偏振图案。 偏振图案包括至少两个偏振元件，每个偏振元件对应于相应的衍射元件，所述至少两个偏振元件输出相对于彼此旋转的偏振，所述至少两个偏振元件限定单片偏振图案。

    Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers
    2.
    发明授权
    Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers 有权
    单片极化控制角扩散器，相关方法和并入受控角扩散器的光刻系统

    公开(公告)号：US07916390B2

    公开(公告)日：2011-03-29

    申请号：US11711854

    申请日：2007-02-28

    申请人： Marc D. Himel ,  Alan D. Kathman

    发明人： Marc D. Himel ,  Alan D. Kathman

    IPC分类号： G02B5/30

    CPC分类号： G03F7/70075 ,  G02B5/0252 ,  G02B5/0263 ,  G02B5/0278 ,  G02B5/1809 ,  G02B27/281 ,  G02B27/286 ,  G03F7/70158 ,  G03F7/70566 ,  Y10T29/49

    摘要： A monolithic polarization controlled angle diffuser includes a system having a first surface and a second surface, a controlled angle diffuser pattern for providing an angular distribution at an illumination plane, the controlled angle diffuser pattern being on one of the first and second surfaces of the substrate, and a polarizing pattern on one of the first and second surfaces of the substrate. The controlled angle diffuser pattern includes at least two controlled angle diffuser elements. Each controlled angle diffuser element outputs different angular distributions. The polarizing pattern includes at least two polarizing elements. Each polarizing element corresponds to a respective controlled angle diffuser element. The at least two polarizing elements output polarizations are rotated with respect to one another.

    摘要翻译： 单片偏振控制角扩散器包括具有第一表面和第二表面的系统，用于在照明平面处提供角度分布的受控角度漫射器图案，所述受控角漫射器图案位于所述基板的第一和第二表面中的一个上 ，以及在基板的第一和第二表面之一上的偏振图案。 受控角度扩散器图案包括至少两个受控角度扩散器元件。 每个受控角度扩散器元件输出不同的角度分布。 偏振图案包括至少两个偏振元件。 每个偏振元件对应于相应的受控角度扩散器元件。 输出极化的至少两个偏振元件相对于彼此旋转。