Abstract:
[Object] To provide a sputtering apparatus, a thin-film forming method, and a manufacturing method for a field effect transistor, which are capable of reducing damage of a base layer.[Solving Means] A sputtering apparatus according to an embodiment of the present invention is a sputtering apparatus for forming a thin-film on a surface to be processed of a substrate 10, and includes a vacuum chamber 61, a supporting portion 93, a target 80, and a magnet 83. The magnet 83 generates plasma forming a region to be sputtered 80a, and moves the region to be sputtered 80abetween a first position in which the region to be sputtered 80a is not opposed to the surface to be processed and a second position in which the region to be sputtered is opposed to the surface to be processed. With this, it is possible to weaken incident energy of sputtered particles incident on the surface to be processed of the substrate 10 from the region to be sputtered 80a, and to protect the base layer.
Abstract:
To provide a vacuum processing apparatus capable of supporting and conveying a substrate by a method suitable for a processing content in each processing step and capable of suppressing various mechanisms provided within a processing chamber from being adversely affected. More particularly, the CVD chamber of the apparatus is configured to be horizontal, and hence the above-mentioned problem can be solved. Further, by configuring a sputtering apparatus as the vertical type processing apparatus, problems with abnormal electrical discharge can be solved.
Abstract:
The present invention provides a method for diagnosing schizophrenia, and a schizophrenia diagnostic reagent or device for use in the method. The present invention further provides a therapeutic or ameliorating agent for schizophrenia, which is effective for the treatment or amelioration of schizophrenia. The therapeutic or ameliorating agent for schizophrenia contains a carbonyl scavenger or a carbonyl-modified protein formation inhibitor as an active ingredient. The method for diagnosing schizophrenia according to the present invention includes measuring at least one parameter in a subject, the parameter being selected from the group consisting of: (1) a genetic abnormality of glyoxalase I gene; (2) the expression level or activity of glyoxalase I in a biological sample; (3) the amount of a carbonyl compound or a carbonyl-modified protein that is a protein modified with the carbonyl compound; and (4) the amount of pyridoxal in a biological sample.
Abstract:
In a general connection service using the PPPoE protocol, since user determination cannot be performed before a PPP authentication phase, even when a connection request is received from an invalid user, an access server and an authentication server operate under loaded conditions. Accordingly, an invalid user list is held in the access server, and user information is added to a PADI packet. In this arrangement, an invalid user can be determined at early stages and the packet can be deleted, thereby the load can be reduced. Further, regarding the invalid user, pseudo-connection completion is made and an occurrence of retry is prevented, thereby the load can be reduced.
Abstract:
When forming an L2VPN, each VPN server is required to decrypt data received from a VPN client using the source VPN client key and encrypt the data using the destination VPN client key. The loads of the encrypting and decrypting processings are high, thereby the VPN server through-put is lowered.In order to solve the above problem, according to the present invention, the destination address of an IP packet sent from the VPN client is used as a multicast address, then data is encrypted according to the security association of the multicast address distributed from the VPN server. The encrypted IP packet is encapsulated with the IP address of the VPN server and sent to the VPN server. Receiving this IP packet, the VPN server determines the destination VPN client according to the multicast address of the encapsulated IP packet, then encapsulated with the IP address of the destination VPN client and sent to the VPN client.
Abstract:
The present invention provides a magnetron sputtering method and a magnetron sputtering apparatus that can significantly reduce a non-erosion region causing an abnormal electrical discharge on a surface of a target and deposition of target materials. A plurality of targets 8A, 8B, 8C and 8D are disposed in a vacuum atmosphere while being electrically independent to each other; and sputtering is performed by generating magnetron discharge in the vicinity of the targets 8A, 8B, 8C and 8D. During the sputtering, voltages having a phase difference of 180 degrees are alternately applied to the adjacent targets 8A, 8B, 8C and 8D at a predetermined timing.
Abstract:
In a liquid crystal display panel, connecting wires, having a two-layer structure formed of an indium-tin oxide (ITO) layer and a low-reflection metal layer each, are formed in a image non-display section on an upper substrate, while a shielding layer is formed in the image non-display section on a lower substrate. The gap between the upper and lower substrates is made uniform in both an image display section and the image non-display section by adjusting the thickness of the shielding layer relatively to that of the color filter layer formed in the image display section on the lower substrate or by adjusting the diameter of spacers arranged in the image non-display section relatively to that of spacers arranged in the image display section.
Abstract:
In a liquid crystal display device including a liquid crystal display panel (10) including a liquid crystal layer (3) sandwiched between a first substrate (1) and a second substrate (2) having transparent electrodes (5, 6) on inner surfaces opposing to each other, the film thickness of at least one of the transparent electrodes (5, 6) formed on the first and second substrates (1, 2) is set so that light passing through the transparent electrode and exhibiting a maximum transmittance has a color within either a region defined by an x value of 0.22 to 0.28 and a y value of 0.21 to 0.31 or a region defined by an x value of 0.28 to 0.34 and a y value of 0.22 to 0.35 in a chromaticity diagram of a CIE 1931 color system using a white light source. This reduces coloring irregularities due to a film thickness error caused during manufacturing of the transparent electrodes to enable performance of uniform display.
Abstract:
A metal film is laminated on a glass substrate and a photosensitive resin film is coated on the metal film. The metal film and the photosensitive resin film are selectively removed by means of exposure and development in the area that turns into a transmission area in each pixel that is a unit displaying colors such as red, green, and blue. Thus, a reflection layer and an adjustment layer are left intact in a reflection area of each pixel. Color filters are formed on both the transmission area and the adjustment film. The total thickness of the reflection layer and the adjustment film is controlled to be about the half of the thickness of the color filters in the transmission area.
Abstract:
In a non-destructive inspection device of the present invention which detects in a non-destructive manner a defect of a member to be inspected, based on a change in magnetic fluxes due to eddy currents that are generated by an inspection probe having a coil, a driving section which adjusts a position of the inspection probe, and measuring device for, based on a detection signal of the inspection probe, measuring a lift-off between the inspection probe and the member to be inspected are disposed. The driving section is controlled in accordance with a result of measurement of the measuring device, whereby a control of making the lift-off constant is performed.