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公开(公告)号:US11035726B2
公开(公告)日:2021-06-15
申请号:US16488742
申请日:2018-02-26
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi Kasahara , Katsumi Shibayama , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
Abstract: A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror; and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.
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公开(公告)号:US10895501B2
公开(公告)日:2021-01-19
申请号:US16662448
申请日:2019-10-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Toshimitsu Kawai
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
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公开(公告)号:USD833898S1
公开(公告)日:2018-11-20
申请号:US35503138
申请日:2016-12-13
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi , Takafumi Yokino , Katsuhiko Kato
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公开(公告)号:USD829116S1
公开(公告)日:2018-09-25
申请号:US35503183
申请日:2016-12-13
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi , Takafumi Yokino , Katsuhiko Kato
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公开(公告)号:USD825361S1
公开(公告)日:2018-08-14
申请号:US35502848
申请日:2016-10-25
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi , Mitsushi Mineno , Minoru Takase
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公开(公告)号:US20150212003A1
公开(公告)日:2015-07-30
申请号:US14420502
申请日:2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Takafumi Yokino , Masaki Hirose , Anna Yoshida , Kazuto Ofuji , Yoshihiro Maruyama , Takashi Kasahara , Toshimitsu Kawai , Toru Hirohata , Hiroki Kamei , Hiroki Oyama
CPC classification number: G01N21/658 , B82Y40/00 , G01N21/03 , G01N2201/068
Abstract: A SERS element comprises a substrate having a front face; a fine structure part formed on the front face and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part is formed with a plurality of grooves surrounding the respective pillars when seen in the projecting direction of the pillars, while an end part of the protrusion is located within the groove corresponding thereto.
Abstract translation: SERS元件包括具有正面的基板; 形成在前表面上并具有多个支柱的精细结构部件; 以及形成在微细结构部分上并构成用于产生表面增强拉曼散射的光学功能部分的导体层。 导体层具有沿着前表面形成的基部和在与支柱对应的各个位置处从基部突出的多个突起。 当沿柱的突出方向观察时,基部形成有围绕相应柱的多个槽,而突起的端部位于与其对应的槽内。
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47.
公开(公告)号:US11294170B2
公开(公告)日:2022-04-05
申请号:US16765577
申请日:2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
IPC: H01L27/144 , H01L31/0203 , H01L31/0216 , H01L31/18 , G02B27/00 , B08B5/02 , B08B13/00 , G02B5/28
Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.
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48.
公开(公告)号:US11156500B2
公开(公告)日:2021-10-26
申请号:US16609270
申请日:2018-04-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi Kasahara , Katsumi Shibayama , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
Abstract: Provided is a non-transitory computer-readable recording medium recording an optical measurement control program in a light detection device, the program causing a computer to execute a process of measuring light to be measured by acquiring an electric signal output from the light detector, the optical measurement control program causing the computer to function as: a voltage control unit controlling the potential difference generated between the pair of mirrors to gradually increase until the potential difference reaches a set potential difference corresponding to a wavelength of the light to be measured before the acquisition of the electric signal is started; and a signal acquisition unit acquiring the electric signal in a state where the voltage control unit allows the set potential difference to be generated between the pair of mirrors.
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公开(公告)号:US10775238B2
公开(公告)日:2020-09-15
申请号:US16059744
申请日:2018-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Toshimitsu Kawai
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the transmission region.
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公开(公告)号:US10591715B2
公开(公告)日:2020-03-17
申请号:US15117757
申请日:2015-02-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Toshimitsu Kawai
Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.
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