公开(公告)号：US20100177408A1

公开(公告)日：2010-07-15

申请号：US12353807

申请日：2009-01-14

Applicant: Rick Lake ,  Ulrich Boettiger ,  Shashikant Hegde ,  Jacques Duparre

Inventor： Rick Lake ,  Ulrich Boettiger ,  Shashikant Hegde ,  Jacques Duparre

IPC: G02B7/04 ,  G02B7/02 ,  B32B37/00 ,  C23F1/00 ,  B32B38/06

CPC classification number: G02B3/0031 ,  G02B3/0075 ,  G02B7/08 ,  G02B26/0875 ,  Y10T156/1039

Abstract: Micro-electrical-mechanical (MEMS) wafers in which a lens is formed on a micro-electrical-mechanical structure. The micro-electrical-mechanical wafers can comprise a substrate, MEMS structures, and a lens array. A method of forming a micro-electrical-mechanical wafer comprises providing a substrate, forming a micro-electrical-mechanical structure on the substrate, forming a carrier, forming a lens array on the carrier, and transferring the lens array from the carrier onto the micro-electrical-mechanical structure. The lens array is placed above the micro-electrical-mechanical structure.

Abstract translation: 其中在微机电结构上形成透镜的微机电（MEMS）晶片。 微机电晶片可以包括衬底，MEMS结构和透镜阵列。 一种形成微机电晶片的方法包括提供衬底，在衬底上形成微机电结构，形成载体，在载体上形成透镜阵列，以及将透镜阵列从载体转移到 微机电结构。 透镜阵列放置在微机电结构的上方。

公开(公告)号：US20080017943A1

公开(公告)日：2008-01-24

申请号：US11902280

申请日：2007-09-20

Applicant: Ulrich Boettiger ,  Jin Li

Inventor： Ulrich Boettiger ,  Jin Li

IPC: H01L31/0232

CPC classification number: H01L27/14685 ,  H01L27/14627 ,  H01L31/02327

Abstract: Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces are disclosed herein. In one embodiment, a method for forming microlenses includes forming a plurality of shaping members on a microfeature workpiece between adjacent pixels, reflowing the shaping members to form a shaping structure between adjacent pixels, depositing lens material onto the workpiece, removing selected portions of the lens material adjacent to the shaping structure such that discrete masses of lens material are located over corresponding pixels, and heating the workpiece to reflow the discrete masses of lens material and form a plurality of microlenses.

Abstract translation: 本文公开了具有微透镜的微特征工件和在微特征工件上形成微透镜的方法。 在一个实施例中，用于形成微透镜的方法包括在相邻像素之间的微特征工件上形成多个成形构件，回流成形构件以在相邻像素之间形成成形结构，将透镜材料沉积到工件上，移除透镜的选定部分 与成形结构相邻的材料使得透镜材料的离散质量位于相应的像素上方，并且加热工件以回流离散的透镜材料块并形成多个微透镜。

公开(公告)号：US20070238035A1

公开(公告)日：2007-10-11

申请号：US11399314

申请日：2006-04-07

Applicant: Richard Holscher ,  Ulrich Boettiger

Inventor： Richard Holscher ,  Ulrich Boettiger

IPC: G02B5/20 ,  H01L31/0232 ,  H01L31/00

CPC classification number: H01L27/14621 ,  H01L27/14623 ,  H01L31/02162 ,  H01L31/02164

Abstract: An apparatus and method to provide an imager having an array of color filter elements, each color filter element being separated from each other by spacers. The spacers can optically isolate filter elements from each other.

Abstract translation: 一种提供具有滤色器元件阵列的成像器的装置和方法，每个滤色器元件通过间隔物彼此分离。 间隔物可以将过滤元件彼此光学隔离。

公开(公告)号：US20070120162A1

公开(公告)日：2007-05-31

申请号：US11289553

申请日：2005-11-30

Applicant: Zhaohui Yang ,  Ulrich Boettiger

Inventor： Zhaohui Yang ,  Ulrich Boettiger

IPC: H01L21/00 ,  H01L31/062

CPC classification number: H01L27/14685 ,  H01L27/14623 ,  H01L27/14627

Abstract: Methods and apparatuses are disclosed which provide imager devices having a light blocking material layer formed over peripheral circuitry outside a pixel cell array.

Abstract translation: 公开了提供具有在像素单元阵列外部的外围电路上形成的遮光材料层的成像器装置的方法和装置。

公开(公告)号：US07205526B2

公开(公告)日：2007-04-17

申请号：US10740597

申请日：2003-12-22

Applicant: Jin Li ,  Jiutao Li ,  Ulrich Boettiger ,  Loriston Ford

Inventor： Jin Li ,  Jiutao Li ,  Ulrich Boettiger ,  Loriston Ford

IPC: H01J40/14 ,  H01J3/14 ,  H01J5/16

CPC classification number: H01L27/14627 ,  G02B3/0018 ,  G02B3/0037 ,  G02B3/0056

Abstract: A microlens structure includes lower lens layers on a substrate. A sputtered layer of glass, such as silicon oxide, is applied over the lower lens layers at an angle away from normal to form upper lens layers that increase the effective focal length of the microlens structure. The upper lens layers can be deposited in an aspherical shape with radii of curvature longer than the lower lens layers. As a result, small microlenses can be provided with longer focal lengths. The microlenses are arranged in arrays for use in imaging devices.

Abstract translation: 微透镜结构包括在基底上的较低透镜层。 将溅射的玻璃层（例如氧化硅）以与法线成一定角度施加在下透镜层上，以形成增加微透镜结构的有效焦距的上透镜层。 上透镜层可以沉积成具有比下透镜层更长的曲率半径的非球面形状。 结果，可以提供更小焦距的小微透镜。 微透镜被布置成阵列以用于成像装置。

公开(公告)号：US07199347B2

公开(公告)日：2007-04-03

申请号：US11244101

申请日：2005-10-06

Applicant: Jin Li ,  Jiutao Li ,  Ulrich Boettiger ,  Loriston Ford

Inventor： Jin Li ,  Jiutao Li ,  Ulrich Boettiger ,  Loriston Ford

IPC: H01L27/00 ,  H01J3/14 ,  H01J5/16 ,  H01J40/14

CPC classification number: H01L27/14627 ,  G02B3/0018 ,  G02B3/0037 ,  G02B3/0056

Abstract: A microlens structure includes lower lens layers on a substrate. A sputtered layer of glass, such as silicon oxide, is applied over the lower lens layers at an angle away from normal to form upper lens layers that increase the effective focal length of the microlens structure. The upper lens layers can be deposited in an aspherical shape with radii of curvature longer than the lower lens layers. As a result, small microlenses can be provided with longer focal lengths. The microlenses are arranged in arrays for use in imaging devices.

Abstract translation: 微透镜结构包括在基底上的较低透镜层。 将溅射的玻璃层（例如氧化硅）施加在下透镜层上以与法线成一定角度以形成增加微透镜结构的有效焦距的上透镜层。 上透镜层可以沉积成具有比下透镜层更长的曲率半径的非球面形状。 结果，可以提供更小焦距的小微透镜。 微透镜被布置成阵列以用于成像装置。

公开(公告)号：US20070045685A1

公开(公告)日：2007-03-01

申请号：US11209774

申请日：2005-08-24

Applicant: Zhaohui Yang ,  Ulrich Boettiger

Inventor： Zhaohui Yang ,  Ulrich Boettiger

IPC: H01L21/00 ,  H01L31/062

CPC classification number: H01L27/14625 ,  H01L27/14621 ,  H01L27/14627

Abstract: Imaging devices utilizing sub-wavelength gratings to separate the spectral components of the natural white light are disclosed. This disclosed method and apparatus redirects the light to be collected onto separate photosensors for different wavelengths to provide improved quantum efficiency.

Abstract translation: 公开了利用亚波长光栅来分离天然白光的光谱分量的成像装置。 该公开的方法和装置将要收集的光重定向到不同波长的分开的光电传感器，以提供改进的量子效率。

公开(公告)号：US20060275941A1

公开(公告)日：2006-12-07

申请号：US11488848

申请日：2006-07-19

Applicant: Steven Oliver ,  Jin Li ,  Ulrich Boettiger

Inventor： Steven Oliver ,  Jin Li ,  Ulrich Boettiger

IPC: H01L21/00

CPC classification number: H01L27/14618 ,  H01L27/14625 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/1464 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Microelectronic imagers with curved image sensors and methods for manufacturing curved image sensors. In one embodiment, a microelectronic imager device comprises an imager die having a substrate, a curved microelectronic image sensor having a face with a convex and/or concave portion at one side of the substrate, and integrated circuitry in the substrate operatively coupled to the image sensor. The imager die can further include external contacts electrically coupled to the integrated circuitry and a cover over the curved image sensor.

Abstract translation: 具有弯曲图像传感器的微电子成像器和用于制造弯曲图像传感器的方法。 在一个实施例中，微电子成像器装置包括具有基板的成像模具，具有在基板的一侧具有凸和/或凹部的表面的弯曲微电子图像传感器，以及可操作地耦合到图像的基板中的集成电路 传感器。 成像模具还可以包括电耦合到集成电路的外部触点和弯曲图像传感器上的盖。

公开(公告)号：US20060027887A1

公开(公告)日：2006-02-09

申请号：US11209695

申请日：2005-08-24

Applicant: Ulrich Boettiger ,  Jin Li

Inventor： Ulrich Boettiger ,  Jin Li

IPC: H01L31/0232

CPC classification number: H01L27/14603 ,  B29D11/00278 ,  B29D11/00365 ,  G02B3/0018 ,  G02B3/0043 ,  G02B3/005 ,  G02B3/0056 ,  H01L27/14609 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/14641 ,  H01L31/02327 ,  H04N5/37457 ,  H04N9/045

Abstract: A microlens array with reduced or no empty space between individual microlenses and a method for forming the same. The microlens array is formed by patterning a first set of microlens precursors in a checkerboard pattern on a substrate. The first set of microlens precursors is reflowed and cured into first microlenses impervious to subsequent reflows. Then, a second set of microlens precursors is patterned in spaces among the first microlenses, reflowed and cured into second microlenses. The reflows and cures can be conducted under different conditions, and the microlenses may be differently sized. The conditions of the reflows can be chosen to ensure that the focal lengths of microlenses are optimized for maximum sensor signal.

公开(公告)号：US20060023314A1

公开(公告)日：2006-02-02

申请号：US10899009

申请日：2004-07-27

Applicant: Ulrich Boettiger ,  Jin Li

Inventor： Ulrich Boettiger ,  Jin Li

IPC: G02B27/10

CPC classification number: G02B3/0018 ,  G02B3/0043 ,  G02B3/005 ,  G02B3/0056 ,  G02B27/1013 ,  G02B27/1073 ,  G02B27/123 ,  H01L27/14603 ,  H01L27/14625 ,  H01L27/14627 ,  H01L27/14685

Abstract: A semi-conductor based imager includes a microlens array having microlenses with modified focal characteristics. The microlenses are made of a microlens material, the melting properties of which are selectively modified to obtain different shapes after a reflow process. Selected microlenses, or portions of each microlens, are modified, by exposure to ultraviolet light, for example, to control the microlens shape produced by reflow melting. Controlling the microlens shape allows for modification of the focal characteristics of selected microlenses in the microlens array.

Abstract translation: 基于半导体的成像器包括具有改进的焦点特性的微透镜的微透镜阵列。 微透镜由微透镜材料制成，其熔融性质被选择性地修改以在回流工艺之后获得不同的形状。 所选择的微透镜或每个微透镜的部分通过暴露于紫外光来修改，例如以控制通过回流熔融产生的微透镜形状。 控制微透镜形状允许修改微透镜阵列中所选微透镜的焦点特性。