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公开(公告)号:US10656020B2
公开(公告)日:2020-05-19
申请号:US15764943
申请日:2016-09-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi
IPC: H01L31/02 , G01J5/08 , G02B26/00 , G01J3/26 , G01J3/02 , G01J5/20 , G02F1/21 , H01L31/0203 , H01L31/0232 , H01L31/0304 , G01J5/04 , H01L37/02
Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
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公开(公告)号:US10393663B2
公开(公告)日:2019-08-27
申请号:US15553337
申请日:2016-02-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Kazuto Ofuji , Hiroki Oyama , Yoshihiro Maruyama , Nao Inoue
Abstract: An SERS element includes a substrate, a fine structure portion formed on a surface of the substrate and having a plurality of pillars, and a conductor layer formed on the fine structure portion and constituting an optical functional portion that causes surface-enhanced Raman scattering. A groove is provided in an outer surface of each pillar. A plurality of gaps are formed in the conductor layer by forming the conductor layer on the outer surface of each pillar in a state in which at least a portion of an inner surface of the groove is exposed.
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公开(公告)号:USD829580S1
公开(公告)日:2018-10-02
申请号:US35503173
申请日:2016-12-13
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi , Takafumi Yokino , Katsuhiko Kato
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公开(公告)号:USD829578S1
公开(公告)日:2018-10-02
申请号:US35503158
申请日:2016-12-13
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi , Takafumi Yokino , Katsuhiko Kato
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公开(公告)号:USD821901S1
公开(公告)日:2018-07-03
申请号:US35502885
申请日:2016-10-25
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi , Takafumi Yokino , Katsuhiko Kato
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公开(公告)号:US09863884B2
公开(公告)日:2018-01-09
申请号:US14420510
申请日:2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Masashi Ito , Takafumi Yokino , Masaki Hirose , Anna Yoshida , Kazuto Ofuji , Yoshihiro Maruyama , Takashi Kasahara , Toshimitsu Kawai , Toru Hirohata , Hiroki Kamei , Hiroki Oyama
CPC classification number: G01N21/658 , B82Y40/00 , G01N21/03 , G01N2021/651
Abstract: A SERS element comprises a substrate having a front face; a fine structure part formed on the front face and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part has a thickness greater than the height of the pillars.
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公开(公告)号:USD762874S1
公开(公告)日:2016-08-02
申请号:US29528624
申请日:2015-05-29
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masashi Ito , Katsumi Shibayama , Kazuto Ofuji , Hiroki Oyama , Yoshihiro Maruyama
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公开(公告)号:US20150233830A1
公开(公告)日:2015-08-20
申请号:US14420483
申请日:2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masashi Ito , Katsumi Shibayama , Toshimitsu Kawai , Kazuto Ofuji , Hiroki Oyama , Yoshihiro Maruyama , Takafumi Yokino , Masaki Hirose , Anna Yoshida
IPC: G01N21/65
Abstract: A SERS unit comprises an integrally formed handling board and a SERS element secured within a container space provided in the handling board so as to open to one side in a thickness direction of the handling board. The SERS element has a substrate arranged on an inner surface of the container space and an optical function part formed on the substrate, for generating surface-enhanced Raman scattering.
Abstract translation: SERS单元包括整体形成的处理板和固定在设置在处理板中的容器空间内以沿着处理板的厚度方向的一侧开口的SERS元件。 SERS元件具有布置在容器空间的内表面上的基板和形成在基板上的用于产生表面增强拉曼散射的光学功能部件。
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公开(公告)号:USD733912S1
公开(公告)日:2015-07-07
申请号:US29477940
申请日:2013-12-30
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Masashi Ito , Katsumi Shibayama , Kazuto Ofuji , Hiroki Oyama , Yoshihiro Maruyama
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公开(公告)号:US12123799B2
公开(公告)日:2024-10-22
申请号:US16765564
申请日:2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi Kasahara , Katsumi Shibayama , Masaki Hirose , Toshimitsu Kawai , Hiroki Oyama , Yumi Kuramoto
CPC classification number: G01M11/00 , G01J3/0243 , G01J3/26 , G01R1/0675 , G01R27/2605 , G01R31/52 , G02B5/28 , G02B26/001
Abstract: An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force; and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.
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