公开(公告)号：US5602639A

公开(公告)日：1997-02-11

申请号：US505782

申请日：1995-07-21

申请人： Michio Kohno

发明人： Michio Kohno

IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956

CPC分类号： G01N21/956

摘要： A method and an apparatus for inspecting surface conditions of an object, on which a pattern is formed, by detecting scattered light generated by the surface of the object using a detection optical system. The method includes the steps of illuminating the surface of the object, providing first and second photodetectors on a pupil plane of the detection optical system, generating a first signal corresponding to the sum of the outputs of the first and second photodetectors, and a second signal corresponding to the difference between the outputs of the first and second photodetectors, and comparing the first signal with a first threshold value and the second signal with a second threshold value to obtain the logical product of the results of the comparisons for inspecting the surface of the object. The apparatus includes a detection optical system for detecting scattered light generated by the object illuminated by an illuminating device, first and second photodetectors provided at the pupil plane of the detection optical system, a device for comparing a signal corresponding to the sum of outputs of the first and second photodetectors with a first threshold value, and for comparing a signal corresponding to the difference between the outputs of the first and second photodetectors with a second threshold value, and a device for detecting the logical product of the results of the comparison by the comparison device.

摘要翻译： 一种用于通过使用检测光学系统检测由物体的表面产生的散射光来检查形成有图案的物体的表面状况的方法和装置。 该方法包括以下步骤：照亮物体的表面，在检测光学系统的光瞳平面上提供第一和第二光电探测器，产生对应于第一和第二光电探测器的输出之和的第一信号和第二信号 对应于第一和第二光电检测器的输出之间的差异，并且将第一信号与第一阈值进行比较，并且将第二信号与第二阈值进行比较，以获得用于检查表面的比较结果的逻辑积 目的。 该装置包括检测光学系统，用于检测由照明装置照射的物体产生的散射光，设置在检测光学系统的光瞳面上的第一和第二光电探测器，用于比较与检测光学系统的输出和 具有第一阈值的第一和第二光电检测器，以及用于将与第一和第二光电探测器的输出之间的差相对应的信号与第二阈值进行比较的装置，以及用于检测比较结果的逻辑积的装置， 比较装置。

公开(公告)号：US5591985A

公开(公告)日：1997-01-07

申请号：US374884

申请日：1995-01-19

申请人： Toshihiko Tsuji ,  Michio Kohno

发明人： Toshihiko Tsuji ,  Michio Kohno

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  H01L21/027 ,  G01N21/89

CPC分类号： G01N21/94

摘要： A surface state inspecting system includes a scanning optical system for scanning a surface to be inspected, with first light and simultaneously for scanning a diffraction grating with second light, wherein the first light and the second light have mutually different wavelengths and mutually different polarization directions, a light receiving optical system for receiving scattered light produced sidewardly from the surface and diffraction light produced sidewardly from the diffraction grating, and for superposing the received lights one upon another, and a photoelectric converting device for converting light from the light receiving optical system into an electric signal, wherein the scanning optical system and the light receiving optical system provide an optical system which is telecentric with respect to the surface to be inspected.

摘要翻译： 表面状态检查系统包括用第一光扫描待检查表面的扫描光学系统，同时用第二光扫描衍射光栅，其中第一光和第二光具有相互不同的波长和相互不同的偏振方向， 用于接收从表面侧面产生的散射光的光接收光学系统和从衍射光栅侧面产生的衍射光，并将所接收的光叠加在一起的光接收光学系统，以及用于将来自光接收光学系统的光转换为 电信号，其中所述扫描光学系统和所述光接收光学系统提供相对于要检查的表面是远心的光学系统。

公开(公告)号：US5585916A

公开(公告)日：1996-12-17

申请号：US257535

申请日：1994-06-09

申请人： Seiya Miura ,  Michio Kohno

发明人： Seiya Miura ,  Michio Kohno

IPC分类号： G01N21/21 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G03F1/84

CPC分类号： G01N21/21 ,  G01N21/9501

摘要： A surface inspection device and method wherein an illumination system is arranged so that light from a laser diode is transformed into parallel light which is then directed through a half waveplate to a surface of a reticle to be inspected. A detecting system is arranged so that scattered light from a particle on the surface, for example, is collected by a lens array onto a sensor array. The direction of polarization of the parallel light defined by the half waveplate is made substantially parallel to a plane containing optical axes of the illumination system and the detecting system. Thus, even if an error occurs in the angle of incidence of the parallel light upon the reticle, a change in scattered light intensity due to interference between scattered light is kept small to assure accurate discrimination of the particle.

摘要翻译： 一种表面检查装置和方法，其中照明系统被布置成使得来自激光二极管的光被转换成平行光，然后将平行光引导通过半波片到待检查的掩模版的表面。 检测系统被布置成使得来自表面上的颗粒的散射光例如由透镜阵列收集到传感器阵列上。 由半波片限定的平行光的偏振方向基本上平行于包含照明系统和检测系统的光轴的平面。 因此，即使在光掩模上的平行光的入射角发生错误，由于散射光之间的干涉引起的散射光强度的变化也保持较小，从而确保了颗粒的准确辨别。

公开(公告)号：US5528360A

公开(公告)日：1996-06-18

申请号：US479357

申请日：1995-06-07

申请人： Michio Kohno

发明人： Michio Kohno

IPC分类号： G01N21/88 ,  G01N21/89 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  G06T1/00 ,  H01L21/027

CPC分类号： G01N21/8901

摘要： Beam scanning accompanying the rotation of a polygonal mirror for scanning is performed while projecting two light beams having different incident angles onto the polygonal mirror, and simultaneously illuminating positions having the same shape on patterns having the same shape on a reticle by two light beams reflected by the polygonal mirror. Light beams from the respective irradiated points are separately detected and compared with each other, whereby the presence of a foreign particle or the like is inspected. The interval between the irradiated points is changed by the function of an actuator in order to deal with changes and errors in the distance between patterns on different reticles.

摘要翻译： 在将具有不同入射角的两束光束投影到多面镜上的同时进行伴随用于扫描的多面镜的旋转的光束扫描，并且通过由光束反射的两个光束同时在光罩上照射具有相同形状的图案上具有相同形状的图案的位置 多面镜。 分别检测来自各照射点的光束，并进行比较，由此检查异物等的存在。 通过致动器的功能来改变照射点之间的间隔，以便处理不同光栅上图案之间的距离的变化和误差。

公开(公告)号：US4999511A

公开(公告)日：1991-03-12

申请号：US493438

申请日：1990-03-14

申请人： Michio Kohno

发明人： Michio Kohno

IPC分类号： G01N21/88 ,  G01N21/89 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  H01L21/027 ,  H01L21/30

CPC分类号： G01N21/94 ,  G01N2021/887 ,  G01N2021/8905 ,  G01N2021/95676 ,  G01N21/8851

摘要： A surface state inspecting device, usable with a sample having substantially parallel first and second surfaces coupled by a side wall, for inspecting the state of each of the surfaces, is disclosed. The device includes a light irradiating system for projecting light obliquely to the sample, from the first surface side; an inspecting system for receiving light from the first surface irradiated by the irradiating system and light from the second surface irradiated with the light passed through the first surface, for inspecting the first and second surfaces; and an inspection control system effective to set a time zone for inspection of the first surface so that it does not overlap with the moment at which light impinges on a boundary between the second surface and the side wall.

摘要翻译： 公开了一种表面状态检查装置，其可用于具有大致平行的第一和第二表面的样品，该第一和第二表面通过侧壁联接，用于检查每个表面的状态。 该装置包括从第一表面侧将光倾斜地投射到样品的光照射系统; 用于接收由照射系统照射的第一表面的光和来自第二表面的光的检查系统，所述光穿过第一表面，用于检查第一和第二表面; 以及检查控制系统，其有效地设置用于检查第一表面的时间段，使得其不与光照射在第二表面和侧壁之间的边界上的时刻重叠。