Sensing unit and method of making same
    32.
    发明申请
    Sensing unit and method of making same 失效
    感应单元及其制作方法

    公开(公告)号:US20080314146A1

    公开(公告)日:2008-12-25

    申请号:US11812629

    申请日:2007-06-20

    IPC分类号: G01P15/02

    摘要: In a sensing unit according to the present invention, a movable portion of a spring portion is supported floatably above a recessed portion formed in a substrate. Thus, the movable portion is capable of oscillating in any direction parallel to the substrate surface. Moreover, the movable portion is capable of oscillating in the thickness direction of the substrate such that the amplitude of a center side end portion thereof reaches a maximum. A sensor portion is provided on the movable portion. As a result, the sensing unit according to the present invention has a higher degree of freedom in terms of the measurement direction than a conventional sensing unit that oscillates in only one direction.

    摘要翻译: 在根据本发明的感测单元中,弹簧部分的可移动部分可浮动地支撑在形成于基底中的凹部上。 因此,可移动部分能够在平行于基板表面的任何方向上振动。 此外,可移动部分能够在基板的厚度方向上振动,使得其中心侧端部的振幅达到最大。 传感器部分设置在可动部分上。 结果,根据本发明的感测单元在仅在一个方向上振荡的常规感测单元方面具有比测量方向更高的自由度。

    Thin-film magnetic head structure adapted to manufacture a thin-film head having a base magnetic pole part, a yoke magnetic pole part, and an intervening insulative film
    34.
    发明授权
    Thin-film magnetic head structure adapted to manufacture a thin-film head having a base magnetic pole part, a yoke magnetic pole part, and an intervening insulative film 有权
    薄膜磁头结构适于制造具有基极磁极部分,轭磁极部分和中间绝缘膜的薄膜头

    公开(公告)号:US07468863B2

    公开(公告)日:2008-12-23

    申请号:US11172984

    申请日:2005-07-05

    IPC分类号: G11B5/147

    摘要: A thin-film magnetic head structure has a configuration adapted to manufacture a thin-film magnetic head configured such that a main magnetic pole layer including a magnetic pole end part on a side of a medium-opposing surface opposing a recording medium, a write shield layer opposing the magnetic pole end part so as to form a recording gap layer on the medium-opposing surface side, and a thin-film coil wound about the write shield layer or main magnetic pole layer are laminated. The main magnetic pole layer includes a base magnetic pole part comprising the magnetic pole end part and a base depression distanced farther from the medium-opposing surface than the magnetic pole end part, and an embedded magnetic pole part buried in the base depression and joined to the base magnetic pole part. The thin-film magnetic head structure includes a yoke magnetic pole part joined to the base magnetic pole part and embedded magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer, and an intervening insulative film disposed between the embedded magnetic pole part and yoke magnetic pole part at a position distanced farther from the medium-opposing surface than the recording gap layer.

    摘要翻译: 薄膜磁头结构具有适于制造薄膜磁头的结构,该薄膜磁头被构造成使得包括在与记录介质相对的介质相对表面侧的磁极端部的主磁极层,写入屏蔽 层,以在介质相对表面侧上形成记录间隙层,并且缠绕在写入屏蔽层或主磁极层上的薄膜线圈层叠。 主磁极层包括基极磁极部分,该基极磁极部分包括磁极端部和距中间相对表面远离磁极端部的基座凹部,以及埋入基座凹部中的嵌入式磁极部, 基极磁极部分。 薄膜磁头结构包括:与记录间隙层相比离开与介质相对表面更远的位置处连接到基极磁极部分和嵌入式磁极部分的轭磁极部分,以及设置在介质相对表面之间的中间绝缘膜 嵌入式磁极部和轭磁极部位于比记录间隙层远离介质相对面的位置。

    Magnetic head for perpendicular magnetic recording and method of manufacturing same
    35.
    发明申请
    Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
    用于垂直磁记录的磁头及其制造方法

    公开(公告)号:US20060198049A1

    公开(公告)日:2006-09-07

    申请号:US11213863

    申请日:2005-08-30

    IPC分类号: G11B5/147 G11B5/127

    摘要: A magnetic head comprises: an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.

    摘要翻译: 磁头包括:由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层,设置在所述封装层的顶表面上,并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质相对表面中的端面,端面具有第一部分和第二部分,其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中,非磁性金属层存在于第二部分的两侧,侧面在轨道宽度方向上彼此相对。

    Method of manufacturing near-field light generator including waveguide and plasmon generator
    37.
    发明授权
    Method of manufacturing near-field light generator including waveguide and plasmon generator 有权
    制造包括波导和等离子体发生器的近场光发生器的方法

    公开(公告)号:US08349198B2

    公开(公告)日:2013-01-08

    申请号:US12814669

    申请日:2010-06-14

    IPC分类号: B29D11/00

    CPC分类号: G02B6/1226 B82Y20/00

    摘要: A near-field light generator includes: a waveguide; a clad layer having a penetrating opening and disposed on the waveguide; a plasmon generator accommodated in the opening; and a dielectric film interposed between the plasmon generator and each of the waveguide and the clad layer. In a method of manufacturing the near-field light generator, an initial clad layer is initially formed on the waveguide, and then the initial clad layer is taper-etched by RIE to form a recess that does not reach the top surface of the waveguide. Subsequently, the recess is etched by wet etching until the top surface of the waveguide is exposed in part. Next, the dielectric film is formed in the opening, and the plasmon generator is formed on the dielectric film.

    摘要翻译: 近场光发生器包括:波导; 具有穿透开口并布置在波导上的覆层; 容纳在开口中的等离子体发生器; 以及介于所述等离子体发生器与所述波导管和所述包覆层中的每一个之间的电介质膜。 在制造近场光发生器的方法中,最初在波导上形成初始包层,然后通过RIE对初始包层进行锥蚀刻以形成不到达波导顶表面的凹部。 随后,通过湿蚀刻蚀刻凹部,直到波导的顶表面部分露出。 接着,在开口部形成电介质膜,在电介质膜上形成等离子体发生器。

    METHOD OF MANUFACTURING HEAT-ASSISTED MAGNETIC RECORDING HEAD WITH INTERNAL MIRROR
    38.
    发明申请
    METHOD OF MANUFACTURING HEAT-ASSISTED MAGNETIC RECORDING HEAD WITH INTERNAL MIRROR 有权
    用内镜制造热辅助磁记录头的方法

    公开(公告)号:US20120269048A1

    公开(公告)日:2012-10-25

    申请号:US13538996

    申请日:2012-06-29

    IPC分类号: G11B11/00

    摘要: A manufacturing method for a heat-assisted magnetic recording head includes the step of forming an internal mirror that includes a reflecting film support body and a reflecting film. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the internal mirror includes the step of forming the reflecting film support body and the step of forming the reflecting film. The step of forming the reflecting film support body forms an initial support body, and performs two taper-etching processes on the initial support body so that the initial support body is provided with the first and second inclined surfaces.

    摘要翻译: 一种热辅助磁记录头的制造方法,包括形成包括反射膜支撑体和反射膜的内反射镜的步骤。 反射膜支撑体包括第一和第二倾斜表面。 反射膜包括分别位于第一和第二倾斜表面上的第一和第二部分。 形成内反射镜的步骤包括形成反射膜支撑体的步骤和形成反射膜的步骤。 形成反射膜支撑体的步骤形成初始支撑体,并且在初始支撑体上执行两个锥形蚀刻处理,使得初始支撑体设置有第一和第二倾斜表面。

    Magnetic head for perpendicular magnetic recording with shield around main magnetic pole
    39.
    发明授权
    Magnetic head for perpendicular magnetic recording with shield around main magnetic pole 有权
    用于垂直磁记录的磁头,带有主磁极周围的屏蔽

    公开(公告)号:US08289649B2

    公开(公告)日:2012-10-16

    申请号:US12960954

    申请日:2010-12-06

    IPC分类号: G11B5/127

    摘要: A magnetic head includes a main magnetic pole, a shield having an end face located in a medium facing surface to wrap around an end face of the main magnetic pole, and a gap part provided between the main magnetic pole and the shield. The shield includes a bottom shield, two side shields, and a top shield. The gap part includes first and second gap layers. In a manufacturing method of the magnetic head, a mold is formed on the top surface of the bottom shield, the mold having a shape determined by photolithography and being intended to be removed later. Next, the two side shields are formed on the top surface of the bottom shield by performing plating without forming a seed layer. Next, the mold is removed and then the first gap layer, the main magnetic pole, the second gap layer, and the top shield are formed in succession.

    摘要翻译: 磁头包括主磁极,屏蔽,其具有位于介质面向表面中的端面以围绕主磁极的端面,以及设置在主磁极和屏蔽之间的间隙部分。 屏蔽包括底部屏蔽,两个侧面屏蔽和顶部屏蔽。 间隙部分包括第一和第二间隙层。 在磁头的制造方法中,在底部屏蔽的顶面上形成有模具,该模具具有通过光刻法确定的形状并且稍后被去除。 接下来,通过进行电镀而不形成种子层,在底部屏蔽的顶表面上形成两个侧面屏蔽。 接下来,移除模具,然后依次形成第一间隙层,主磁极,第二间隙层和顶部屏蔽。