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    Catadioptric reduction projection optical system
    34.
    发明授权
    Catadioptric reduction projection optical system 失效
    反射折射减光投影光学系统

    公开(公告)号：US5251070A

    公开(公告)日：1993-10-05

    申请号：US948428

    申请日：1992-09-22

    Applicant: Sumio Hashimoto ,  Yutaka Ichihara ,  Hideo Mizutani

    Inventor： Sumio Hashimoto ,  Yutaka Ichihara ,  Hideo Mizutani

    IPC: G02B17/08 ,  G03F7/20 ,  G02B17/00

    CPC classification number: G02B17/0892 ,  G02B17/08 ,  G03F7/70225

    Abstract: This invention intends to provide a catadioptric reduction projection optical system of a construction in which an on-axis light beam is used in a catadioptric system and resolving power is prevented from being deteriorated, and more particularly a catadioptric reduction projection optical system having a first lens unit G1 of negative refractive power for diffusing a light beam from a reticle 1, a semi-transparent mirror 5 for transmitting therethrough the light beam from the first lens unit G1, plane parallel plates 2, 3 and 4 disposed obliquely with respect to the optical axis between the first lens unit G1 and the semi-transparent mirror 5 for correcting aberrations attributable to the semi-transparent mirror 5, a concave reflecting mirror 7 for returning the light beam emerging from the semi-transparent mirror 5 to the semi-transparent mirror 5 while converging the light beam, and a second lens unit G3 of positive refractive power for converging the light beam returned to the semi-transparent mirror 5 and reflected by the semi-transparent mirror 5 and forming the reduced image of the pattern on the reticle 1 on a wafer 8.

    Abstract translation: 本发明旨在提供一种反射折射减小投影光学系统，其中在反射折射系统中使用轴上光束，并且防止分辨能力劣化，更具体地，涉及具有第一透镜的折反射折射投影光学系统 用于使来自掩模版1的光束扩散的负折光力单元G1，用于透射来自第一透镜单元G1的光束的半透明反射镜5，相对于光学器件倾斜设置的平面平行板2,3和4 在第一透镜单元G1和半透明反射镜5之间的轴线，用于校正由半透明反射镜5归因的像差;凹面反射镜7，用于将从半透明反射镜5出射的光束返回到半透明反射镜 会聚光束的第二透镜单元G3和正折射力的第二透镜单元G3，用于会聚返回到半透镜的光束 透明反射镜5并被半透明反射镜5反射，并且在晶片8上的标线片1上形成图案的缩小图像。

    Power source unit and illumination device
    35.
    发明授权
    Power source unit and illumination device 失效
    电源单元和照明装置

    公开(公告)号：US08556458B2

    公开(公告)日：2013-10-15

    申请号：US12818871

    申请日：2010-06-18

    Applicant: Kazunari Higuchi ,  Takayoshi Moriyama ,  Sumio Hashimoto ,  Shinichi Kumashiro

    Inventor： Kazunari Higuchi ,  Takayoshi Moriyama ,  Sumio Hashimoto ,  Shinichi Kumashiro

    IPC: F21V1/00

    CPC classification number: F21K9/68 ,  F21Y2115/10

    Abstract: According to one embodiment, a power source unit includes a substrate and a reflective body. The substrate includes a plurality of light-emitting elements mounted thereon. The reflective body includes a plurality of incident openings each corresponding to one of the plurality of light-emitting elements, an output opening to which light that has passed through the incident opening is output, and a plurality of reflective surfaces that expand from the incident opening toward the output opening. Reflective surfaces included in the plurality of reflective surfaces and positioned on an outermost side are provided to be adjacent to one another, and an angle is set so as to prevent reflective light of light emitted from the light-emitting elements from traveling toward an outer side in a reflective surface formed on the outer side.

    Abstract translation: 根据一个实施例，电源单元包括基板和反射体。 基板包括安装在其上的多个发光元件。 反射体包括多个入射孔，每个入射开口各自对应于多个发光元件中的一个，输出通过入射开口的光的输出口，以及从入射开口扩展的多个反射面 朝向输出开口。 设置在多个反射面中并且位于最外侧的反射面被设置为彼此相邻，并且设置角度以防止从发光元件发射的光的反射光向外侧行进 在形成于外侧的反射面上。

    RECESSED LUMINAIRE
    37.
    发明申请
    RECESSED LUMINAIRE 审中-公开
    被吸收的灯泡

    公开(公告)号：US20100128491A1

    公开(公告)日：2010-05-27

    申请号：US12624958

    申请日：2009-11-24

    Applicant: SUMIO HASHIMOTO ,  TAKAYOSHI MORIYAMA ,  KAZUNARI HIGUCHI

    Inventor： SUMIO HASHIMOTO ,  TAKAYOSHI MORIYAMA ,  KAZUNARI HIGUCHI

    IPC: F21V15/00

    CPC classification number: F21V21/04 ,  F21S8/026 ,  F21V23/006 ,  F21V23/02 ,  F21V25/12 ,  F21Y2115/10

    Abstract: A recessed luminaire includes a main body including a light source, a terminal base attachment member, which is fire-resistant and extending laterally from the main body, and a terminal base, which is disposed on a lower surface of the terminal base attachment member and to which power wires extending in parallel in a direction of extension of the terminal base attachment member are connected.

    Abstract translation: 嵌入式照明器包括：主体，其包括光源，端子座安装构件，其耐火并且从主体横向延伸;以及端子座，其设置在端子座安装构件的下表面上，以及 连接在端子座安装构件的延伸方向上平行延伸的电力线。

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