公开(公告)号：US20060148129A1

公开(公告)日：2006-07-06

申请号：US11325464

申请日：2006-01-05

Applicant: Seung-mo Lim ,  Hwa-sun Lee ,  Jae-chang Lee ,  Jae-woo Chung ,  Woon-bae Kim

Inventor： Seung-mo Lim ,  Hwa-sun Lee ,  Jae-chang Lee ,  Jae-woo Chung ,  Woon-bae Kim

IPC: H01L21/50 ,  H01L21/30

CPC classification number: H01L21/187 ,  H01L21/78 ,  H01L24/26 ,  H01L24/83 ,  H01L2224/8385 ,  H01L2224/83894 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01059 ,  H01L2924/07802 ,  H01L2924/10253

Abstract: A silicon direct bonding method including preparing two silicon substrates having corresponding bonding surfaces, forming a trench in at least one bonding surface of the two silicon substrates, and thermally bonding the two silicon substrates to one another. The trench may be along a dicing line. The trench may communicate with an outer edge of the bonded substrates.

Abstract translation: 一种硅直接接合方法，包括制备具有相应接合表面的两个硅衬底，在两个硅衬底的至少一个接合表面中形成沟槽，并将两个硅衬底彼此热粘合。 沟槽可以沿着切割线。 沟槽可以与结合的衬底的外边缘连通。

公开(公告)号：US20050112754A1

公开(公告)日：2005-05-26

申请号：US10476036

申请日：2002-12-05

Applicant: Dae-Sung Yoon ,  You-Seop Lee ,  Geun-Bae Lim ,  Jae-Chang Lee ,  Moon-Hyuck Jung

Inventor： Dae-Sung Yoon ,  You-Seop Lee ,  Geun-Bae Lim ,  Jae-Chang Lee ,  Moon-Hyuck Jung

IPC: C12N15/09 ,  B01L3/00 ,  B01L7/00 ,  C12M1/00 ,  C12Q1/68

CPC classification number: C12Q1/686 ,  B01L3/5025 ,  B01L3/5027 ,  B01L7/52 ,  B01L7/54 ,  B01L2300/1827 ,  B01L2300/1861 ,  B01L2300/1883 ,  C12Q2565/629

Abstract: The present invention provides an apparatus for amplifying a polynucleotide, comprising a substrate, a microflow channel system disposed in the substrate and comprising a sample inlet port, a sample flow channel extending from the sample inlet port, and a polynucleotide polymerization reaction chamber in fluid communication with the sample flow channel, a first insulation groove formed around the reaction chamber, and a means for regulating a temperature of the reaction chamber. Accordingly, a multiple chamber device for amplifying a polynucleotide, comprising multiple polymerization reaction chambers formed in a substrate can be manufactured.

Abstract translation: 本发明提供了一种用于放大多核苷酸的装置，包括基底，设置在基底中的微流道系统，包括样品入口，从样品入口延伸的样品流动通道和流体连通的多核苷酸聚合反应室 与样品流动通道形成在反应室周围形成的第一绝缘槽，以及用于调节反应室温度的装置。 因此，可以制造用于扩增多晶硅的多室装置，其包括形成在基板中的多个聚合反应室。

公开(公告)号：US08919924B2

公开(公告)日：2014-12-30

申请号：US12929612

申请日：2011-02-03

Applicant: Tae Kyung Lee ,  Jae Chang Lee ,  Hwa Sun Lee

Inventor： Tae Kyung Lee ,  Jae Chang Lee ,  Hwa Sun Lee

IPC: B41J2/135 ,  B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14 ,  B41J2/16 ,  B41J2/1632 ,  Y10T29/49401

Abstract: Disclosed are an inkjet print head and a method of manufacturing the same. An inkjet print head according to an aspect of the invention may include: an inkjet board having an ink passage therein; a cutting portion provided outside the ink passage of the inkjet board and having a cutting surface created by separation into head chip units of the inkjet board; and an auxiliary cutting portion provided from one surface of the cutting portion inwardly in a thickness direction of the inkjet board, and assisting the separation into head chip units of the inkjet board.

Abstract translation: 公开了一种喷墨打印头及其制造方法。 根据本发明的一个方面的喷墨打印头可以包括：其中具有墨通道的喷墨板; 设置在喷墨基板的墨水通道外侧的切割部分，具有通过分离成喷墨印版的头芯片单元而形成的切割面; 以及辅助切割部分，其从所述切割部分的一个表面沿着所述喷墨板的厚度方向向内设置，并辅助分离成所述喷墨印版的头芯片单元。

公开(公告)号：US08806727B2

公开(公告)日：2014-08-19

申请号：US12712442

申请日：2010-02-25

Applicant: Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

Inventor： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC: H04R17/00

CPC classification number: B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.

Abstract translation: 在振动板上形成压电致动器以向多个压力室中的每一个提供驱动力的方法包括在振动板上形成下电极，在下电极上形成压电层，位于对应于 在所述下电极上形成支撑垫，所述支撑垫接触所述压电层的一端并且远离所述压电层的一端延伸，形成从所述压电层的顶表面延伸到顶部的上电极 并且将上电极连接到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。

公开(公告)号：US08622520B2

公开(公告)日：2014-01-07

申请号：US13532585

申请日：2012-06-25

Applicant: Hyun Ho Shin ,  Byung Hun Kim ,  Jong Beom Kim ,  Jae Chang Lee ,  Won Chul Sim

Inventor： Hyun Ho Shin ,  Byung Hun Kim ,  Jong Beom Kim ,  Jae Chang Lee ,  Won Chul Sim

IPC: B41J2/135 ,  B41J2/14

CPC classification number: B41J2/14233 ,  B41J2002/14362

Abstract: Disclosed herein is an ejecting apparatus including: an upper body which includes an inlet through which ejectable fluid flows in from an external source, a channel which fluidly communicates with the inlet and through which the ejectable fluid flows, and an upper mounting portion which fluidly communicates with the channel and is opened downwardly; a lower body which includes a lower mounting portion which is opened upwardly to correspond to the upper mounting portion, and a nozzle slit which fluidly communicates with the lower mounting portion to eject the ejectable fluid to an outside, the lower body being fastened to the upper body, and a nozzle chip which is interposed between the upper mounting portion and the lower mounting portion to receive the ejectable fluid from the channel and discharge the ejectable fluid into the nozzle slit by being driven by an actuator.

Abstract translation: 本文公开了一种喷射装置，包括：上体，其包括可喷射流体从外部源流入的入口，与入口流体连通并且可喷射流体流过的通道;以及流体连通的上部安装部 与通道向下打开; 下体，其包括向上打开以对应于上安装部分的下安装部分，以及与下安装部分流体连通以将可喷射流体喷射到外部的喷嘴狭缝，下体固定到上部 主体和插入在上安装部和下安装部之间的喷嘴芯片，以从通道接收可喷射的流体，并且通过致动器驱动将可喷射流体排出到喷嘴狭缝中。

公开(公告)号：US07682001B2

公开(公告)日：2010-03-23

申请号：US11581333

申请日：2006-10-17

Applicant: Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

Inventor： Tae-kyung Lee ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC: B41J2/045

CPC classification number: B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

Abstract translation: 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

公开(公告)号：US20090102895A1

公开(公告)日：2009-04-23

申请号：US12038170

申请日：2008-02-27

Applicant: Jong-beom Kim ,  Jae-chang Lee

Inventor： Jong-beom Kim ,  Jae-chang Lee

IPC: B41J2/045 ,  H01L21/00

CPC classification number: B41J2/1628 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/49401

Abstract: Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.

Abstract translation: 提供一种压电喷墨打印头及其制造方法。 压电喷墨打印头包括第一和第二单晶硅衬底。 墨流路设置在第一基板的第一表面中。 墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴 用于喷墨。 第二基板结合到第一基板，从而完成油墨流动路径。 多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。 在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

公开(公告)号：US07445314B2

公开(公告)日：2008-11-04

申请号：US11064834

申请日：2005-02-25

Applicant: Jae-chang Lee ,  Jung-min Oh ,  Jae-woo Chung ,  Jong-beom Kim ,  Seung-mo Lim

Inventor： Jae-chang Lee ,  Jung-min Oh ,  Jae-woo Chung ,  Jong-beom Kim ,  Seung-mo Lim

IPC: B41J2/135 ,  B41J29/38 ,  B41J2/045

CPC classification number: B41J2/161 ,  B41J2/14137 ,  B41J2/14233 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646

Abstract: In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.

Abstract translation: 在压电喷墨打印头和喷嘴板的制造方法中，压电喷墨打印头包括流路板，该流路板具有墨流路，该墨流路包括填充有待喷射的墨的压力室，形成在 流路板的上表面，并且用于向压力室供给用于喷墨的驱动力;以及喷嘴板，其结合到流路板的下表面，该喷嘴板包括用于从通过喷嘴板钻出的压力室喷射油墨的喷嘴 。 打印头还可以包括形成在喷嘴板的下表面上的加热器，用于加热油墨流路中的油墨和/或形成在喷嘴板的下表面上或在流路板的上表面上形成的温度检测器。

公开(公告)号：US07442622B2

公开(公告)日：2008-10-28

申请号：US11505420

申请日：2006-08-17

Applicant: Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

Inventor： Sung-gyu Kang ,  Seung-mo Lim ,  Jae-chang Lee ,  Woon-bae Kim

IPC: H01L21/30

CPC classification number: H01L21/187 ,  H01L21/2007

Abstract: A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.

Abstract translation: 抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。 沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。 在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

公开(公告)号：US20080007594A1

公开(公告)日：2008-01-10

申请号：US11764844

申请日：2007-06-19

Applicant: Tae-woon CHA ,  Young-nam KWON ,  Jae-Chang LEE

Inventor： Tae-woon CHA ,  Young-nam KWON ,  Jae-Chang LEE

IPC: B41J2/135 ,  B05D5/10

CPC classification number: B41J2/1606 ,  B41J2/162 ,  B41J2/164

Abstract: A nozzle plate for an inkjet head and a method of manufacturing the nozzle plate includes a silicon substrate having a nozzle, a thermally oxidized silicon layer formed on an outer surface of the silicon substrate and an inner wall of the nozzle, an adhesion layer deposited on the thermally oxidized silicon layer formed on the outer surface of the silicon substrate and formed of silicon oxide, and an ink-repellent coating layer deposited on the adhesion layer.

Abstract translation: 用于喷墨头的喷嘴板和喷嘴板的制造方法包括具有喷嘴的硅基板，形成在硅基板的外表面上的热氧化硅层和喷嘴的内壁，粘合层沉积在 形成在硅衬底的外表面上并由氧化硅形成的热氧化硅层和沉积在粘合层上的拒墨涂层。