Abstract:
A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.
Abstract:
An optical scanner system and method having a light source, a first mirror rotatable along a first torsion axis to reflect light from the light source, a first vibrator to vibrate the first mirror, a second mirror positioned adjacent to the first mirror and rotatable along a second torsion axis different from the first torsion axis, a second vibrator to vibrate the second mirror, and a mirror reflecting the light reflected from the first mirror to the second mirror. In addition, microminiaturization may be further embodied by applying an MEMS technology. Further, a vibrating body may be designed to vibrate with high frequencies by reducing the size and mass of the vibrating body. Through embodiments of the present invention, it is also possible to prevent interference between light entering a mirror package and the finally reflected light.
Abstract:
The present invention provides a bumper reinforcement comprising a body having a upper plate, a front plate connected with a front end of the upper plate and extended downward, and a lower plate connected with a lower end of the front plate; towers, each of which including a base plate provided in a rear part thereof to be mounted on a body frame of a vehicle and a lateral plate formed at one end of the base plate to be connected to the body; and a connecting part to connect the body and the towers, wherein the front plate of the body has a upper part, a lower part and a middle part, and the connecting part comprises parallel parts to connect the upper and lower parts of the front plate of the body with a front end of the lateral plate of the tower, and a slant part to connect the middle part of the front plate of the body with a rear end of the lateral plate of the tower.
Abstract:
A silicon direct bonding method including preparing two silicon substrates having corresponding bonding surfaces, forming a trench in at least one bonding surface of the two silicon substrates, and thermally bonding the two silicon substrates to one another. The trench may be along a dicing line. The trench may communicate with an outer edge of the bonded substrates.
Abstract:
An inventive array of thin film actuated mirrors is provided with an active matrix, an array of actuating structures and an array of thin film mirrors, wherein the actuating structure is provided with a pair of side actuators and the center actuator, both ends of the side actuators being fixed to the active matrix, the upper thin film electrode of the side actuator electrically being connected to the lower thin film electrode of the center actuator to thereby function as a common bias electrode, the lower thin film electrode of the side actuator being connected to the upper thin film electrode of the center actuator to thereby function as a signal electrode. When the electric field is applied in the thin film actuated mirror, the side actuator expands and the center actuator contracts upward, allowing the thin film actuated mirror to tilt an increased angle. Each of the thin film mirrors is cantilevered at a distal end of the center actuator in each of the actuating structures.
Abstract:
There is provided a silicon substrate including: a first connection part connected to a manifold and having a first width of a first size; a second connection part connected to a pressure chamber and having a second width of a second size; and a restrictor part connecting the first connection part to the second connection part and having a third width of a third size smaller than the first size or the second size, wherein a boundary part connecting the restrictor part to the first connection part or the restrictor part to the second connection part is formed to be curved.
Abstract:
An inkjet print head and a method for manufacturing the same are provided. The inkjet print head includes: an upper board having a pressure chamber; and a lower board including an upper silicon layer, an insulating layer, and a lower silicon layer, wherein the lower board includes a projection formed of the upper silicon layer and protruded into the interior of the pressure chamber in order to reduce the space of the pressure chamber, and a lower surface of the upper board and an upper surface of the lower silicon layer are fixed.
Abstract:
An inkjet head includes an ink chamber, a pressure chamber and a piezoelectric member. The ink chamber includes an ink storage area storing ink, a plurality of dampers filled with the ink to be discharged, and a plurality of nozzles connected to the dampers and discharging the ink. The pressure chamber is disposed on the ink chamber, overlapping at least two of the plurality of dampers, and includes a pressure transmitting medium. The piezoelectric member is disposed on the pressure chamber. The ink is discharged from the nozzles in substantially a same amount through control of a single piezoelectric member at one time.
Abstract:
A piezoelectric actuator includes a first electrode layer, a piezoelectric layer and a second electrode layer. The first electrode layer is formed on a vibration plate. The piezoelectric layer is formed on the first electrode layer, the piezoelectric layer comprising piezoelectric particles formed on the surface of a self-assembled monolayer. The second electrode layer is formed on the piezoelectric layer to face the first electrode layer. Thus, a self-assembled monolayer is formed, so that the piezoelectric characteristics of a piezoelectric layer and/or the stiffness of the piezoelectric layer may be increased. Thus, piezoelectric characteristics of the piezoelectric actuator may be enhanced, and the required voltage, which is required to realize a proper deformation amount of the piezoelectric actuator, may be decreased. Moreover, the stiffness of the piezoelectric actuator may be increased, so that the vibration remaining at the piezoelectric actuator may be minimized even though the driving is finished.
Abstract:
A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.