METROLOGY METHOD OF CALIBRATING AND MONITORING RADIATION IN EUV LITHOGRAPHIC SYSTEMS

    公开(公告)号:US20250137844A1

    公开(公告)日:2025-05-01

    申请号:US18756439

    申请日:2024-06-27

    Abstract: An instrumented substrate may provide a metrology platform for monitoring extreme ultraviolet (EUV) radiation in an image plane of a EUV lithography tool. The instrumented substrate may include in-band dosage sensors. The in-band dosage sensors may generate dosage measurements corresponding to the illumination which is in-band. The instrumented substrate may also include out-of-band dosage sensors and in-band scattered dosage sensors. The instrumented substrate may be housed within a front opening unified pod (FOUP) of a system.

    APPARATUS, METHOD AND COMPUTER PROGRAM

    公开(公告)号:US20250137843A1

    公开(公告)日:2025-05-01

    申请号:US18917873

    申请日:2024-10-16

    Inventor: Bibek SAMANTA

    Abstract: An apparatus comprising: a detector for detecting light output from a plurality of scanning lasers; means for controlling respective lengths of light paths from the plurality of scanning lasers to the detector such that the respective lengths of the light paths are first lengths at a first time and second lengths, different to the first lengths, at a second time; and means for adjusting at least one light path orientation to obtain coincidence of the light output from the plurality of scanning lasers at the detector at the first time and at the second time.

    SENSOR MODULE, MANUFACTURING METHOD THEREFOR, AND SENSOR SYSTEM

    公开(公告)号:US20250137842A1

    公开(公告)日:2025-05-01

    申请号:US18730559

    申请日:2023-03-16

    Abstract: An alignment property between a mount portion to which a lens unit is mounted and the lens unit is eliminated, and the degree of freedom in selecting and designing the lens unit and the mount portion is increased by an alignment function of an attachment portion. A sensor module of the present disclosure includes a lens unit, a base portion on which a sensor for receiving light from the lens unit is installed, a mount portion installed on the base portion, and an attachment portion that aligns the mount portion with the lens unit.

    NON-CONTACT CORE BODY TEMPERATURE MEASUREMENT

    公开(公告)号:US20250134390A1

    公开(公告)日:2025-05-01

    申请号:US19010830

    申请日:2025-01-06

    Abstract: A non-contact temperature measurement system for estimating core body temperature is disclosed. The temperature measurement system can include an emitter and one or more sensors configured to generate sensor data responsive to detecting radiation emanating from the patient comprising reflected radiation. The sensor data from the sensor is useable to determine temperature information and distance information. A hardware processor can determine a distance between the one or more sensors and the patient from the sensor data and estimate core body temperature of the patient from the sensor data. A display module can generate indicia including the core body temperature and vary the indicia based on the distance between the one or more sensors and the patient to indicate whether the distance is optimal.

    Method and miniaturized apparatus for Raman spectroscopy using rotatable diffraction grating and slit

    公开(公告)号:US12287291B1

    公开(公告)日:2025-04-29

    申请号:US18930957

    申请日:2024-10-29

    Applicant: Apollon Inc.

    Abstract: A compact Raman spectroscopic analysis device includes a housing that forms an internal accommodation space therein, a light source unit that is disposed within the housing and irradiates light onto a subject, a light receiving unit that is disposed within the housing and receives light reflected or scattered from the subject to obtain a Raman spectrum, and a processor that is disposed within the housing and configured to analyze biological material of the subject based on a peak area value of a Raman spectrum range corresponding to the biological material. The light receiving unit includes a diffraction grating that reflects the reflected or scattered light, a slit through which the reflected light passes, and a light detector.

    Method and optical system for characterizing displays

    公开(公告)号:US12287243B2

    公开(公告)日:2025-04-29

    申请号:US17594945

    申请日:2020-04-29

    Applicant: WOOPTIX S.L.

    Abstract: The disclosure relates to a method for characterizing and operating a display, such as a light-field display or a display with or without a phase screen, comprising: an input stage wherein at least one test signal is provided as input to the display, a capture stage for obtaining display output information, said capture stage comprising capturing, by at least one acquisition system placed at a distance from the display, an impulse response of the display in response to the at least one provided test signal, wherein said capturing of an impulse response comprises measuring the at the at least one acquisition system received intensity distribution of the light emitted by the display in response to the at least one test signal, and/or capturing the wavefront phase of the light emitted by the display in response to the at least one test signal.

    IMAGING APPARATUS
    29.
    发明申请

    公开(公告)号:US20250133276A1

    公开(公告)日:2025-04-24

    申请号:US19006109

    申请日:2024-12-30

    Abstract: An imaging apparatus includes an imaging optical system that has a light transmission characteristic of transmitting near-infrared light in a near-infrared light wavelength range including 1550 nm and transmitting visible light in a visible light wavelength range, a switchable filter that selectively transmits the near-infrared light and the visible light, an imaging sensor that has sensitivity to heat radiation from a subject and the visible light, and outputs an imaging signal by selectively transmitting the near-infrared light and the visible light, and an image processor that generates near-infrared image data based on the imaging signal output by imaging the near-infrared light with the imaging sensor, generates visible image data based on the imaging signal output by imaging the visible light with the imaging sensor, and generates image data representing a heat radiation image by subtracting the visible image data from the near-infrared image data.

    SYSTEMS AND METHODS FOR IN-PLANE CHARACTERIZATION OF ISOTROPIC AND ANISOTROPIC MATERIALS

    公开(公告)号:US20250130187A1

    公开(公告)日:2025-04-24

    申请号:US18921393

    申请日:2024-10-21

    Abstract: An apparatus for measuring a property of a material sample includes a heatsink, a heat source, and a two-dimensional transient thermal imaging system. The heatsink is configured to support a material sample at a fixed position thereon and to maintain a preconfigured contact temperature with the material sample. The heat source is configured to direct an input heat signal at a fixed position toward an opening of the heatsink toward the material sample. The two-dimensional transient thermal imaging system is configured to generate a resultant two-dimensional transient temperature distribution dataset associated with the material sample upon the heat source directing the input heat signal toward the opening to heat the material sample.

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