CONTAMINATION-INSPECTING APPARATUS AND DETECTION CIRCUIT
    21.
    发明申请
    CONTAMINATION-INSPECTING APPARATUS AND DETECTION CIRCUIT 有权
    污染检查装置和检测电路

    公开(公告)号:US20080278717A1

    公开(公告)日:2008-11-13

    申请号:US12116241

    申请日:2008-05-07

    CPC classification number: G01N21/9501 G01N21/94 G01N2201/1241

    Abstract: The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.

    Abstract translation: 检测部具有:减法模块,用于当参考电压产生模块向检测系统施加参考电压时,从检测系统的数据计算校正数据; 用于保持校正数据的数据保持模块; 用于对检测数据进行校正的加法模块; 比较模块,用于将检测数据与切换数据进行比较; 以及选择器,用于根据比较模块的输出来切换包括经过校正的数据的检测系统的数据。

    System and methods for dynamic range extension using variable length integration time sampling

    公开(公告)号:US07423255B2

    公开(公告)日:2008-09-09

    申请号:US11618501

    申请日:2006-12-29

    Abstract: A photo-detector generated signal is measured as a sample set comprising a long signal and a short signal. The short signal is scaled to the value of the long signal if the long signal exceeds a dynamic range associated with the photo detector. In one embodiment, the short signal is obtained during a short time interval that is at the approximate middle of a long time interval such that the short and long intervals share a common median time value. Given such symmetry, an approximately linear signal yields a proportionality parameter between the long and short signals thereby allowing the short signal to be scaled. The proportionality parameter facilitates determination of an integration independent component of the photo detector signal that should be removed from the measured long and short signals before scaling. A plurality of sample sets can also be processed such that each sample set overlaps with its neighboring sample set, thereby increasing the effective number of sample sets.

    System and methods for dynamic range extension using variable length integration time sampling
    23.
    发明授权
    System and methods for dynamic range extension using variable length integration time sampling 有权
    使用可变长度积分时间采样的动态范围扩展的系统和方法

    公开(公告)号:US07423251B2

    公开(公告)日:2008-09-09

    申请号:US11426514

    申请日:2006-06-26

    Abstract: A photo-detector generated signal is measured as a sample set comprising a long signal and a short signal. The short signal is scaled to the value of the long signal if the long signal exceeds a dynamic range associated with the photo detector. In one embodiment, the short signal is obtained during a short time interval that is at the approximate middle of a long time interval such that the short and long intervals share a common median time value. Given such symmetry, an approximately linear signal yields a proportionality parameter between the long and short signals thereby allowing the short signal to be scaled. The proportionality parameter facilitates determination of an integration independent component of the photo detector signal that should be removed from the measured long and short signals before scaling. A plurality of sample sets can also be processed such that each sample set overlaps with its neighboring sample set, thereby increasing the effective number of sample sets.

    Abstract translation: 光检测器产生的信号被测量为包括长信号和短信号的样本集。 如果长信号超过与光电检测器相关联的动态范围,则短信号被缩放到长信号的值。 在一个实施例中,在短时间间隔内获得短信号,该短时间间隔在长时间间隔的大致中间处,使得短间隔和长间隔共享公共中值时间值。 给定这种对称性,近似线性的信号在长信号和短信号之间产生比例参数,从而允许短信号被缩放。 比例参数有助于确定光电探测器信号的积分独立分量,该分量在缩放之前应从测量的长信号和短信号中去除。 也可以处理多个样本集,使得每个样本集合与其相邻样本集重叠,从而增加样本集合的有效数量。

    Multi-wavelength oximeter having a means for disregarding a poor signal
    25.
    发明授权
    Multi-wavelength oximeter having a means for disregarding a poor signal 失效
    具有用于忽略不良信号的装置的多波长血氧计

    公开(公告)号:US4714341A

    公开(公告)日:1987-12-22

    申请号:US704772

    申请日:1985-02-21

    Abstract: An oximeter for measuring oxygen saturation in arterial blood includes a light source for projecting light to a body member to be measured, a light responsive circuit for receiving the light which has transmitted through said body member and for generating at least first, second and third signals at three different wavelengths, and a calculator for calculating at least first SaO.sub.2 data using first and second signals and second SaO.sub.2 data using first and third signals. It is detected whether or not a difference between the first and second SaO.sub.2 data is within a predetermined level. When the difference is within the predetermined level, it is assumed that the first and/or second SaO.sub.2 data are valid, but if not, they are assumed as invalid.

    Abstract translation: 用于测量动脉血液中的氧饱和度的血氧计包括用于将光投射到待测量的身体构件的光源,用于接收透过所述本体构件的光并用于产生至少第一,第二和第三信号的光响应电路 在三个不同的波长处,以及计算器,用于使用第一和第二信号和使用第一和第三信号的第二SaO2数据来计算至少第一SaO2数据。 检测第一和第二SaO2数据之间的差是否在预定水平内。 当该差在预定水平之内时,假设第一和/或第二SaO2数据是有效的,但如果不是,则假设它们是无效的。

    PHASE FRACTION MEASUREMENT USING LIGHT SOURCE ADJUSTED IN DISCRETE STEPS

    公开(公告)号:US20170370896A1

    公开(公告)日:2017-12-28

    申请号:US15194853

    申请日:2016-06-28

    Abstract: Disclosed herein is an apparatus including a structure containing a multiphase fluid and having a transparent window. A collimated light source emits light through the transparent window structure at a wavelength at which a component of a desired phase of the multiphase fluid is absorptive. A photodetector is positioned such that the emitted light passes through the multiphase fluid in the structure and out through the transparent window structure to impinge upon the photodetector. The photodetector has an actual dynamic range for light detection. Processing circuitry adjusts a power of the collimated light source in a series of steps dependent upon a relationship between an output level of the photodetector and a threshold to cause measurement of the emitted light over an effective dynamic range greater than the actual dynamic range. Properties of the multiphase fluid are determined as a function of the measured emitted light.

    MEASURING DEVICE AND MEASURING METHOD
    28.
    发明申请
    MEASURING DEVICE AND MEASURING METHOD 有权
    测量装置和测量方法

    公开(公告)号:US20160061800A1

    公开(公告)日:2016-03-03

    申请号:US14784726

    申请日:2014-04-15

    Abstract: A measuring device (10) and a measuring method measure a concentration of gaseous and/or aerosol components of a gas mixture. A reaction carrier (14) has a flow channel (42) defining a reaction chamber (46) with an optically detectable reaction material (48) to react with at least one component or with a reaction product of the component. The measuring device (12) includes a gas delivery unit (2) and detection unit (3) having a lighting device (37) for lighting the reaction chamber (46). An optical sensor (38) detects the reaction. An evaluation unit (4) evaluates data of the optical sensor (38) to determines a concentration. The gas delivery unit (2) includes a gas delivering device (28) delivering the gas mixture through the gas outlet channel (18) and a control/regulation unit (31) which controls/regulates a flow of the gas mixture through the flow channel (42) depending on at least one reaction speed parameter.

    Abstract translation: 测量装置(10)和测量方法测量气体混合物的气体和/或气溶胶组分的浓度。 反应载体(14)具有限定反应室(46)的流动通道(42),其具有可光学检测的反应材料(48)以与至少一种组分或组分的反应产物反应。 测量装置(12)包括具有用于点亮反应室(46)的照明装置(37)的气体输送单元(2)和检测单元(3)。 光学传感器(38)检测反应。 评估单元(4)评估光学传感器(38)的数据以确定浓度。 气体输送单元(2)包括输送气体混合物通过气体出口通道(18)和控制/调节单元(31)的气体输送装置(28),控制/调节单元(31)控制/调节气体混合物通过流动通道 (42)取决于至少一个反应速度参数。

    Dynamic illumination in optical inspection systems
    29.
    发明授权
    Dynamic illumination in optical inspection systems 有权
    光学检测系统中的动态照明

    公开(公告)号:US07973921B2

    公开(公告)日:2011-07-05

    申请号:US12145708

    申请日:2008-06-25

    Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

    Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体,其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如,当工具检查晶片管芯中的存储器区域和外围特征时,可以增加或减小照明强度。 在一些实施例中,调整可以基于在预检查设置顺序期间获得的数据,其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

    Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range
    30.
    发明授权
    Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range 有权
    用于通过强制光电探测器进入非线性范围来扩展检查系统的检测范围的检查系统和方法

    公开(公告)号:US07746462B2

    公开(公告)日:2010-06-29

    申请号:US11751293

    申请日:2007-05-21

    Abstract: An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.

    Abstract translation: 本文提供了一种用于增加检查系统的检测范围的检查系统和方法。 根据一个实施例,检查系统可以包括具有多个级的光电检测器,其适于将从样本散射的光转换成输出信号,以及耦合的用于扩展光电检测器的检测范围的分压器网络 ,检查系统的检测范围)通过饱和至少一个级。 这迫使光电探测器以非线性方式工作。 然而,通过校准光电检测器输出以消除可能通过故意饱和至少一个级而产生的任何非线性效应来避免测量不准确。 在一个示例中,可以在校准阶段期间生成值表,以将光电检测器输出转换成实际的散射光量。

Patent Agency Ranking