摘要:
A semiconductor device manufacturing method, the method including: forming an insulation layer having a protruding portion, the insulation layer having a surface and a rising surface that protrudes upward from the surface, on a semiconductor substrate; forming a conductive layer to cover the insulation layer having the protruding portion; and removing a predetermined region of the conductive layer by patterning the predetermined region according to an etching process using microwave plasma, which uses a microwave as a plasma source, while applying bias power of 70 mW/cm2 or above on the semiconductor substrate, under a high pressure condition of 85 mTorr or above.
摘要翻译:一种半导体器件制造方法,所述方法包括:在半导体衬底上形成具有突出部分的绝缘层,所述绝缘层具有从所述表面向上突出的表面和上升表面; 形成导电层以覆盖具有突出部分的绝缘层; 并且通过使用微波等离子体(其使用微波作为等离子体源)的蚀刻工艺,在半导体衬底上施加70mW / cm 2或更高的偏置功率,在所述半导体衬底上施加预定区域,从而去除所述导电层的预定区域 85 mTorr以上高压条件。
摘要:
A CPU 80 controls data transfer from a first device to a second device in a kernel mode. A main memory 90 stores data to be transferred from the first device to the second device. The CPU 80 has: a first device control means 81 which controls the first device; a second device control means which controls the second device; and a data transfer control means 83 which makes a read instruction which instructs the first device control means 81 to store data read from the first device in the main memory 3, and makes a write instruction which instructs the second device control means 82 to write the data stored in the main memory 3 in the second device.
摘要:
A method for processing a substrate to form a desired pattern by an etching process after forming a mask pattern over the substrate includes the steps of: forming two layers over the substrate; measuring a width of the mask pattern or an etched pattern of one of the two layers; and adjusting a flow rate of any one of HBr and other gases, used in the etching process, based on the measured width. The two layers may include a silicon nitride layer and an organic dielectric layer.
摘要:
A workpiece attitude change apparatus includes a first suction nozzle which includes a suction port, the suction port being able to suction a first surface of a workpiece, a second suction nozzle which has a predetermined inclination relative to the first suction nozzle, the second suction nozzle including a suction port, the suction port of the second suction nozzle being able to suction a second surface of the workpiece, and a vacuum pressure switch device for imparting a vacuum pressure to the first suction nozzle to cause the suction port of the first suction nozzle to suction the first surface of the workpiece, the vacuum pressure switch device stopping supply of the vacuum pressure to the first suction nozzle and imparting a vacuum pressure to the second suction nozzle to cause the suction port of the second suction nozzle to suction the second surface of the workpiece.
摘要:
An optical pickup for recording a hologram by using an angle multiplexing method. An optical beam is separated into two beams, a signal beam and a reference beam having different convergence/divergence degrees, by using an optical component such as a diffraction lens. The signal and reference beams are made incident upon the same objective, and the optical component or the objective lens is moved in a direction perpendicular to an optical axis, to thereby realize angle multiplex recording. If an optical information recording medium is inclined, the optical component or the objective lens is moved along the direction along which the optical information recording medium moved to change an angle of the reference beam incident upon the optical information recording medium and compensate for degradation of a reproduction signal.
摘要:
A solid electrolytic capacitor includes a package for a capacitor element including an anode lead portion and a cathode portion. The package includes an insulating resin member which is arranged to cover the capacitor element and which includes hole portions formed therethrough. An anode terminal of the solid electrolytic capacitor includes a metal-plating layer which is placed in the hole portion to be electrically connected to the anode lead portion through the hole portion. A cathode terminal of the solid electrolytic capacitor includes a metal-plating layer which is placed in the hole portion to be electrically connected to the cathode conducting portion through the hole portion.
摘要:
In the adiabatic apparatus of the present invention, a vessel includes an adiabatic layer in which an object is taken. A plurality of thermal shield plates are located in the adiabatic layer. Each thermal shield plate concentrically surrounds the object. A temperature control section cools or heats the object and the plurality of thermal shield plates. A switch section thermally connects the temperature control section to the plurality of thermal shield plates and the object if temperature of the plurality of thermal shield plates and the object is controlled, and thermally separates the temperature control section from the plurality of thermal shield plates and the object if control of the temperature of the plurality of thermal shield plates and the object is completed.
摘要:
A magneto-optical data recording system comprises magnetic field pulse applying means for applying to a magneto-optic recording medium a magnetic field pulse of a polarity corresponding to code data to be recorded, and means for heating the recording medium in a pulsating manner at a predetermined frequency synchronous with the code data to be recorded. During recording, the magnetic field pulse applying means applies a magnetic field pulse of a polarity corresponding to code data along a track of the recording medium and the heating means continuously heats the recording medium in a pulsating manner at a predetermined frequency synchronous with the code data to thereby directly overwrite the code data. The magnetic field pulse applying means includes a magnetic coil driven by code data from a source of code data (data generator). The heating means includes an optical head which comprises a source of laser beam driven by a laser driver and an optical system which focuses the laser beam from the source of laser beam as a small light spot onto the recording medium.
摘要:
An air conditioner is provided and includes a louver which is provided at a blowing opening. The louver is moved rotationally from above to below or from below to above by a variable speed mechanism. At the time of heating, a louver rotational speed while the louver is moved rotationally in a range of a blowing angle .theta..sub.1 is set to a speed .omega..sub.1 within a vortices generation area relative to a wind velocity of blowing air flow. Also, a louver rotational speed while the louver is moved rotationally over the blowing angle .theta..sub.1 is set to a speed .omega..sub.1 within a vortices non-generation area relative to the wind velocity of blowing air flow. Thereby, at the time of heating, downward reach of warm air in a room while the louver is moved rotationally below the predetermined blowing angle and a temperature diffusibility while the louver is moved rotationally above the predetermined blowing angle are improved. Further, an air conditioner in which, at the time of cooling, a uniformity of temperature distribution is improved is also provided.
摘要:
A magneto-optical data recording system comprises magnetic field pulse applying apparatus for applying to a magneto-optic recording medium a magnetic field pulse of a polarity corresponding to code data to be recorded, and apparatus for heating the recording medium in a pulsating manner at a predetermined frequency synchronous with the code data to be recorded. During recording, the magnetic field pulse applying apparatus applies a magnetic field pulse of a polarity corresponding to code data along a track of the recording medium and the heating apparatus continuously heats the recording medium in a pulsating manner at a predetermined frequency synchronous with the code data to thereby directly overwrite the code data. The magnetic field pulse applying apparatus includes a magnetic coil driven by code data from a source of code data (data generator). The heating apparatus includes an optical head which comprises a source of laser beam driven by a laser driver and an optical system which focuses the laser beam from the source of laser beam as a small light spot onto the recording medium.