Semiconductor device manufacturing method
    21.
    发明授权
    Semiconductor device manufacturing method 有权
    半导体器件制造方法

    公开(公告)号:US08765589B2

    公开(公告)日:2014-07-01

    申请号:US12673923

    申请日:2008-08-26

    IPC分类号: H01L21/3205 H01L21/4763

    摘要: A semiconductor device manufacturing method, the method including: forming an insulation layer having a protruding portion, the insulation layer having a surface and a rising surface that protrudes upward from the surface, on a semiconductor substrate; forming a conductive layer to cover the insulation layer having the protruding portion; and removing a predetermined region of the conductive layer by patterning the predetermined region according to an etching process using microwave plasma, which uses a microwave as a plasma source, while applying bias power of 70 mW/cm2 or above on the semiconductor substrate, under a high pressure condition of 85 mTorr or above.

    摘要翻译: 一种半导体器件制造方法,所述方法包括:在半导体衬底上形成具有突出部分的绝缘层,所述绝缘层具有从所述表面向上突出的表面和上升表面; 形成导电层以覆盖具有突出部分的绝缘层; 并且通过使用微波等离子体(其使用微波作为等离子体源)的蚀刻工艺,在半导体衬底上施加70mW / cm 2或更高的偏置功率,在所述半导体衬底上施加预定区域,从而去除所述导电层的预定区域 85 mTorr以上高压条件。

    DATA CONTROL SYSTEM, DATA CONTROL METHOD, AND DATA CONTROL PROGRAM
    22.
    发明申请
    DATA CONTROL SYSTEM, DATA CONTROL METHOD, AND DATA CONTROL PROGRAM 有权
    数据控制系统,数据控制方法和数据控制程序

    公开(公告)号:US20130346643A1

    公开(公告)日:2013-12-26

    申请号:US14002945

    申请日:2012-02-23

    IPC分类号: G06F13/16

    摘要: A CPU 80 controls data transfer from a first device to a second device in a kernel mode. A main memory 90 stores data to be transferred from the first device to the second device. The CPU 80 has: a first device control means 81 which controls the first device; a second device control means which controls the second device; and a data transfer control means 83 which makes a read instruction which instructs the first device control means 81 to store data read from the first device in the main memory 3, and makes a write instruction which instructs the second device control means 82 to write the data stored in the main memory 3 in the second device.

    摘要翻译: CPU 80以内核模式控制从第一设备到第二设备的数据传输。 主存储器90存储要从第一设备传送到第二设备的数据。 CPU80具有:控制第一装置的第一装置控制装置81; 控制第二装置的第二装置控制装置; 以及数据传送控制装置83,其使得指令第一装置控制装置81将从第一装置读取的数据存储在主存储器3中的读取指令,并且进行指示第二装置控制装置82写入的写指令 存储在第二装置中的主存储器3中的数据。

    PLASMA ETCHING METHOD
    23.
    发明申请
    PLASMA ETCHING METHOD 审中-公开
    等离子体蚀刻法

    公开(公告)号:US20130071955A1

    公开(公告)日:2013-03-21

    申请号:US13234449

    申请日:2011-09-16

    IPC分类号: H01L21/66

    摘要: A method for processing a substrate to form a desired pattern by an etching process after forming a mask pattern over the substrate includes the steps of: forming two layers over the substrate; measuring a width of the mask pattern or an etched pattern of one of the two layers; and adjusting a flow rate of any one of HBr and other gases, used in the etching process, based on the measured width. The two layers may include a silicon nitride layer and an organic dielectric layer.

    摘要翻译: 在衬底上形成掩模图案之后通过蚀刻工艺处理衬底以形成期望图案的方法包括以下步骤:在衬底上形成两层; 测量所述掩模图案的宽度或所述两层之一的蚀刻图案; 并且基于所测量的宽度调节在蚀刻工艺中使用的HBr和其它气体中的任何一种的流速。 两层可以包括氮化硅层和有机电介质层。

    APPARATUS FOR CHANGING WORKPIECE ATTITUDE AND METHOD FOR MANUFACTURING ARTICLE
    24.
    发明申请
    APPARATUS FOR CHANGING WORKPIECE ATTITUDE AND METHOD FOR MANUFACTURING ARTICLE 审中-公开
    改变工作原理的方法和制造方法

    公开(公告)号:US20080284080A1

    公开(公告)日:2008-11-20

    申请号:US12120570

    申请日:2008-05-14

    IPC分类号: B23Q1/25 B25B11/00

    摘要: A workpiece attitude change apparatus includes a first suction nozzle which includes a suction port, the suction port being able to suction a first surface of a workpiece, a second suction nozzle which has a predetermined inclination relative to the first suction nozzle, the second suction nozzle including a suction port, the suction port of the second suction nozzle being able to suction a second surface of the workpiece, and a vacuum pressure switch device for imparting a vacuum pressure to the first suction nozzle to cause the suction port of the first suction nozzle to suction the first surface of the workpiece, the vacuum pressure switch device stopping supply of the vacuum pressure to the first suction nozzle and imparting a vacuum pressure to the second suction nozzle to cause the suction port of the second suction nozzle to suction the second surface of the workpiece.

    摘要翻译: 工件姿态改变装置包括:第一吸嘴,其包括吸入口,吸入口能够吸附工件的第一表面;相对于第一吸嘴具有预定倾角的第二吸嘴,第二吸嘴 包括吸入口,第二吸嘴的吸入口能够吸附工件的第二表面;以及真空压力开关装置,用于向第一吸嘴施加真空压力,以使第一吸嘴的吸入口 为了抽吸工件的第一表面,真空压力开关装置停止向第一吸嘴供应真空压力,并向第二吸嘴施加真空压力,以使第二吸嘴的吸入口吸入第二表面 的工件。

    OPTICAL PICKUP, OPTICAL INFORMATION RECORDING AND REPRODUCING APPARATUS AND METHOD FOR OPTICALLY RECORDING AND REPRODUCING INFORMATION
    25.
    发明申请
    OPTICAL PICKUP, OPTICAL INFORMATION RECORDING AND REPRODUCING APPARATUS AND METHOD FOR OPTICALLY RECORDING AND REPRODUCING INFORMATION 有权
    光学拾取,光学信息记录和再现设备以及用于光学记录和再现信息的方法

    公开(公告)号:US20080219128A1

    公开(公告)日:2008-09-11

    申请号:US12038174

    申请日:2008-02-27

    IPC分类号: G11B7/00

    摘要: An optical pickup for recording a hologram by using an angle multiplexing method. An optical beam is separated into two beams, a signal beam and a reference beam having different convergence/divergence degrees, by using an optical component such as a diffraction lens. The signal and reference beams are made incident upon the same objective, and the optical component or the objective lens is moved in a direction perpendicular to an optical axis, to thereby realize angle multiplex recording. If an optical information recording medium is inclined, the optical component or the objective lens is moved along the direction along which the optical information recording medium moved to change an angle of the reference beam incident upon the optical information recording medium and compensate for degradation of a reproduction signal.

    摘要翻译: 一种用于通过使用角度复用方法记录全息图的光学拾取器。 通过使用诸如衍射透镜的光学部件,将光束分离成两束,信号光束和具有不同会聚/发散度的参考光束。 信号和参考光束入射到相同的物镜上,并且光学部件或物镜在垂直于光轴的方向上移动,从而实现角度多路复用记录。 如果光学信息记录介质倾斜,则光学部件或物镜沿着光学信息记录介质移动的方向移动以改变入射在光学信息记录介质上的参考光束的角度并补偿光学信息记录介质的劣化 再现信号。

    Adiabatic apparatus
    27.
    发明授权
    Adiabatic apparatus 失效
    绝热仪器

    公开(公告)号:US5960868A

    公开(公告)日:1999-10-05

    申请号:US22886

    申请日:1998-02-12

    CPC分类号: F25D19/006 H01F6/04

    摘要: In the adiabatic apparatus of the present invention, a vessel includes an adiabatic layer in which an object is taken. A plurality of thermal shield plates are located in the adiabatic layer. Each thermal shield plate concentrically surrounds the object. A temperature control section cools or heats the object and the plurality of thermal shield plates. A switch section thermally connects the temperature control section to the plurality of thermal shield plates and the object if temperature of the plurality of thermal shield plates and the object is controlled, and thermally separates the temperature control section from the plurality of thermal shield plates and the object if control of the temperature of the plurality of thermal shield plates and the object is completed.

    摘要翻译: 在本发明的绝热装置中,容器包括绝热层,其中取出物体。 多个隔热板位于绝热层中。 每个热屏蔽板同心地围绕物体。 温度控制部冷却或加热物体和多个热屏蔽板。 如果控制多个热屏蔽板和物体的温度,则开关部分将温度控制部分热连接到多个热屏蔽板和物体,并且将温度控制部分与多个热屏蔽板和 如果多个热屏蔽板和物体的温度的控制完成,则对象物体。

    Air conditioner
    29.
    发明授权
    Air conditioner 失效
    冷气机

    公开(公告)号:US5743103A

    公开(公告)日:1998-04-28

    申请号:US722832

    申请日:1996-09-27

    IPC分类号: F24F11/00 F24F13/14

    CPC分类号: F24F11/0009 F24F11/0078

    摘要: An air conditioner is provided and includes a louver which is provided at a blowing opening. The louver is moved rotationally from above to below or from below to above by a variable speed mechanism. At the time of heating, a louver rotational speed while the louver is moved rotationally in a range of a blowing angle .theta..sub.1 is set to a speed .omega..sub.1 within a vortices generation area relative to a wind velocity of blowing air flow. Also, a louver rotational speed while the louver is moved rotationally over the blowing angle .theta..sub.1 is set to a speed .omega..sub.1 within a vortices non-generation area relative to the wind velocity of blowing air flow. Thereby, at the time of heating, downward reach of warm air in a room while the louver is moved rotationally below the predetermined blowing angle and a temperature diffusibility while the louver is moved rotationally above the predetermined blowing angle are improved. Further, an air conditioner in which, at the time of cooling, a uniformity of temperature distribution is improved is also provided.

    摘要翻译: 提供一种空气调节器,包括设置在吹风口的百叶窗。 百叶窗通过变速机构从上方旋转移动到下方或从下方向上移动。 在加热时,在吹风角度θ1的范围内将百叶窗旋转移动时的百叶窗转速相对于吹风空气流的风速设定在涡旋产生区域内的速度ω1。 而且,当百叶窗旋转地在吹风角θ1上移动时的百叶窗转速在相对于吹风空气流的风速的涡旋非产生区域内被设定为速度ω1。 由此,在升温时,当百叶窗旋转地移动到预定吹风角度以下时,室内温暖空气的向下到达,而百叶窗旋转地高于预定吹风角度时的温度扩散性得到改善。 此外,还提供了一种其中在冷却时提高了温度分布均匀性的空调。