公开(公告)号：US10446753B2

公开(公告)日：2019-10-15

申请号：US15205815

申请日：2016-07-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC: C23C16/44 ,  H01L51/00 ,  H01B13/30 ,  C23C14/24 ,  C23C14/56 ,  C23C16/455 ,  C23C16/50 ,  H01L51/52 ,  H01L51/56 ,  H01L27/32

Abstract: A vapor deposition apparatus in which a deposition process is performed by moving a substrate, the vapor deposition apparatus including a supply unit that injects at least one raw material gas towards the substrate, and a blocking gas flow generation unit that is disposed corresponding to the supply unit and generates a gas-flow that blocks a flow of the raw material gas.

公开(公告)号：US09481929B2

公开(公告)日：2016-11-01

申请号：US14177180

申请日：2014-02-10

Applicant: Samsung Display Co., Ltd.

Inventor： Choel-Min Jang ,  Sung-Hun Key ,  In-Kyo Kim ,  Suk-Won Jung ,  Myung-Soo Huh

IPC: H01L21/36 ,  C23C16/455

CPC classification number: C23C16/45551

Abstract: A vapor deposition apparatus for depositing thin films on a substrate includes a supply unit including a plurality of linear supply members configured to supply at least one gas; and a nozzle unit including a plurality of nozzle members connected to the plurality of supply members and configured to supply the at least one gas toward the substrate, wherein two adjacent nozzle members of the plurality of nozzle members are connected to at least one common supply member of the plurality of supply members.

Abstract translation: 一种用于在衬底上沉积薄膜的气相沉积设备包括：供给单元，包括多个线性供应构件，其被构造成供应至少一种气体; 以及喷嘴单元，其包括连接到所述多个供应构件并被配置为朝向所述基板供应所述至少一种气体的多个喷嘴构件，其中所述多个喷嘴构件中的两个相邻的喷嘴构件连接到至少一个共同的供应构件 的多个供应构件。

公开(公告)号：US20140302626A1

公开(公告)日：2014-10-09

申请号：US13964020

申请日：2013-08-09

Applicant: Samsung Display Co., Ltd.

Inventor： Cheol-Rae Jo ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jeong-Ho Yi

IPC: H01L51/56

CPC classification number: H01L51/0011 ,  H01L2251/566

Abstract: Provided are a method of manufacturing a display that may reduce deposition nonuniformity while concurrently manufacturing a plurality of displays, and a deposition apparatus that may be used in the method, wherein the method includes: preparing a mother substrate having a plurality of regions in a matrix pattern, the mother substrate being for forming a plurality of display units corresponding to the plurality of regions; inserting the mother substrate into a deposition chamber, wherein a deposition source is in the deposition chamber; depositing a material on the mother substrate by using a mask including a plurality of parallel stripe-shaped masking sheets extending in a first direction; and cutting the mother substrate along a periphery of each of the plurality of display units to obtain the plurality of displays.

Abstract translation: 提供一种制造可以减少沉积不均匀性同时制造多个显示器的显示器的方法，以及可用于该方法的沉积设备，其中该方法包括：制备具有矩阵中多个区域的母基板 所述母体衬底用于形成对应于所述多个区域的多个显示单元; 将母基板插入沉积室，其中沉积源在沉积室中; 通过使用包括沿第一方向延伸的多个平行的条状掩模片的掩模将材料沉积在母体衬底上; 以及沿着所述多个显示单元中的每一个的周边切割所述母体基板以获得所述多个显示器。