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    DEPOSITION APPARATUS AND METHOD OF DEPOSITING THIN-FILM OF ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE DEPOSITION APPARATUS
    24.
    发明申请
    DEPOSITION APPARATUS AND METHOD OF DEPOSITING THIN-FILM OF ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE DEPOSITION APPARATUS 审中-公开
    沉积装置和使用沉积装置沉积有机发光显示装置的薄膜的方法

    公开(公告)号：US20160072065A1

    公开(公告)日：2016-03-10

    申请号：US14614019

    申请日：2015-02-04

    Applicant: Samsung Display Co., Ltd.

    Inventor： Jaesik Kim ,  Hyunsung Bang ,  Duckjung Lee ,  Sungsoon Im ,  Youngsuk Cho ,  Kyuhwan Hwang

    IPC: H01L51/00 ,  H01L51/56 ,  B05B15/04

    CPC classification number: H01L51/0011 ,  B05B12/16 ,  C23C14/042 ,  C23C14/24 ,  H01L51/0012 ,  H01L51/56

    Abstract: Provided is a deposition apparatus including a deposition source including a plurality of nozzles that spray a deposition material onto a substrate; a mask disposed between the substrate and the deposition source and separated from the substrate, and including a plurality of first openings through which the deposition material passes; and at least one deposition incident angle adjusting plate disposed between the mask and the deposition source and including a plurality of second openings for adjusting a deposition incident angle of the deposition material that is sprayed from the plurality of nozzles; wherein the at least one deposition incident angle adjusting plate is movable in a first direction toward the substrate or a second direction opposite the first direction, and the deposition incident angle adjusting plate is spaced apart from the nozzles.

    Abstract translation: 提供了一种沉积设备，其包括沉积源，该沉积源包括将沉积材料喷射到基底上的多个喷嘴; 掩模，其设置在所述基板和所述沉积源之间并与所述基板分离，并且包括沉积材料通过的多个第一开口; 以及设置在所述掩模和所述沉积源之间的至少一个沉积入射角调整板，并且包括用于调节从所述多个喷嘴喷射的沉积材料的沉积入射角的多个第二开口; 其特征在于，所述至少一个沉积入射角度调整板可朝向所述基板朝向第一方向移动或与所述第一方向相反的第二方向移动，并且所述沉积入射角度调整板与所述喷嘴间隔开。

    Mask, method of providing the same, and method of providing display panel using mask
    25.
    发明授权
    Mask, method of providing the same, and method of providing display panel using mask 有权

    公开(公告)号：US11885006B2

    公开(公告)日：2024-01-30

    申请号：US18158679

    申请日：2023-01-24

    Applicant: Samsung Display Co., Ltd.

    Inventor： Youngmin Moon ,  Minho Moon ,  Seungyong Song ,  Sungsoon Im

    IPC: C23C14/04 ,  B05C21/00 ,  H10K71/00 ,  H10K71/16

    CPC classification number: C23C14/042 ,  B05C21/005 ,  H10K71/00 ,  H10K71/166

    Abstract: A mask assembly includes a mask frame in which a first opening is defined, the mask frame including a front surface through which the first opening extends, and a deposition mask which is attached to the front surface of the mask frame and through which a plurality of second openings is defined. The mask frame includes an in which the front surface extends along a direction of gravity, the deposition mask includes an initial mask which is attached to the front surface of the mask frame in the thereof and through which the plurality of second openings is defined, and the of the mask frame having the front surface which extends along the direction of gravity disposes the first opening of the mask frame corresponding to all of the plurality of second openings of the initial mask along the direction of gravity.

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