公开(公告)号：US20090066031A1

公开(公告)日：2009-03-12

申请号：US12283183

申请日：2008-11-10

Applicant: Richard F. McRay ,  Nicholas R. White

Inventor： Richard F. McRay ,  Nicholas R. White

IPC: F16J15/32

CPC classification number: H01J37/3171 ,  H01J37/20 ,  H01J2237/2006 ,  H01J2237/20228 ,  Y10S277/911 ,  Y10S277/913

Abstract: The present invention is a compound sliding seal unit of markedly reduced size and height dimensions which is employed as a discrete assembly for both the passage across and the at-will height adjustment of a mounted, rotatable shaft which extends from the atmospheric environment portion into the vacuum environmental portion of an ion implanter apparatus. The extended, rotatable shaft is typically fashioned as either a rotatable hollow tube or conduit (suitable for the passage of electrical components) and/or as a rotatable support suitable for the mounting of a pivotal scanning radial arm translation system.The manner of construction and the substantially reduced height dimensions of the compound sliding seal unit permits on-demand changes of height for the mounted, rotatable shaft which extends from the atmospheric environment and extends through the compound unit into the confined and limited spatial volume of a vacuum environment within a conventional ion implantation apparatus. The compound unit also allows the user to maintain a high vacuum within the vacuum environment despite the fact that the height of the feed-through member can be raised and lowered repeatedly at will. Its compact size frees space which can be used to extend the vacuum chamber for purposes such as a deep Faraday cup for beam measurement.

Abstract translation: 本发明是一种具有明显减小的尺寸和高度尺寸的复合滑动密封单元，其被用作用于从大气环境部分延伸到安装的可旋转轴的通过横跨和即将高度调节的离散组件， 离子注入机装置的真空环境部分。 延伸的可旋转轴通常被形成为可旋转的中空管或导管（适于电气部件的通过）和/或作为适于安装枢转扫描径向臂翻转系统的可旋转支撑件。 复合滑动密封单元的构造方式和大体上减小的高度尺寸允许从大气环境延伸并延伸穿过复合单元的安装的可旋转轴的高度的按需改变变为有限的空间体积 常规离子注入装置内的真空环境。 复合单元还允许用户在真空环境内保持高真空，尽管馈送构件的高度可以随意重复升高和降低。 其紧凑的尺寸释放了可用于延伸真空室的空间，用于例如用于光束测量的深法拉第杯。

公开(公告)号：US07078713B2

公开(公告)日：2006-07-18

申请号：US10807770

申请日：2004-03-24

Applicant: Nicholas R. White

Inventor： Nicholas R. White

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/141 ,  H01J37/1471 ,  H01J37/1472 ,  H01J37/3172 ,  H01J2237/1504 ,  H01J2237/152 ,  H01J2237/30433 ,  H01J2237/31703

Abstract: An electromagnetic regulator assembly for the production of contiguous magnetic fields which are applied to a continuous ion beam is described. The assembly is structured for controlling the uniformity of traveling continuous ribbon-shaped beams; and allows for direct adjustment of the magnetic field gradient of the magnetic field as the parameter for increasing the current uniformity.

Abstract translation: 描述了用于产生施加到连续离子束的连续磁场的电磁调节器组件。 该组件被构造成用于控制行进的连续带状梁的均匀性; 并且允许直接调节磁场的磁场梯度作为增加电流均匀性的参数。

公开(公告)号：US06521895B1

公开(公告)日：2003-02-18

申请号：US09425123

申请日：1999-10-22

Applicant: Steven R. Walther ,  Nicholas R. White

Inventor： Steven R. Walther ,  Nicholas R. White

IPC: G21K108

CPC classification number: H01J37/1474 ,  G21K1/087 ,  H01J37/15 ,  H01J37/3171 ,  H01J2237/30483

Abstract: Methods and apparatus are provided for scanning a charged particle beam. The apparatus includes scan elements and a scan signal generator for generating scan signals for scanning the charged particle beam in a scan pattern having a scan origin. In one embodiment, the apparatus includes a position controller for positioning the scan elements based on a parameter of the charged particle beam, such as energy. The scan elements may be positioned to achieve a fixed position of the scan origin for different beam energies. In another embodiment, the apparatus includes first and second sets of scan elements and a scan signal controller for controlling the scan signals supplied to the sets of scan elements based on a parameter of the charged particle beam, such as energy. The scan signal controller may control the ratio of the scan signals applied to the sets of scan elements, or may deenergize a set of scan elements, to minimize space charge forces on the charged particle beam that may reduce beam transmission through the apparatus.

Abstract translation: 提供了用于扫描带电粒子束的方法和装置。 该装置包括扫描元件和扫描信号发生器，用于产生用于以具有扫描原点的扫描图案扫描带电粒子束的扫描信号。 在一个实施例中，该装置包括位置控制器，用于基于带电粒子束（例如能量）的参数定位扫描元件。 扫描元件可以被定位成实现用于不同光束能量的扫描原点的固定位置。 在另一个实施例中，该装置包括第一组扫描元件和第二组扫描元件以及扫描信号控制器，用于基于诸如能量的带电粒子束的参数来控制提供给扫描元件组的扫描信号。 扫描信号控制器可以控制施加到该组扫描元件的扫描信号的比率，或者可以去除一组扫描元件，以最小化带电粒子束上的空间电荷力，以减少通过该装置的波束传输。

公开(公告)号：US5350926A

公开(公告)日：1994-09-27

申请号：US29766

申请日：1993-03-11

Applicant: Nicholas R. White ,  Manny Sieradzki ,  Anthony Renau

Inventor： Nicholas R. White ,  Manny Sieradzki ,  Anthony Renau

IPC: H01J37/05 ,  H01J37/317 ,  H01L21/265

CPC classification number: H01J37/05 ,  H01J37/3171

Abstract: A compact high current broad beam ion implanter capable of serial processing employs a high current density source, an analyzing magnet to direct a desired species through a resolving slit, and a second magnet to deflect the resultant beam while rendering it parallel and uniform along its width dimension. Both magnets have relatively large pole gaps, wide input and output faces, and deflect through a small radius of curvature to produce a beam free of instabilities. Multipole elements incorporated within at least one magnet allow higher order aberrations to be selectively varied to locally adjust beam current density and achieve the high degree of uniformity along the beam width dimension.

Abstract translation: 能够进行串联处理的紧凑型高电流宽光束离子注入机采用高电流密度源，分析磁铁通过分辨狭缝引导所需物质，以及第二磁体使得所得到的光束偏转，同时使其沿其宽度平行和均匀 尺寸。 两个磁体具有相对较大的极间隙，宽的输入和输出面，并且通过小的曲率半径偏转以产生没有不稳定性的光束。 结合在至少一个磁体中的多极元件允许选择性地改变高阶像差，以局部地调整束电流密度并且沿着光束宽度尺寸实现高度均匀性。