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21.发明申请公开(公告)号：US20170142817A1
公开(公告)日：2017-05-18
申请号：US15265515
申请日：2016-09-14
Applicant: KLA-Tencor Corporation
Inventor： Alexey Kuritsyn , Brian Ahr , Rudy F. Garcia , Frank Chilese , Oleg Khodykin
IPC: H05G2/00
CPC classification number: H05G2/008
Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.
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公开(公告)号：US20170131129A1
公开(公告)日：2017-05-11
申请号：US15261639
申请日：2016-09-09
Applicant: KLA-Tencor Corporation
Inventor： Brian Ahr , Alexander Bykanov , Rudy F. Garcia , Layton Hale , Oleg Khodykin
CPC classification number: H05G2/008 , H05G2/006 , H05H2240/00
Abstract: The present disclosure is directed to a device having a nozzle for dispensing a liquid target material; one or more intermediary chamber(s), each intermediary chamber positioned to receive target material and formed with an exit aperture to output target material for downstream irradiation in a laser produced plasma (LPP) chamber. In some disclosed embodiments, control systems are included for controlling one or more of gas temperature, gas pressure and gas composition in one, some or all of a device's intermediary chamber(s). In one embodiment, an intermediary chamber having an adjustable length is disclosed.
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公开(公告)号：US20140376842A1
公开(公告)日：2014-12-25
申请号：US14310632
申请日：2014-06-20
Applicant: KLA-Tencor Corporation
Inventor： Francis C. Chilese , Rudy F. Garcia
IPC: F16C32/06
CPC classification number: F16C32/0614 , F16C32/0685 , F16C33/748 , F16C2380/18
Abstract: A gas bearing assembly including: a stator, a spindle rotatable about an axis, a first space between the spindle and the stator and arranged to receive a bearing gas at a first pressure, to support rotation of the spindle about the axis, a first annulus, in the stator or the spindle and arranged to vent the bearing gas from a first portion of the first space, a second annulus, in the stator or the spindle, and arranged to transport a barrier gas, at a second pressure, into a second portion of the first space, and a third annulus, in the stator or the spindle, the third annulus disposed between the first and second annuli and arranged to transport the bearing gas and the barrier gas out of a third portion of the space to a create, in the third portion, a third pressure less than the first and second pressures.
Abstract translation: 一种气体轴承组件，包括：定子，可围绕轴线旋转的主轴，所述心轴和所述定子之间的第一空间，并且布置成在第一压力下接收轴承气体，以支撑所述心轴围绕所述轴的旋转;第一环 在定子或主轴中，并布置成从第一空间的第一部分，在定子或主轴中的第二环形空气排出轴承气体，并且布置成在第二压力下将阻挡气体输送到第二压力 所述第一空间的一部分和所述定子或所述心轴中的第三环形空间，所述第三环形空间设置在所述第一和第二环之间，并且被布置成将所述轴承气体和所述阻挡气体从所述空间的第三部分输送到所述空间 在第三部分中，具有小于第一和第二压力的第三压力。
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公开(公告)号：US10804069B2
公开(公告)日：2020-10-13
申请号：US16704061
申请日：2019-12-05
Applicant: KLA-TENCOR CORPORATION
Inventor： Katerina Ioakeimidi , Gildardo R. Delgado , Michael E. Romero , Frances Hill , Rudy F. Garcia
IPC: H01J37/073 , H01J37/26 , G02B27/09 , H01J40/06 , H01J40/18 , H01J1/304 , H01J19/24 , H01J37/06 , H01J37/28 , H01J1/34 , H01L21/67
Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
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Patent Agency Ranking
公开(公告)号：US10748737B2
公开(公告)日：2020-08-18
申请号：US16149260
申请日：2018-10-02
Applicant: KLA-TENCOR CORPORATION
Inventor： Katerina Ioakeimidi , Gildardo R. Delgado , Frances Hill , Michael E. Romero , Rudy F. Garcia
IPC: H01J37/073 , H01J37/26 , G02B27/09 , H01J40/06 , H01J40/18 , H01J1/304 , H01J19/24 , H01J37/06 , H01J37/28 , H01J1/34 , H01L21/67
Abstract: A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
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公开(公告)号：US10714295B2
公开(公告)日：2020-07-14
申请号：US16259317
申请日：2019-01-28
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Katerina Ioakeimidi , Frances Hill , Gary V. Lopez Lopez , Rudy F. Garcia
Abstract: A photocathode structure, which can include one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal, has a protective film on an exterior surface. The protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof. The protective film can have a thickness from 1 nm to 10 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
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公开(公告)号：US10395884B2
公开(公告)日：2019-08-27
申请号：US16150675
申请日：2018-10-03
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Rudy F. Garcia , Katerina Ioakeimidi , Frances Hill , Michael E. Romero
Abstract: A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
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公开(公告)号：US20190108964A1
公开(公告)日：2019-04-11
申请号：US16150399
申请日：2018-10-03
Applicant: KLA-TENCOR CORPORATION
Inventor： Katerina Ioakeimidi , Gildardo R. Delgado , Michael E. Romero , Frances Hill , Rudy F. Garcia
Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
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29.发明授权公开(公告)号：US10021773B2
公开(公告)日：2018-07-10
申请号：US15265515
申请日：2016-09-14
Applicant: KLA-Tencor Corporation
Inventor： Alexey Kuritsyn , Brian Ahr , Rudy F. Garcia , Frank Chilese , Oleg Khodykin
IPC: H05G2/00
CPC classification number: H05G2/008
Abstract: The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.
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