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公开(公告)号：US20120267899A1
公开(公告)日：2012-10-25
申请号：US13089500
申请日：2011-04-19
Applicant: James D. Huffman , Gary A. Kneezel
Inventor： James D. Huffman , Gary A. Kneezel
IPC: H02K57/00
CPC classification number: H02N2/186 , H01L41/1138
Abstract: A method of harvesting energy from the environment includes providing an energy harvesting device. The energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The energy harvesting device is configured so that the compliant membrane is set into oscillation by excitations produced external to the energy harvesting device. The MEMS transducing member is caused to move into and out of the cavity by the oscillating compliant membrane. The motion of the MEMS transducing member is converted into an electrical signal.
Abstract translation: 从环境中收集能量的方法包括提供能量收集装置。 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上，第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 能量收集装置被配置为使得顺应性膜通过能量收集装置外部产生的激发而被设置成振荡。 通过振荡柔性膜使MEMS转换元件进入和流出空腔。 MEMS转换构件的运动被转换为电信号。
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公开(公告)号：US20120266675A1
公开(公告)日：2012-10-25
申请号：US13089524
申请日：2011-04-19
Applicant: James D. Huffman , Gary A. Kneezel
Inventor： James D. Huffman , Gary A. Kneezel
IPC: G01N29/04
CPC classification number: G01N29/2437 , B06B1/0622 , G01N29/04 , G10K9/122 , G10K13/00
Abstract: Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.
Abstract translation: 操作超声波发射器和接收器包括提供MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。 电脉冲被发送到第一MEMS转换构件，这导致第一MEMS换能构件和柔性膜振动。 第一MEMS转换构件和柔性膜的振动被传送到物体。 从对象接收回波信号。 所接收的回波信号由第二MEMS转换构件转换成电信号。
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23.发明授权DMD pixel with small-rotated-moved via2 to reduce beam-electrode shorts 有权DMD像素具有小旋转移动的通孔2，以减少光束电极短路公开(公告)号：US06897991B2
公开(公告)日：2005-05-24
申请号：US10357179
申请日：2003-02-03
Applicant: James D. Huffman , Brian K. Dodge , Mark K. Fletcher
Inventor： James D. Huffman , Brian K. Dodge , Mark K. Fletcher
CPC classification number: G02B26/0841 , H04N5/7441 , H04N9/3102 , Y10S359/904
Abstract: A digital micromirror device with an optimized beam dimple formed over the via2 to provide process margin by increasing the clearance between the beam and the address electrode, thus reducing shorting between the two. This approach assures that when the beam tilts, it will land on its tips prior to making contact between the beam and address electrode, which are at different potentials. Beam dimple optimization is controlled by the characteristics of the via2 located on the lower metal-3 layer of the device.
Abstract translation: 一种数字微镜器件，其具有形成在通孔2上的优化的光束凹坑，以通过增加光束和寻址电极之间的间隙来提供工艺余量，从而减少两者之间的短路。 这种方法确保当光束倾斜时，它将在与不同电位的光束和地址电极之间的接触之前落在其尖端上。 光束凹坑优化由位于设备的下金属层3上的通孔2的特性控制。
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公开(公告)号：US06724518B2
公开(公告)日：2004-04-20
申请号：US10331495
申请日：2002-12-30
Applicant: Thomas J. Meyer , Brett A. Mangrum , Mark F. Reed , James D. Huffman , Michael A. Mignardi , Wei-Yan Shih
Inventor： Thomas J. Meyer , Brett A. Mangrum , Mark F. Reed , James D. Huffman , Michael A. Mignardi , Wei-Yan Shih
IPC: G02B2600
Abstract: A system and method of providing a micromirror pixel 400 that is highly resistant to bright failure states. The micromirror 400 uses an asymmetric yoke 402 to ensure the mirror is only attracted to the address electrode in one rotation direction. The landing mechanism on the other side of the torsion binge axis also is altered to allow the pixel to over rotate in the “off” direction. The over rotation ensures that light reflected by the mirror when in the off direction will miss the projection lens pupil, allowing the corresponding pixel to remain dark in both an operational and failed state.
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25.发明授权公开(公告)号：US06522454B2
公开(公告)日：2003-02-18
申请号：US09967043
申请日：2001-09-28
Applicant: Robert E. Meier , James D. Huffman
Inventor： Robert E. Meier , James D. Huffman
IPC: G02B2600
CPC classification number: G02B26/0841
Abstract: An improved DMD type spatial light modulator having an array of pixels (18). The pixels (18) are of the “hidden hinge” design, each pixel having a mirror (30) supported over a hinged yoke (32). Addressing electrodes (26, 28) on an underlying metallization layer and addressing electrodes (50, 52) at the yoke level provide electrostatic forces that cause the mirrors to tilt and then to return to their flat state. The pixels (18) are designed to provide increased clearance between the leading edge of the yoke (32) and the underlying metallization layer when the mirrors (30) are tilted. Various features of the improved pixel (18) also improve the contrast ratio of images generated by the DMD.
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Patent Agency Ranking
公开(公告)号：US08680695B2
公开(公告)日：2014-03-25
申请号：US13089500
申请日：2011-04-19
Applicant: James D. Huffman , Gary A. Kneezel
Inventor： James D. Huffman , Gary A. Kneezel
CPC classification number: H02N2/186 , H01L41/1138
Abstract: A method of harvesting energy from the environment includes providing an energy harvesting device. The energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The energy harvesting device is configured so that the compliant membrane is set into oscillation by excitations produced external to the energy harvesting device. The MEMS transducing member is caused to move into and out of the cavity by the oscillating compliant membrane. The motion of the MEMS transducing member is converted into an electrical signal.
Abstract translation: 从环境中收集能量的方法包括提供能量收集装置。 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上，第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 能量收集装置被配置为使得顺应性膜通过能量收集装置外部产生的激发而被设置成振荡。 通过振荡柔性膜使MEMS转换元件进入和流出空腔。 MEMS转换构件的运动被转换为电信号。
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公开(公告)号：US08602531B2
公开(公告)日：2013-12-10
申请号：US13089563
申请日：2011-04-19
Applicant: Carolyn R. Ellinger , James A. Katerberg , James D. Huffman
Inventor： Carolyn R. Ellinger , James A. Katerberg , James D. Huffman
CPC classification number: B41J2/14427 , B41J2002/14403 , B41J2002/14435
Abstract: A liquid dispenser includes a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. A liquid supply provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member anchored to the substrate. A compliant membrane is positioned in contact with the MEMS transducing member.
Abstract translation: 液体分配器包括基底。 衬底的第一部分限定了包括出口开口的液体分配通道。 衬底的第二部分限定空腔的外边界。 衬底的其他部分限定了液体供应通道和液体返回通道。 液体供应提供液体从液体供应通过液体供应通道通过液体分配通道通过液体返回通道并返回到液体供应源的连续流动。 分流器构件可选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口开口转向。 分流器构件包括锚定到基板的MEMS换能构件。 柔性膜定位成与MEMS换能件接触。
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公开(公告)号：US08506039B2
公开(公告)日：2013-08-13
申请号：US13089610
申请日：2011-04-19
Applicant: James A. Katerberg , James D. Huffman
Inventor： James A. Katerberg , James D. Huffman
IPC: B41J2/015
CPC classification number: B41J2/14 , B41J2002/14346 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
Abstract: A liquid dispenser includes a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A liquid supply provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member, positioned on a wall of the liquid dispensing channel that includes the outlet opening, is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member anchored to the wall of the liquid dispensing channel. A compliant membrane is positioned in contact with the MEMS transducing member.
Abstract translation: 液体分配器包括基底。 衬底的第一部分限定了包括出口开口的液体分配通道。 衬底的第二部分限定了液体供应通道和液体返回通道。 液体供应提供液体从液体供应通过液体供应通道通过液体分配通道通过液体返回通道并返回到液体供应源的连续流动。 定位在包括出口开口的液体分配通道的壁上的分流器构件可选择性地致动，以使流过液体分配通道的液体的一部分通过液体分配通道的出口打开。 分流器构件包括锚定在液体分配通道的壁上的MEMS换能构件。 柔性膜定位成与MEMS换能件接触。
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公开(公告)号：US20130004898A1
公开(公告)日：2013-01-03
申请号：US13170734
申请日：2011-06-28
Applicant: Yongcai Wang , Weibin Zhang , John A. Lebens , James D. Huffman , Robert E. McCovick
Inventor： Yongcai Wang , Weibin Zhang , John A. Lebens , James D. Huffman , Robert E. McCovick
CPC classification number: B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1632 , B41J2/1645 , B41J2002/14467 , B41J2202/03 , B81B2201/058 , B81C1/0038 , G03F7/038 , G03F7/0751 , G03F7/11
Abstract: A method for making a microfluidic device, the method includes providing at least one inorganic layer on a substrate; applying an alkoxysilane material containing a primary or secondary amine on the at least one inorganic layer; baking the applied alkoxysilane material at a temperature greater than 130 degrees C.; applying an epoxy material to form an epoxy layer, wherein the applied alkoxysilane material is disposed at an interface between the epoxy layer and the at least one inorganic layer; and patterning the epoxy layer to provide a wall for defining a location for a fluid in the microfluidic device.
Abstract translation: 一种制造微流体装置的方法，所述方法包括在基底上提供至少一个无机层; 在至少一个无机层上涂覆含有伯胺或仲胺的烷氧基硅烷材料; 在高于130℃的温度下烘烤涂覆的烷氧基硅烷材料; 施加环氧树脂材料以形成环氧树脂层，其中施加的烷氧基硅烷材料设置在环氧树脂层和至少一个无机层之间的界面处; 并且图案化环氧树脂层以提供用于限定微流体装置中的流体的位置的壁。
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公开(公告)号：US20130002753A1
公开(公告)日：2013-01-03
申请号：US13170693
申请日：2011-06-28
Applicant: Yongcai Wang , Weibin Zhang , John A. Lebens , James D. Huffman , Robert E. McCovick
Inventor： Yongcai Wang , Weibin Zhang , John A. Lebens , James D. Huffman , Robert E. McCovick
IPC: B41J2/015
CPC classification number: B41J2/1631 , B41J2/1603 , B41J2/162 , B41J2/1623 , B41J2/1645
Abstract: A microfluidic device includes a substrate; at least one inorganic layer provided on the substrate; a patterned epoxy layer formed over the at least one inorganic layer, the patterned epoxy layer including a wall that defines a location for a fluid in the microfluidic device; and an alkoxysilane material containing a primary or secondary amine for promoting adhesion between the at least one inorganic layer and the patterned epoxy layer.
Abstract translation: 微流体装置包括：基底; 设置在基板上的至少一个无机层; 形成在所述至少一个无机层上的图案化环氧树脂层，所述图案化环氧树脂层包括限定所述微流体装置中的流体位置的壁; 和含有伯胺或仲胺的烷氧基硅烷材料，用于促进至少一个无机层和图案化的环氧树脂层之间的粘附。
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