公开(公告)号：US11335534B2

公开(公告)日：2022-05-17

申请号：US17027341

申请日：2020-09-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Takuma Aso ,  Xin Man ,  Makoto Sato ,  Tatsuya Asahata

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J37/30 ,  H01J37/26

Abstract: The particle beam irradiation apparatus includes: an irradiation unit configured to radiate a particle beam; a first detection unit configured to detect first particles; a second detection unit configured to detect second particles; an image forming unit configured to form an observation image based on a first signal obtained by the detection of the first particles, which is performed by the first detection unit, and to form an observation image based on a second signal obtained by the detection of the second particles, which is performed by the second detection unit; and a control unit configured to calculate a brightness of a first region in the formed first observation image and perform a brightness adjustment of the first detection unit based on a first target brightness as a first brightness adjustment when the brightness of the first region is different from the first target brightness.

公开(公告)号：US10832890B2

公开(公告)日：2020-11-10

申请号：US16364898

申请日：2019-03-26

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masato Suzuki ,  Satoshi Tomimatsu ,  Makoto Sato ,  Tatsuya Asahata

IPC: H01J37/305 ,  H01J37/20

Abstract: To automatically repeat an operation of isolating a sample piece, which is formed by processing a sample with an ion beam, and transferring the sample piece to a sample piece holder, a charged particle beam device includes a computer configured to perform control so that, without rotating a needle with which the sample piece is fixed to the sample piece holder, a deposition film deposited on the needle is irradiated with a charged particle beam from a charged particle beam irradiation optical system.

公开(公告)号：US10677697B2

公开(公告)日：2020-06-09

申请号：US16139545

申请日：2018-09-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

IPC: H01J27/10 ,  H01J37/18 ,  G01N1/32 ,  G01N1/44 ,  G01N1/28 ,  H01J37/31 ,  H01J37/317

Abstract: According to one embodiment, an automatic sample preparation apparatus includes: a charged particle beam irradiation optical system configured to perform irradiation with a charged particle beam; a sample stage configured to move with the sample placed thereon; a sample piece transfer device for holding and transferring the sample piece separated and extracted from the sample; a sample piece holder-fixing bed configured to hold a sample piece holder to which the sample piece is transferred; a gas supply portion configured to irradiate gas forming a deposition film with the charged particle beam; and a computer configured to control the charged particle beam irradiation optical system, the sample piece transfer device, and the gas supply portion to transfer and stop the sample piece held by the sample piece transfer device with a gap between the sample piece holder and the sample piece, and connect the sample piece to the sample piece holder.

公开(公告)号：US20190025167A1

公开(公告)日：2019-01-24

申请号：US16139545

申请日：2018-09-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

IPC: G01N1/44 ,  G01N1/28 ,  H01J37/31 ,  H01J37/317

Abstract: According to one embodiment, an automatic sample preparation apparatus includes: a charged particle beam irradiation optical system configured to perform irradiation with a charged particle beam; a sample stage configured to move with the sample placed thereon; a sample piece transfer device for holding and transferring the sample piece separated and extracted from the sample; a sample piece holder-fixing bed configured to hold a sample piece holder to which the sample piece is transferred; a gas supply portion configured to irradiate gas forming a deposition film with the charged particle beam; and a computer configured to control the charged particle beam irradiation optical system, the sample piece transfer device, and the gas supply portion to transfer and stop the sample piece held by the sample piece transfer device with a gap between the sample piece holder and the sample piece, and connect the sample piece to the sample piece holder.