TOTAL INTERNAL REFLECTION LIGHT ILLUMINATION DEVICE
    22.
    发明申请
    TOTAL INTERNAL REFLECTION LIGHT ILLUMINATION DEVICE 有权
    总内部反射光照明装置

    公开(公告)号:US20160266368A1

    公开(公告)日:2016-09-15

    申请号:US15030413

    申请日:2014-10-20

    Abstract: A total internal reflection light illumination apparatus includes a light source providing illumination light L1, a spatial light modulator inputting the illumination light L1 and converging and outputting the illumination light L1 by presenting a lens pattern, an objective lens illuminating an object substrate with illumination light L2 converged and output by the spatial light modulator, and a calculation unit providing, to the spatial light modulator, the lens pattern corresponding to at least one of a desired polarization state, desired penetration length, desired shape, and desired light intensity of the evanescent light L3. The lens pattern converges the illumination light L2 on a pupil plane of the objective lens.

    Abstract translation: 全内反射光照明装置包括提供照明光L1的光源,输入照明光L1并通过呈现透镜图案会聚并输出照明光L1的空间光调制器,用照明光L2照射对象基板的物镜 由空间光调制器收敛和输出;以及计算单元,向空间光调制器提供对应于期望的偏振状态,期望的穿透长度,期望的形状和ev逝光的期望的光强度中的至少一个的透镜图案 L3。 透镜图案将照明光L2会聚在物镜的光瞳平面上。

    LIGHT-EMITTING SEALED BODY
    23.
    发明申请
    LIGHT-EMITTING SEALED BODY 有权
    发光密封体

    公开(公告)号:US20160240365A1

    公开(公告)日:2016-08-18

    申请号:US15025928

    申请日:2014-10-29

    CPC classification number: H01J61/0737 H01J1/94 H01J61/0732 H01J61/16 H01J65/04

    Abstract: In a light-emitting sealed body, a metal structure (electron emission structure) containing an easily electron-emitting material is used, so that it is not necessary to perform feeding for discharge between electrodes. Therefore, a feeding member does not need to be connected to the metal structure from the outside of a bulb. In addition, in the light-emitting sealed body, the metal structure is disposed in an internal space S of the bulb and a positioning unit of the metal structure is disposed only in the bulb. Therefore, in the light-emitting sealed body, the metal structure and the positioning unit do not penetrate the bulb and are not buried in the bulb and weakened portions are not formed in the bulb made of glass. Therefore, a sealing state of the bulb can be maintained surely.

    Abstract translation: 在发光密封体中,使用容纳电子发射材料的金属结构(电子发射结构),从而不需要在电极之间进行放电。 因此,馈电构件不需要从灯泡的外部连接到金属结构。 此外,在发光密封体中,金属结构设置在灯泡的内部空间S中,并且金属结构的定位单元仅设置在灯泡中。 因此,在发光密封体中,金属结构体和定位单元不会穿透灯泡,并且不会埋入灯泡,并且在玻璃制的灯泡中不形成弱化部。 因此,能够可靠地保持灯泡的密封状态。

    PHASE MODULATING APPARATUS AND PHASE MODULATING METHOD
    24.
    发明申请
    PHASE MODULATING APPARATUS AND PHASE MODULATING METHOD 审中-公开
    相位调制装置和相位调制方法

    公开(公告)号:US20140036182A1

    公开(公告)日:2014-02-06

    申请号:US14045513

    申请日:2013-10-03

    Abstract: The present invention relates to a phase modulating apparatus capable of highly accurately and easily correcting the phase modulation characteristic of a reflective electric address spatial light modulator even when a condition of input light is changed. In the LCOS phase modulating apparatus, an input unit inputs the condition of the input light, and a processing unit sets an input value for each pixel. A correction value deriving unit determines a correction condition according to the condition of the input light. A control input value converting unit converts the input value set for each pixel into a corrected input value based on the correction condition. An LUT processing unit converts the corrected input value into a voltage value, and drives each pixel by using a drive voltage equivalent to the converted voltage value.

    Abstract translation: 本发明涉及即使当输入光的条件改变时也能高精度地且容易地校正反射式电地址空间光调制器的相位调制特性的相位调制装置。 在LCOS相位调制装置中,输入单元输入输入光的条件,并且处理单元设置每个像素的输入值。 校正值导出单元根据输入光的条件来确定校正条件。 控制输入​​值转换单元基于校正条件将针对每个像素设置的输入值转换为校正输入值。 LUT处理单元将校正的输入值转换为电压值,并且通过使用与转换的电压值相当的驱动电压驱动每个像素。

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