公开(公告)号：US20050190430A1

公开(公告)日：2005-09-01

申请号：US11067562

申请日：2005-02-25

申请人： Sataydev Patel ,  Andrew Huibers

发明人： Sataydev Patel ,  Andrew Huibers

IPC分类号： G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

CPC分类号： G02B26/0841

摘要： A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

摘要翻译： 公开了一种微反射镜装置，以及制造这种微镜装置的方法，其包括镜板，铰链和延伸板。 延伸板形成在镜板上，并且在镜板和与用于旋转镜板的镜板相关联的电极之间。 延伸板可以是金属或电介质。 还公开了制造这种微镜装置的方法。 特别地，在形成镜板之后形成延伸板。 此外，还公开了一种投影系统，其包括具有这种微镜阵列的空间光调制器以及光源聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射光的投影光学器件 从微镜阵列选择性地反射到目标上，以及用于选择性地致动阵列中的微镜的控制器。

公开(公告)号：US20050170614A1

公开(公告)日：2005-08-04

申请号：US11093927

申请日：2005-03-29

申请人： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

发明人： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/00 ,  H01L21/44

CPC分类号： B81C1/00214 ,  B81B7/0077 ,  B81B2201/042 ,  B81C1/00333 ,  B81C1/00896 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  H01L24/97 ,  H01L2224/48091 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01058 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2224/85 ,  H01L2924/00

摘要： A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

公开(公告)号：US20050157375A1

公开(公告)日：2005-07-21

申请号：US11056752

申请日：2005-02-11

申请人： Jonathan Doan ,  Andrew Huibers ,  Satyadev Patel ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

发明人： Jonathan Doan ,  Andrew Huibers ,  Satyadev Patel ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

IPC分类号： G02B26/00

CPC分类号： B82Y30/00

摘要： Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

摘要翻译： 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。

公开(公告)号：US20050054135A1

公开(公告)日：2005-03-10

申请号：US10969380

申请日：2004-10-19

申请人： Satyadev Patel ,  Jonathan Doan ,  Andrew Huibers

发明人： Satyadev Patel ,  Jonathan Doan ,  Andrew Huibers

IPC分类号： B81B7/00 ,  B81C20060101 ,  B81C1/00 ,  H01L21/00 ,  H01L21/76

CPC分类号： B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

摘要： A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

摘要翻译： 本文公开了一种用于处理微机电装置的方法。 该方法通过在连续的牺牲层和结构层之间提供选定的阻挡层来防止牺牲层与微机电器件的结构层之间的扩散和相互作用。

公开(公告)号：US20050024733A1

公开(公告)日：2005-02-03

申请号：US10899635

申请日：2004-07-26

申请人： Peter Richards ,  Andrew Huibers ,  Michel Combes

发明人： Peter Richards ,  Andrew Huibers ,  Michel Combes

IPC分类号： G02B7/00 ,  G02B27/10 ,  G02B27/14

CPC分类号： G02B26/008 ,  G01J3/10 ,  G01J2003/1213

摘要： A method and apparatus for compensating for deficiency in the illumination light from a light source is provided, where the spectrum in the visible range of light from the light source is determined, and a deficiency at a wavelength or band of wavelengths in the visible range of light is determined therefrom, a color sequencing device is provided having a set of filters comprising red, green and blue filter segments, and an additional color balancing filter segment, and wherein a the color balancing segment is constructed so as to preferentially pass a band or bands of wavelengths, which band or bands are determined based on the determined deficiency of the light source.

摘要翻译： 提供了用于补偿来自光源的照明光的不足的方法和装置，其中确定了来自光源的光的可见光范围内的光谱，以及在可见光范围内的波长或波段的不足 由此确定光，提供了具有一组包括红色，绿色和蓝色滤色片段的滤光片和附加色彩平衡滤光片片段的色彩排序装置，其中色彩平衡片段被构造成优先通过一条带或 基于所确定的光源的不足，确定该波段的波段或波段。

公开(公告)号：US20050007557A1

公开(公告)日：2005-01-13

申请号：US10914038

申请日：2004-08-05

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： B81B3/00 ,  G02B26/08 ,  G03B21/28 ,  G03B21/00 ,  G02B26/00

CPC分类号： G03B21/28 ,  G02B26/0841 ,  Y10S359/904

摘要： In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

摘要翻译： 为了最小化沿着切换方向的光衍射，并且更特别地，将光衍射最小化到收集光学器件的接收锥体中，在本发明中，提供了不是矩形的微镜。 此外，为了最小化本发明的照明光学器件的成本和显示单元的尺寸，将光源与阵列的行（或列）正交放置，和/或将光源正交 到帧的定义阵列的有效区域的一侧。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，并且即使微镜处于“关闭”状态，也导致光“泄漏”进入“打开”状态。 该光衍射降低了微镜的对比度。 本发明的微反射镜导致对比度提高，并且在本发明中光源到微镜阵列的布置导致更紧凑的系统。 本发明的另一个特征是微镜能够相对于打开和关闭位置（将光引导到收集光学器件）的相对方向枢转，其中到打开位置的移动大于移动到关闭位置。 本发明的另一个特征是用于微镜阵列的封装，该封装具有不与形成微反射镜的基板平行的窗口。 本发明的一个实例包括所有上述特征。

公开(公告)号：US06356378B1

公开(公告)日：2002-03-12

申请号：US09624591

申请日：2000-07-24

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： G02B2608

CPC分类号： G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

摘要： A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

摘要翻译： 空间光调制器包括保持在包含寻址电路的下基板上的上透光基板。 一个或多个静电可偏转元件通过铰链从上基板悬挂。 在操作中，单独的反射镜被选择性地偏转并且用于空间调制入射到上基板上并随后被上反射回的光。 运动止挡件可以附接到反射偏转元件，使得反射镜不卡扣到底部基板。 相反，运动停止件靠在上基板上，从而限制反射可偏转元件的偏转角。

公开(公告)号：US6046840A

公开(公告)日：2000-04-04

申请号：US160361

申请日：1998-09-24

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： G02B26/08

CPC分类号： G02B26/0833 ,  G02B26/0841 ,  Y10S359/904

摘要： A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

公开(公告)号：US20100079581A1

公开(公告)日：2010-04-01

申请号：US12241040

申请日：2008-09-30

申请人： Andrew Ian Russell ,  David Foster Lieb ,  Andrew Huibers

发明人： Andrew Ian Russell ,  David Foster Lieb ,  Andrew Huibers

IPC分类号： H04N13/02

CPC分类号： H04N13/254

摘要： An imaging device capable of capturing depth information or surface profiles of objects is disclosed herein. The imaging device uses an enclosed flashing unit to project a sequence of structured light patterns onto an object and captures the light patterns reflected from the surfaces of the object by using an image sensor that is enclosed in the imaging device. The imaging device is capable of capturing an image of an object such that the captured image is comprised of one or more color components of a two-dimensional image of the object and a depth component that specifies the depth information of the object.

摘要翻译： 本文公开了能够捕获物体的深度信息或表面轮廓的成像装置。 成像装置使用封闭的闪光单元将一系列结构化光图案投射到物体上，并通过使用封闭在成像装置中的图像传感器捕获从物体表面反射的光图案。 成像装置能够捕获对象的图像，使得所拍摄的图像由对象的二维图像的一个或多个颜色分量和指定对象的深度信息的深度分量组成。

公开(公告)号：US07459333B2

公开(公告)日：2008-12-02

申请号：US11332018

申请日：2006-01-12

申请人： Peter Richards ,  Andrew Huibers ,  Satyadev Patel

发明人： Peter Richards ,  Andrew Huibers ,  Satyadev Patel

IPC分类号： G09G3/34

CPC分类号： B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

摘要： A projection system is disclosed herein. The projection system employs a spatial light modulator comprising an array of individually addressable pixels for modulating the incident light based on image data. The modulated light is projected on a screen for viewing.

摘要翻译： 本文公开了一种投影系统。 投影系统采用包括可单独寻址的像素阵列的空间光调制器，用于基于图像数据调制入射光。 调制光投影在屏幕上以供观看。