APPARATUS AND METHOD FOR CONTACTLESS THICKNESS MEASUREMENT
    22.
    发明申请
    APPARATUS AND METHOD FOR CONTACTLESS THICKNESS MEASUREMENT 有权
    用于连续厚度测量的装置和方法

    公开(公告)号:US20140061475A1

    公开(公告)日:2014-03-06

    申请号:US13802198

    申请日:2013-03-13

    CPC classification number: G01B11/06

    Abstract: A contactless thickness measuring apparatus is provided which includes an terahertz transmitter configured to receive the first optical path signal from the coupler and to generate a terahertz continuous wave using the first optical signal and an applied bias; an optical delay line configured to delay the second optical path signal output from the coupler; and an terahertz receiver configured to receive the terahertz continuous wave penetrating a sample and to detect an optical current using the terahertz continuous wave and the second optical path signal delayed. A thickness of the sample is a value corresponding to the optical current which phase value becomes a constant regardless of a plurality of measurement frequencies.

    Abstract translation: 提供了一种非接触式厚度测量装置,其包括太赫兹发射器,其被配置为从耦合器接收第一光路信号并使用第一光信号和施加的偏压产生太赫兹连续波; 光延迟线,被配置为延迟从耦合器输出的第二光路信号; 以及太赫兹接收器,被配置为接收穿透样本的太赫兹连续波,并且使用太赫兹连续波和第二光路信号延迟来检测光电流。 样品的厚度是与光电流相对应的值,该相位值成为常数,而与多个测量频率无关。

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