公开(公告)号：US07709810B2

公开(公告)日：2010-05-04

申请号：US11886641

申请日：2006-03-17

申请人： Hiroaki Misawa ,  Kosei Ueno ,  Yasuyuki Tsuboi ,  Keiji Sasaki

发明人： Hiroaki Misawa ,  Kosei Ueno ,  Yasuyuki Tsuboi ,  Keiji Sasaki

IPC分类号： G21H3/02 ,  G01N21/62

CPC分类号： G01N21/648 ,  G01N21/6428 ,  Y10S977/773 ,  Y10S977/774 ,  Y10S977/778 ,  Y10S977/779

摘要： There are provided a sensing device, a sensing apparatus, and a sensing method capable of realizing effective multi-photon absorption and local plasmon enhancement function. The sensing device can realize a high multi-photon excitation efficiency and selectivity by accurately controlling the material, shape, size, interval, and direction of metal particles arranged on a substrate. By employing the sensing device in various sensing apparatuses such as a fluorescent sensing apparatus, it is possible to realize sensing of detection object material with a high sensibility.

摘要翻译： 提供了能够实现有效的多光子吸收和局部等离子体增强功能的感测装置，感测装置和感测方法。 通过精确地控制布置在基板上的金属颗粒的材料，形状，尺寸，间隔和方向，感测装置可以实现高的多光子激发效率和选择性。 通过在诸如荧光感测装置的各种感测装置中采用感测装置，可以实现具有高灵敏度的检测对象材料的感测。

公开(公告)号：US20100067016A1

公开(公告)日：2010-03-18

申请号：US12318109

申请日：2008-12-22

申请人： Kosei UENO ,  Hiroaki MISAWA ,  Dai OHNISHI ,  Takui SAKAGUCHI ,  Yoichi MUGINO

发明人： Kosei UENO ,  Hiroaki MISAWA ,  Dai OHNISHI ,  Takui SAKAGUCHI ,  Yoichi MUGINO

IPC分类号： G01N21/55 ,  G01K7/02

CPC分类号： G01J5/20 ,  G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0853

摘要： Provided is a plasmon resonance detector that can detect temperature change in optical devices, in which the metal structure having plasmon resonance absorption is used for the optical devices. A diode formed of a conductive substrate, an n-type semiconductor layer, an i-type semiconductor layer, a p-type semiconductor layer, an n electrode (negative electrode), a p electrode (positive electrode), an insulating film, or the like is used as a semiconductor device whose resistance value changes in accordance with temperature change. A nanochain formed by connecting a plurality of metal nanoparticles is disposed on this diode. When the nanochain is irradiated with light, the nanochain generates heat. The heat generated in the nanochain is conducted to the diode. The resistance value of the diode changes in accordance with temperature change, and thus this change is read, a temperature or an amount of heat generation of the nanochain is measured, and existence and strength of the plasmon resonance are detected.

摘要翻译： 提供了一种等离子体共振检测器，其可以检测具有等离子体共振吸收的金属结构用于光学器件的光学器件中的温度变化。 由导电性基板，n型半导体层，i型半导体层，p型半导体层，n电极（负极），ap电极（正极），绝缘膜或 类似物被用作其电阻值根据温度变化而变化的半导体器件。 通过连接多个金属纳米颗粒形成的纳米链设置在该二极管上。 当纳米链被光照射时，纳米链产生热量。 在纳米链中产生的热量传导到二极管。 二极管的电阻值根据温度变化而变化，因此读取该变化，测定纳米级的发热温度或发热量，检测等离子体共振的存在和强度。

公开(公告)号：US20090032735A1

公开(公告)日：2009-02-05

申请号：US11886641

申请日：2006-03-17

申请人： Hiroaki Misawa ,  Kosei Ueno ,  Yasuyuki Tsuboi ,  Keiji Sasaki

发明人： Hiroaki Misawa ,  Kosei Ueno ,  Yasuyuki Tsuboi ,  Keiji Sasaki

IPC分类号： G01N21/64

CPC分类号： G01N21/648 ,  G01N21/6428 ,  Y10S977/773 ,  Y10S977/774 ,  Y10S977/778 ,  Y10S977/779

摘要： There are provided a sensing device, a sensing apparatus, and a sensing method capable of realizing effective multi-photon absorption and local plasmon enhancement function. The sensing device can realize a high multi-photon excitation efficiency and selectivity by accurately controlling the material, shape, size, interval, and direction of metal particles arranged on a substrate. By employing the sensing device in various sensing apparatuses such as a fluorescent sensing apparatus, it is possible to realize sensing of detection object material with a high sensibility.

摘要翻译： 提供了能够实现有效的多光子吸收和局部等离子体增强功能的感测装置，感测装置和感测方法。 通过精确地控制布置在基板上的金属颗粒的材料，形状，尺寸，间隔和方向，感测装置可以实现高的多光子激发效率和选择性。 通过在诸如荧光感测装置的各种感测装置中采用感测装置，可以实现具有高灵敏度的检测对象材料的感测。

公开(公告)号：US07486433B2

公开(公告)日：2009-02-03

申请号：US11664388

申请日：2005-09-30

申请人： Vygandas Jarutis ,  Vygantas Mizeikis ,  Saulius Juodkazis ,  Hiroaki Misawa

发明人： Vygandas Jarutis ,  Vygantas Mizeikis ,  Saulius Juodkazis ,  Hiroaki Misawa

IPC分类号： G02F1/35

CPC分类号： B82Y10/00 ,  G02F1/39 ,  G06N99/002

摘要： A high-luminance quantum correlation photon beam generator in which a laser light source (1) emits a laser pumped light and a parametric crystal (2) generates a pair of two photons of a signal photon and an idler photon on receiving the pumped light to emit two photon beams. Further, a beam splitter (5) splits a signal photon beam (6) from an idler photon beam (7), a mode inverter (10) rotates one of the signal photon beam, (6) and the idler photon beam (7) 180° around its geometric center, a phase adjusting means (8) adjusts phases of the signal photon beam (6) and the idler photon beam (7) based on an optical time delay, and a beam coupling means (14) overlays the signal photon beam (6) with the idler photon beam (7) in a common-line polarized annular shape by the mode inverter (10) to bring them into a quantum correlated state.

摘要翻译： 其中激光光源（1）发射激光泵浦光和参数晶体（2）的高亮度量子相关光子发生器在接收泵浦光时产生信号光子和惰性光子的一对两个光子 发射两个光子束。 此外，分束器（5）从信号光子束（7）分离信号光子束（6），模式反相器（10）旋转信号光子束（6）和惰轮光子束（7）之一， 基于光学时间延迟，相位调整装置（8）调整信号光子束（6）和惰轮光子束（7）的相位，并且束耦合装置（14）覆盖信号 具有惰性光子束（7）的光子束（6）通过模式反相器（10）以共线偏振环形形状，使其进入量子相关状态。

公开(公告)号：US20080160287A1

公开(公告)日：2008-07-03

申请号：US11884614

申请日：2006-02-16

申请人： Hiroaki Misawa ,  Kosei Ueno ,  Yasuyuki Tsuboi ,  Keiji Sasaki

发明人： Hiroaki Misawa ,  Kosei Ueno ,  Yasuyuki Tsuboi ,  Keiji Sasaki

IPC分类号： B32B5/16 ,  G03F7/00 ,  B08B3/12

CPC分类号： G02B5/3058 ,  B82Y20/00 ,  G01N21/554 ,  G02B5/008 ,  Y10T428/24917 ,  Y10T428/25

摘要： A metal structure capable of significantly increasing wavelength selectivity and polarization electivity for an incident light, and a production method thereof. First, a solid transparent substrate (glass substrate) (10) is cleaned and dried (S100). The surface of the substrate (10) is spin-coated with a positive electron lithography-use resist solution and then baked, and the resist solution is removed to form a resist thin film (20) on the substrate (10) (S200). A specified pattern is drawn on the resist thin film (20) with an electron beam, and the film is developed, rinsed and dried (S300). Then, metals such as chromium and then gold are formed sequentially on the substrate (10) by sputtering (S400). And, excessive resist materials are removed from the surface of the substrate (10) (S500), whereby metal nano-rod array (40) is completed. The metal nano-rod array (40) has a structure in which many metal nano-rods having their sizes precisely controlled are integrated on the substrate (10) at constant fine intervals and with their directions aligned in one axial direction.

摘要翻译： 能够显着提高入射光的波长选择性和极化电位的金属结构体及其制造方法。 首先，清洁干燥固体透明基板（玻璃基板）（10）（S100）。 用正电子光刻用抗蚀剂溶液旋涂基板（10）的表面，然后烘烤，除去抗蚀剂溶液，以在基板（10）上形成抗蚀剂薄膜（20）（S 200） 。 用电子束在抗蚀剂薄膜（20）上绘制规定的图案，并将该膜显影，漂洗和干燥（S 300）。 然后，通过溅射在基板（10）上依次形成诸如铬，然后金属的金属（S 400）。 并且，从基板（10）的表面除去过量的抗蚀剂材料（S 500），从而完成金属纳米棒阵列（40）。 金属纳米棒阵列（40）具有这样的结构，其中许多具有精确控制的尺寸的金属纳米棒以恒定的细微间隔并且沿着一个轴向对齐在基底（10）上。

公开(公告)号：US5212382A

公开(公告)日：1993-05-18

申请号：US806635

申请日：1991-12-13

申请人： Keiji Sasaki ,  Hiroaki Misawa ,  Noboru Kitamura

发明人： Keiji Sasaki ,  Hiroaki Misawa ,  Noboru Kitamura

IPC分类号： H05H3/04

CPC分类号： H05H3/04

摘要： This invention provides laser trapping designed to trap a microparticle or a group of microparticles by scanning at least a focused laser beam at high speed.This laser trapping make it possible to control the formation of microparticles into a specified pattern according to the scanning form of the focused laser beam, fix and transport said pattern, and trap and manipulate the microparticles with lower index of refraction than that of a medium, or other photoreflective microparticles such as a metal. Consequently, with increasing degree of freedom of processing and modification on various microparticles, the field of application expands.

公开(公告)号：US08895235B2

公开(公告)日：2014-11-25

申请号：US13582336

申请日：2011-03-01

申请人： Kosei Ueno ,  Hiroaki Misawa

发明人： Kosei Ueno ,  Hiroaki Misawa

IPC分类号： G03F7/20 ,  H01L21/027 ,  G03F1/50

CPC分类号： H01L21/0274 ,  G03F1/50 ,  G03F7/2014 ,  G03F7/7035 ,  G03F7/70375 ,  G03F7/70408

摘要： Disclosed is a process for producing a photoresist pattern, comprising the steps of: preparing a photomask that comprises a metal nano structure having a metal film arranged thereon and can generate a plasmon resonance, on a mask substrate; preparing a photoresist film that is formed on the surface of the resist substrate and is sensible to light having a wavelength (X); bringing the photomask into contact with the photoresist film; and exposing the photoresist film to light having a wavelength (Y) that is longer than the wavelength (X) and is shorter than the peak wavelength of a plasmon resonance band of the metal nano structure, thereby transferring a pattern of the metal film in the photomask onto the photoresist film.

摘要翻译： 公开了一种制备光致抗蚀剂图案的方法，包括以下步骤：制备包含金属纳米结构的光掩模，所述金属纳米结构在其上布置有金属膜，并可在掩模基板上产生等离子体共振; 制备形成在抗蚀剂基板的表面上且对具有波长（X）的光敏感的光致抗蚀剂膜; 使光掩模与光致抗蚀剂膜接触; 并且将光致抗蚀剂膜曝光于比波长（X）长的波长（Y）的光并且短于金属纳米结构的等离子体共振带的峰值波长，从而将金属膜的图案转印在 光掩模到光刻胶膜上。

公开(公告)号：US20130017499A1

公开(公告)日：2013-01-17

申请号：US13582336

申请日：2011-03-01

申请人： Kosei Ueno ,  Hiroaki Misawa

发明人： Kosei Ueno ,  Hiroaki Misawa

IPC分类号： G03F7/20 ,  G03B27/54 ,  B82Y30/00

CPC分类号： H01L21/0274 ,  G03F1/50 ,  G03F7/2014 ,  G03F7/7035 ,  G03F7/70375 ,  G03F7/70408

摘要： Disclosed is a process for producing a photoresist pattern, comprising the steps of: preparing a photomask that comprises a metal nano structure having a metal film arranged thereon and can generate a plasmon resonance, on a mask substrate; preparing a photoresist film that is formed on the surface of the resist substrate and is sensible to light having a wavelength (X); bringing the photomask into contact with the photoresist film; and exposing the photoresist film to light having a wavelength (Y) that is longer than the wavelength (X) and is shorter than the peak wavelength of a plasmon resonance band of the metal nano structure, thereby transferring a pattern of the metal film in the photomask onto the photoresist film.

摘要翻译： 公开了一种制备光致抗蚀剂图案的方法，包括以下步骤：制备包含金属纳米结构的光掩模，所述金属纳米结构在其上布置有金属膜，并可在掩模基板上产生等离子体共振; 制备形成在抗蚀剂基板的表面上且对具有波长（X）的光敏感的光致抗蚀剂膜; 使光掩模与光致抗蚀剂膜接触; 并且将光致抗蚀剂膜曝光于比波长（X）长的波长（Y）的光并且比金属纳米结构的等离子体共振带的峰值波长短，从而将金属膜的图案转印在 光掩模到光刻胶膜上。

公开(公告)号：US20120325301A1

公开(公告)日：2012-12-27

申请号：US13394528

申请日：2010-09-02

申请人： Hiroaki Misawa ,  Yoshiaki Nishijima ,  Kosei Ueno ,  Kei Murakoshi

发明人： Hiroaki Misawa ,  Yoshiaki Nishijima ,  Kosei Ueno ,  Kei Murakoshi

IPC分类号： H01L31/07

CPC分类号： H01G9/2031 ,  H01G9/2022 ,  H01L29/47 ,  H01L31/022425 ,  H01L31/18 ,  Y02E10/542 ,  Y02P70/521

摘要： The present invention has an object to provide a photoelectric conversion device which can be manufactured through a simple manufacturing process, achieve photoelectric conversion over a wide range of wavelength regions, and attain high photoelectric conversion efficiency even in the infrared wavelength region, a photodetection device, and a photodetection method. This photoelectric conversion device 1 includes a substrate 2 containing single crystalline titanium dioxide, adhesion layers 2c formed on a surface 2a of the substrate 2, metal microstructure bodies 3, each of which has a volume of 1,000 nm3 or more and 3,000,000 nm3 or less, arranged at predetermined intervals in a predetermined direction on surfaces of the adhesion layers 2c, a container 4 for containing an electrolyte solution L in an arrangement region of the metal microstructure bodies 3 on the surface 2a of the substrate 2, a conductive layer 7 formed on a rear surface 2b of the substrate 2, and a counter electrode 5 in contact with the electrolyte solution L in the container 4; and the metal microstructure bodies 3 adhere onto the substrate 2 through the adhesion layers 2c, a Schottky barrier is formed at an interface of the substrate 2 with the metal microstructure bodies 3, and photoelectric conversion is carried out for light in an infrared region by utilizing a plasmon resonance phenomenon.

摘要翻译： 本发明的目的是提供一种能够通过简单的制造工艺制造的光电转换装置，在宽范围的波长区域上实现光电转换，并且即使在红外波长区域也获得高的光电转换效率，光电检测装置， 和光电检测方法。 该光电转换装置1包括含有单晶二氧化钛的基板2，形成在基板2的表面2a上的粘合层2c，金属微结构体3的体积为1000nm 3以上且3,000,000nm 3以下， 在粘合层2c的表面上以预定方向以预定的方向排列，在基板2的表面2a上的金属微结构体3的配置区域中容纳电解液L的容器4，形成在基板2的表面2a上的导电层7 基板2的后表面2b和与容器4中的电解液L接触的对电极5; 并且金属微结构体3通过粘附层2c附着在基板2上，在基板2与金属微结构体3的界面形成肖特基势垒，利用红外线区域的光进行光电转换 等离子体共振现象。

公开(公告)号：US08097337B2

公开(公告)日：2012-01-17

申请号：US11990470

申请日：2006-08-15

申请人： Tomohiro Hashimoto ,  Hiroaki Misawa

发明人： Tomohiro Hashimoto ,  Hiroaki Misawa

IPC分类号： B32B3/26 ,  B32B3/06

CPC分类号： G02B1/12 ,  B82Y20/00 ,  C03C23/0025 ,  G02B1/005 ,  G02B5/1857 ,  G02B2207/101 ,  Y10T428/13 ,  Y10T428/131 ,  Y10T428/249953 ,  Y10T428/249967 ,  Y10T428/249969

摘要： The present invention may provide a structure capable of obtaining a higher difference in refractive indices between that of a transparent material and that of a cavity, than in the past, and a manufacturing method thereof, and the present invention provides a structure having a transparent material and an internal cavity which is formed by irradiating said transparent material with a pulse laser beam having a pulse width of 10×10−12 seconds or less, and wherein refractive index of said transparent material at d line is nd≧1.3.

摘要翻译： 本发明可以提供一种能够获得透明材料与空腔的折射率之间的折射率之差比以往更高的结构及其制造方法，本发明提供一种具有透明材料的结构 以及通过用脉冲宽度为10×10-12秒以下的脉冲激光束照射所述透明材料形成的内部空腔，其中所述透明材料在d线的折射率为≧1.3。