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公开(公告)号：US11754062B2
公开(公告)日：2023-09-12
申请号：US17700163
申请日：2022-03-21
申请人： Thermo Finnigan LLC
发明人： Jaime A. Carrera , Dustin J. Kreft
IPC分类号： F04B39/06 , F04B41/06 , F04B23/04 , H01J49/24 , F04B37/14 , F04D25/16 , F04D19/04 , F04D17/16
CPC分类号： F04B39/064 , F04B23/04 , F04B37/14 , F04D17/168 , F04D19/04 , F04D25/16 , H01J49/24 , F04B41/06 , F04B2201/0801 , F04D19/042
摘要： A method comprises: heating a flow of coolant liquid by passing the flow through one or more fluidic tubing lines, channels or conduits that are in thermal contact with a housing of a vacuum pump; apportioning the flow of heated coolant liquid between a bypass fluid tubing line and a channel within a wall of a vacuum chamber; recombining the first and second partial flows of the heated coolant liquid; passing the recombined flow of the coolant liquid through a heat exchanger that cools the coolant liquid; and recirculating the cooled coolant liquid through the one or more fluidic tubing lines, channels or conduits that are in thermal contact with the vacuum pump housing, wherein the apportionment of the flow of the heated coolant liquid is automatically performed under the control of an electronic controller or computer in response to a temperature measurement received by the electronic controller or computer.
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12.发明授权公开(公告)号：US11721533B1
公开(公告)日：2023-08-08
申请号：US17033535
申请日：2020-09-25
IPC分类号： H01J49/00 , A61B5/097 , A61B5/08 , A61B5/00 , H01J49/26 , G01N21/3504 , G01N33/497 , G01N21/64 , G01N21/3581 , H01J49/24
CPC分类号： H01J49/0031 , A61B5/082 , A61B5/097 , A61B5/4845 , G01N21/3504 , G01N21/3581 , G01N21/64 , G01N33/497 , H01J49/0013 , H01J49/24 , H01J49/26 , G01N2201/06113
摘要： An exemplary breath analysis system may include a sampling chamber having a molecule collector disposed therein. The molecule collector may be configured such that volatile organic compounds (VOCs) present in a breath sample introduced to the sampling chamber adhere to the molecule collector. A heating element may ramp heat within the sampling chamber, causing release of at least a portion of the VOCs adhered to the molecule collector, lighter and/or less bound VOCs first, heavier and/or more strongly bound VOCs later. An analysis device (e.g., a mass spectrometer or a Terahertz (THz) spectrometer) may identify one or more target VOCs from among at least the portion of the VOCs released from the molecule collector and generate an output representative of the identified target VOC(s). The output may include information that quantitates a concentration of the target VOC(s) with respect to a source of the breath sample.
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公开(公告)号：US20230162967A1
公开(公告)日：2023-05-25
申请号：US18099656
申请日：2023-01-20
申请人： Carl Zeiss SMT GmbH
CPC分类号： H01J49/40 , G01N33/0027 , G03F7/7085 , G03F7/70858 , H01J49/24
摘要： A residual gas analyser (40) for analysis of a residual gas (30), in particular a residual gas in an EUV lithography system (1), includes an inlet system (41) for admission of the residual gas from a vacuum environment (27a) into the residual gas analyser, and a mass analyser (43) having a detector (44) for detecting ionized constituents (30a) of the residual gas. The residual gas analyser includes an ion transfer device (42) for transferring the ionized constituents of the residual gas to the mass analyser, the ion transfer device having an ion filtering device (45) configured for filtering at least one ionic constituent (30a) of the residual gas. Also disclosed is an EUV lithography system, in particular an EUV lithography apparatus, which includes at least one residual gas analyser configured as indicated above for analysing a residual gas in a vacuum environment of the EUV lithography system.
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公开(公告)号：US11621154B2
公开(公告)日：2023-04-04
申请号：US17057004
申请日：2019-05-31
申请人： Micromass UK Limited
发明人： Ruth Wamsley , Michael Wilson , Ian Trivett , Peter Carney , Haydn Murray , Paul McIver
摘要： A mass spectrometer comprising: a vacuum chamber; and an ion inlet assembly for transmitting analyte ions into the vacuum chamber; wherein the spectrometer is configured to operate in a cooling mode in which it selectively controls one or more gas flow to the ion inlet assembly for actively cooling the ion inlet assembly.
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公开(公告)号：US20230084619A1
公开(公告)日：2023-03-16
申请号：US18053698
申请日：2022-11-08
发明人： Alexander A. MAKAROV , Eloy R. WOUTERS , Joshua A. SILVEIRA , Mikhail G. SKOBLIN , Viacheslav KOZLOVSKIY
摘要： A mass spectrometry method comprises: (a) introducing ions and gas into a first electrode section of an ion transport apparatus along an axis, the ion transport apparatus further comprising a second electrode section including: a plurality of stacked, mutually parallel ring or plate electrodes; and an ion outlet aperture configured to receive the ions from the second electrode section and to transfer the ions to the vacuum chamber; (b) providing only non-oscillatory voltages to electrodes of the first electrode section of the ion transport apparatus that divert motion of the ions away from that axis and towards an entrance aperture of the second electrode section; (c) transporting the ions through the second electrode section to and through the ion outlet aperture to the vacuum chamber; and (d) removing a major portion of the gas through an exhaust port that is offset from the ion outlet aperture.
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公开(公告)号：US11551921B1
公开(公告)日：2023-01-10
申请号：US17500555
申请日：2021-10-13
发明人： Hayden James Evans McGuinness , Michael Gehl , Christopher Todd DeRose , Lambert Paul Parazzoli , Raymond A. Haltli
摘要： The present disclosure relates to an integrated package having an active area, an electrical routing circuit, an optical routing circuit, and a vacuum vessel. Methods of making such a package are also described herein.
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公开(公告)号：US20220415640A1
公开(公告)日：2022-12-29
申请号：US17844219
申请日：2022-06-20
发明人： Christian Hock , Alexander Wagner , Hamish Stewart , Dmitry Grinfeld , Anastassios Giannakopulos , Wilko Balschun , Alexander Makarov
摘要： The present invention relates to an assembly comprising a vacuum chamber and a time-of-flight mass spectrometer wherein the time-of-flight mass spectrometer is contained within the vacuum chamber. The time-of-flight mass spectrometer comprising a first electrode and a second electrode, the second electrode being spaced apart from the first electrode at a distance defining a portion of an ion-flight path therebetween. The assembly further comprising a first support for supporting the first electrode, the first support arranged between an inner surface of the vacuum chamber and the first electrode. The first support is configured to permit relative movement between at least a portion of the inner surface of the vacuum chamber and the first electrode. The inner surface of the vacuum chamber and the first electrode are thermally coupled. The present invention also relates to a multi-reflection time-of-flight mass analyser. The present invention also relates to an apparatus for out-gassing to remove contaminants from surfaces within a vacuum chamber by heating and subsequently cooling the surfaces.
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公开(公告)号：US20220399199A1
公开(公告)日：2022-12-15
申请号：US17345549
申请日：2021-06-11
发明人： Alexander A. MAKAROV , Eloy R. WOUTERS , Joshua A. SILVEIRA , Mikhail G. SKOBLIN , Viacheslav KOZLOVSKIY
摘要： A mass spectrometry method comprises: (1) introducing ions and gas into an first electrode section of an ion transport apparatus through a slot of an ion transfer tube, the ion tunnel section comprising a first longitudinal axis that is contained within a slot plane of the ion transfer tube, the first longitudinal axis not intersecting an outlet of the ion transfer tube, wherein the apparatus further comprises: (a) a second electrode section configured to receive the ions from the first electrode section and comprising a second longitudinal axis that is not coincident with the first longitudinal axis; and (b) an ion outlet aperture; (2) providing voltages to electrodes of the ion transport apparatus that urge the ions to migrate towards the first longitudinal axis within the first electrode section; and (3) exhausting gas through a port that is offset from the ion outlet aperture.
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公开(公告)号：US20220277949A1
公开(公告)日：2022-09-01
申请号：US17737622
申请日：2022-05-05
发明人： Melvin Andrew PARK
摘要： The invention provides hybrid mass spectrometric systems which comprise an ion source, a first trapped ion mobility spectrometry (TIMS) analyzer and a mass analyzer, wherein the TIMS analyzer is located and operated in a first vacuum chamber at an elevated pressure above 500 Pa, and methods for operating the hybrid mass spectrometric systems.
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公开(公告)号：US20220230865A1
公开(公告)日：2022-07-21
申请号：US17616495
申请日：2020-05-11
申请人： Leybold GmbH
摘要： The invention relates to an ionization device with an ionization space formed in a container, an inlet system for supplying a gas to be ionized to the ionization space, an electron source having at least one filament for supply of an electron beam to the ionization space, and an outlet system for letting the ionized gas out of the ionization space. Electron optics having at least two electrodes are disposed between the filament and the ionization space
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