公开(公告)号：US07984648B2

公开(公告)日：2011-07-26

申请号：US12183617

申请日：2008-07-31

Applicant: Bob D. Horning ,  Ryan Supino

Inventor： Bob D. Horning ,  Ryan Supino

IPC: G01P9/04 ,  G01C19/56

CPC classification number: G01P15/18 ,  G01C19/5719 ,  G01P15/125

Abstract: A Micro-Electro-Mechanical Systems (MEMS) inertial sensor systems and methods determine linear acceleration and rotation in the in-pane and out-of-plane directions of the MEMS inertial sensor. An out-of-plane linear acceleration of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode pair. An in-plane rotation of the MEMS sensor may be sensed with the first out-of-plane electrode pair and the second out-of-plane electrode. An in-plane linear acceleration of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb. An out-of-plane rotation of the MEMS sensor may be sensed with the first in-plane sense comb and the second in-plane sense comb.

Abstract translation: 微机电系统（MEMS）惯性传感器系统和方法确定MEMS惯性传感器的窗格内和平面外方向的线性加速和旋转。 可以利用第一平面外电极对和第二平面外电极对来感测MEMS传感器的面外线性加速度。 可以利用第一外部平面电极对和第二平面外电极感测MEMS传感器的面内旋转。 可以利用第一平面内感测梳和第二平面内感测梳来感测MEMS传感器的面内线性加速度。 可以利用第一平面内感测梳和第二平面内感测梳来感测MEMS传感器的面外旋转。

公开(公告)号：US07980134B2

公开(公告)日：2011-07-19

申请号：US11608592

申请日：2006-12-08

Applicant: Dirk Hammerschmidt

Inventor： Dirk Hammerschmidt

IPC: G01P9/04

CPC classification number: G01C19/56

Abstract: A measuring device for determining a measured quantity having an oscillatory structure where an oscillation signal is detectable. The measuring device further includes a device for exciting the oscillatory structure by an excitation frequency to result in an oscillation of an oscillation frequency. The measuring device further has a device for processing the oscillation signal by a frequency depending on the oscillation frequency and the excitation frequency. Furthermore, the measuring device includes an evaluator for determining the measured quantity based on the oscillation signal processed.

Abstract translation: 一种用于确定具有可振荡信号的振荡结构的测量量的测量装置。 测量装置还包括用于通过激励频率激励振荡结构以产生振荡频率的振荡的装置。 测量装置还具有用于根据振荡频率和激励频率以频率处理振荡信号的装置。 此外，测量装置包括用于基于处理的振荡信号确定测量量的评估器。

公开(公告)号：US07938004B1

公开(公告)日：2011-05-10

申请号：US12053402

申请日：2008-03-21

Applicant: James P. Brunsch, Jr. ,  David A. Bittle ,  Julian L. Cothran ,  Gary T. Jimmerson ,  Russell S. Garner

Inventor： James P. Brunsch, Jr. ,  David A. Bittle ,  Julian L. Cothran ,  Gary T. Jimmerson ,  Russell S. Garner

IPC: G01P21/02 ,  G01P1/02 ,  G01P9/04 ,  G05D1/10

CPC classification number: G01C21/16

Abstract: Disclosed herein are systems and methods of angular rate and position measurement that combine a small footprint with hardening and isolation technologies that allow it to function in acceleration, angular rate, noise and vibration environments that cause other gyroscopes to either fail or to produce erroneous outputs. An example embodiment contains a triad of accelerometers, a triad of gyroscopes, analog and digital ancillary electronics and a processor housed within a housing which is also filled with vibration reducing encapsulating compound. The disclosed systems and methods of angular rate and position measurement are capable of measuring and correcting internal errors and perturbations caused by the longitudinal and angular accelerations and temperature excursions of aerospace vehicles, isolating the gyroscope elements from the effects of acoustic noise and vibration, and accurately measuring the relatively small pitch and yaw oscillations of the vehicle in its flight path trajectory.

Abstract translation: 本文公开了角速率和位置测量的系统和方法，其将小占地面积与硬化和隔离技术相结合，使其能够在加速度，角速率，噪声和振动环境中起作用，导致其他陀螺仪失效或产生错误的输出。 示例性实施例包含加速度计的三元组，陀螺仪的三元组，模拟和数字辅助电子设备以及容纳在壳体内的处理器，其还填充有减震包封化合物。 所公开的角速率和位置测量的系统和方法能够测量和校正由航空航天车辆的纵向和角加速度和温度偏移引起的内部误差和扰动，将陀螺仪元件与声学噪声和振动的影响隔离，并且准确地 测量车辆在其飞行路径轨迹中的相对小的俯仰和偏航振荡。

公开(公告)号：US07878060B2

公开(公告)日：2011-02-01

申请号：US11737410

申请日：2007-04-19

Applicant: Ryoichi Yoshikawa

Inventor： Ryoichi Yoshikawa

IPC: G01P15/125 ,  G01P9/04

CPC classification number: G01P15/125 ,  G01C19/56 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0842

Abstract: A micromachine includes a movable section formed of a conductor and a support section formed of a conductor, wherein the movable section and the support section are separated from each other, an insulating layer is provided on the conductor, a conductive layer is provided on the insulating layer, and the conductive layer is formed so as to straddle the movable section and the support section.

Abstract translation: 微机械包括由导体形成的可移动部分和由导体形成的支撑部分，其中可动部分和支撑部分彼此分离，绝缘层设置在导体上，导电层设置在绝缘体上 并且导电层形成为跨越可移动部分和支撑部分。

公开(公告)号：US07856878B2

公开(公告)日：2010-12-28

申请号：US10591221

申请日：2005-03-11

Applicant: Steven Porter Hotelling ,  Lex Bayer ,  Brian R. Land

Inventor： Steven Porter Hotelling ,  Lex Bayer ,  Brian R. Land

IPC: G01P9/04

CPC classification number: G01C19/5705 ,  G01C19/56 ,  G01C19/5719 ,  G01C25/00

Abstract: A vibratory rotational rate gyroscope has a suspended assembly isolated from external vibrations by an arrangement of helical springs. This isolated assembly includes both the active components of the rotational rate gyroscope and a digital processing circuit. The digital processing circuit includes digital storage for both externally determined and internally determined unit-specific calibration values. These values provide seed values for startup processes, which improves loop startup time, and values for unit-specific electronic calibration. The digital processing circuit further converts all data to digital form. A digital communications protocol is used to transmit the calibration information and the outgoing data to and from the isolated assembly on only two conductors. Two additional conductors used for power. Four of the helical springs used in the suspension arrangement are used for these conductors such that no additional wiring is required.

Abstract translation: 振动旋转速率陀螺仪具有通过螺旋弹簧的布置与外部振动隔离的悬挂组件。 该隔离的组件包括旋转速率陀螺仪的​​有源部件和数字处理电路。 数字处理电路包括用于外部确定的和内部确定的单位特定校准值的数字存储。 这些值为启动过程提供种子值，可以提高循环启动时间，以及单位特定电子校准的值。 数字处理电路还将所有数据转换成数字形式。 数字通信协议用于仅在两个导体上传送校准信息和输出数据到和从隔离组件传输。 两个额外的导体用于电源。 在悬挂装置中使用的四个螺旋弹簧用于这些导体，使得不需要额外的布线。

公开(公告)号：US07832271B2

公开(公告)日：2010-11-16

申请号：US11914127

申请日：2005-05-24

Applicant: Makoko Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

Inventor： Makoko Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

IPC: G01P9/04

CPC classification number: G01C19/574 ,  Y10T74/1282

Abstract: To provide a compact and high performance gyroscope.A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

Abstract translation: 提供一种紧凑，高性能的陀螺仪。 陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。 执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

公开(公告)号：USRE41856E1

公开(公告)日：2010-10-26

申请号：US10229396

申请日：2002-08-26

Applicant: Paolo Ferrari ,  Benedetto Vigna ,  Pietro Montanini ,  Marco Ferrera

Inventor： Paolo Ferrari ,  Benedetto Vigna ,  Pietro Montanini ,  Marco Ferrera

IPC: G01P15/125 ,  G01P9/04

CPC classification number: H01L21/764 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00246 ,  B81C2201/0109 ,  B81C2201/0177 ,  B81C2203/0735 ,  B81C2203/0778 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  H01L21/76202

Abstract: A movable mass forming a seismic mass is formed starting from an epitaxial layer and is covered by a weighting region of tungsten which has high density. To manufacture the mass, buried conductive regions are formed in the substrate. Then, at the same time, a sacrificial region is formed in the zone where the movable mass is to be formed and oxide insulating regions are formed on the buried conductive regions so as to partially cover them. An epitaxial layer is then grown, using a nucleus region. A tungsten layer is deposited and defined and, using a silicon carbide layer as mask, the suspended structure is defined. Finally, the sacrificial region is removed, forming an air gap.

公开(公告)号：US07759848B2

公开(公告)日：2010-07-20

申请号：US12273788

申请日：2008-11-19

Applicant: Kazuya Hirasawa

Inventor： Kazuya Hirasawa

IPC: H01L41/08 ,  G01P9/04 ,  H03H9/21

CPC classification number: H03H9/1021 ,  H03H9/215

Abstract: A tuning fork type piezoelectric resonator element includes: a base including a pair of cuts provided opposite from each other and a constricted part located between the pair of cuts, a pair of resonator arms extending from the base, and an excitation electrode provided to each of the pair of resonator arms. When the pair of resonator arms vibrate at an inherent resonance frequency fcom of a common mode at which the pair of resonator arms swing in a same direction, a node of the vibration of the common mode is located at the constricted part.

Abstract translation: 音叉型压电谐振元件包括：基座，其包括彼此相对设置的一对切口和位于所述一对切口之间的收缩部分，从所述基座延伸的一对谐振器臂以及设置在所述基座上的激励电极 一对谐振器臂。 当一对谐振器臂以共模臂在相同方向摆动的共模的固有谐振频率fcom振动时，共模振动的节点位于收缩部分。

公开(公告)号：US07703324B2

公开(公告)日：2010-04-27

申请号：US11747629

申请日：2007-05-11

Applicant: Michael S. Sutton ,  Mark W. Weber

Inventor： Michael S. Sutton ,  Mark W. Weber

IPC: G01P9/04

CPC classification number: G01C19/5726

Abstract: A two-axes rate sensing MEMS system. The system includes two proof masses, two drive components, two drive sense components, two orthogonal sets of substrate electrodes, and a processing device. The processing device is in signal communication with the two proof masses, the two sense components, or the two sets of substrate electrodes. The processing device determines the rate of rotation about two orthogonal axes based on signals received from the two proof masses, the two sense components, or the two substrate electrodes. Rotation about one axis will induce proofmass motion in the plane of the substrate. Rotation about an orthogonal axis will induce proofmass motion out-of-plane of the proofmasses. The sensing scheme independently detects these proof mass motion, which can infer rate of rotation.

Abstract translation: 一种双轴速率传感MEMS系统。 该系统包括两个检测质量，两个驱动部件，两个驱动检测部件，两个正交的基板电极组和一个处理装置。 处理装置与两个检测质量块，两个感测部件或两组基板电极信号通信。 处理装置基于从两个检验质量块，两个感测部件或两个基板电极接收的信号来确定关于两个正交轴的旋转速率。 围绕一个轴的旋转将引起衬底平面中的校正力运动。 围绕正交轴的旋转将引起校样的平面外的校正。 感测方案独立地检测这些证明质量运动，这可以推断出旋转速率。

公开(公告)号：US07665360B2

公开(公告)日：2010-02-23

申请号：US10596252

申请日：2005-09-28

Applicant: Kazuo Kurihara

Inventor： Kazuo Kurihara

IPC: G01P9/04 ,  G01C19/00

CPC classification number: G01C25/005 ,  G01C19/5649

Abstract: Vibration gyro circuitry, a vibration gyro unit, and a method for detecting a vibration gyro output, which enable detection of a rotational angular velocity with high sensitivity, are provided. The circuitry and the unit includes a differential amplifier circuit (4) for outputting a signal Vda corresponding to a difference (Vgl−Vgr) between output signals of two detection pieces of a vibration gyro (31), a synchronous detection circuit (5) for synchronously detecting the output signal Vda of the differential amplifier circuit (4), and a phase shift circuit for supplying to the synchronous detection circuit (5) a signal, as a timing signal Vck for the synchronous detection, which is phase-shifted with respect to a drive signal (an output signal of an adding circuit 1) Vsa supplied to the vibration gyro (31). The phase difference θps between the drive signal Vsa and the timing signal Vck is set on the basis of a phase difference characteristic of a detection sensitivity S for the output signal Vda of the differential amplifier circuit (4), which is obtained in advance under a condition where a rotational angular velocity is applied to the vibration gyro (31) in a driving state.

Abstract translation: 提供振动陀螺仪电路，振动陀螺仪单元和用于检测振动陀螺仪输出的方法，其能够以高灵敏度检测旋转角速度。 电路和单元包括差分放大器电路（4），用于输出对应于振动陀螺仪（31）的两个检测件的输出信号之间的差值（Vgl-Vgr）的信号Vda，用于 同步检测差分放大电路（4）的输出信号Vda;以及相移电路，用于向同步检测电路（5）提供作为用于同步检测的定时信号Vck的信号，该定时信号Vck相对于 提供给振动陀螺仪（31）的驱动信号（加法电路1的输出信号）Vsa。 基于预先获得的差分放大电路（4）的输出信号Vda的检测灵敏度S的相位差特性来设定驱动信号Vsa和定时信号Vck之间的相位差和总和ps 在驱动状态下对旋转角速度施加到振动陀螺仪（31）的条件下进行。