Scanning Ferromagnetic Resonance (FMR) for Wafer-Level Characterization of Magnetic Films and Multilayers

    公开(公告)号:US20180267128A1

    公开(公告)日:2018-09-20

    申请号:US15463074

    申请日:2017-03-20

    IPC分类号: G01R33/60 G01R33/345

    摘要: A ferromagnetic resonance (FMR) measurement system is disclosed with a waveguide transmission line (WGTL) connected at both ends to a mounting plate having an opening through which the WGTL is suspended. While the WGTL bottom surface contacts a portion of magnetic film on a whole wafer, a plurality of microwave frequencies is sequentially transmitted through the WGTL. Simultaneously, a magnetic field is applied to the contacted region thereby causing a FMR condition in the magnetic film. After RF output is transmitted through or reflected from the WGTL to a RF detector and converted to a voltage signal, effective anisotropy field, linewidth, damping coefficient, and/or inhomogeneous broadening are determined based on magnetic field intensity, microwave frequency and voltage output. A plurality of measurements is performed by controllably moving the WGTL or wafer and repeating the simultaneous application of microwave frequencies and magnetic field at additional preprogrammed locations on the magnetic film.

    System for detecting zero-field resonance

    公开(公告)号:US09964610B2

    公开(公告)日:2018-05-08

    申请号:US14812654

    申请日:2015-07-29

    摘要: A zero-field paramagnetic resonance magnetometer (ZF-PRM) system and method for quickly and efficiently finding and optimizing the zero-field (ZF) resonance is described. In this system and method a magnetic coil is used to apply a magnetic bias field in the direction of the pump beam to artificially broaden the width and maximize the strength of the ZF resonance. By making the ZF resonance easy to detect, the ZF resonance may be found quickly found without the use of additional components and complex algorithms. Once the ZF resonance is found, a compensating magnetic field can be applied to null the magnetic field in the vicinity of the vapor cell in the ZF-PRM, thereby initializing it for operation.

    Isolating active electron spin signals in EPR
    15.
    发明授权
    Isolating active electron spin signals in EPR 有权
    在EPR中隔离有源电子自旋信号

    公开(公告)号:US09551773B2

    公开(公告)日:2017-01-24

    申请号:US14006153

    申请日:2012-03-21

    IPC分类号: G01V3/00 G01R33/60 G01N24/10

    CPC分类号: G01R33/60 G01N24/10

    摘要: A system and method involve performing electron paramagnetic resonance on an object under study. The system comprises a first field generator adapted for generating an orienting magnetic field for orienting the magnetization of the object under study and a second field generator adapted for generating RF excitation waves at a frequency to generate electron paramagnetic resonance (EPR) in the object under test. The system also comprises a detection unit adapted for detecting the EPR signals emitted by the object under test and a control unit adapted for controlling the relative orientation of the orienting magnetic field induced by the first field generator with respect to the detection unit. The system furthermore comprises a processing unit programmed for combining detected EPR signals obtained using different relative orientations of the orienting magnetic field with respect to the detection unit.

    摘要翻译: 一种系统和方法涉及在正在研究的物体上进行电子顺磁共振。 该系统包括第一场发生器,其适于产生用于定向被研究物体的磁化的定向磁场和适于产生频率上的RF激发波的第二场发生器,以在被测物体中产生电子顺磁共振(EPR) 。 该系统还包括一个检测单元,用于检测被测物体发出的EPR信号,以及一个控制单元,用于控制由第一场发生器相对于检测单元感应的定向磁场的相对取向。 该系统还包括处理单元,其被编程用于组合使用定向磁场的不同相对取向获得的相对于检测单元的检测到的EPR信号。

    Method of and apparatus for in-situ measurement of soot by electron spin resonance (ESR) spectrometry
    16.
    发明授权
    Method of and apparatus for in-situ measurement of soot by electron spin resonance (ESR) spectrometry 有权
    通过电子自旋共振(ESR)光谱法原位测量烟灰的方法和设备

    公开(公告)号:US09546970B2

    公开(公告)日:2017-01-17

    申请号:US13532684

    申请日:2012-06-25

    摘要: An instrument and method using electron spin resonance spectrometry for measuring the concentration of airborne soot particles, and the like, that includes continuously passing a sample of exhaust gas through a resonating RF microwave cavity resonator during the application therethrough of a uniform slowly varying uniform magnetic field that is rapidly modulated and measuring the resulting phase modulation or amplitude modulation thereof to derive an electron spin resonance signal that directly senses the concentration of carbon free radicals produced as a result of inefficient combustion of hydrocarbons during operation of the vehicle or boiler. A further invention is the use of this signal for feedback control of the engine or boiler operating parameters to minimize or substantially eliminate particulate matter emissions.

    摘要翻译: 使用电子自旋共振光谱法测量气载烟灰颗粒的浓度的仪器和方法等,其包括在通过其中通过谐振RF微波空腔共振器连续通过排气样品的均匀缓慢变化的均匀磁场 其被快速调制并测量所得到的相位调制或幅度调制,以导出电子自旋共振信号,其直接感测由于在车辆或锅炉的操作期间烃的低效燃烧而产生的碳自由基的浓度。 另一个发明是使用该信号来对发动机或锅炉操作参数进行反馈控制,以最小化或基本上消除颗粒物质的排放。

    Using a Thermally-Isolated Cavity to Polarize a Spin Ensemble
    19.
    发明申请
    Using a Thermally-Isolated Cavity to Polarize a Spin Ensemble 审中-公开
    使用热隔离腔来极化旋转组合

    公开(公告)号:US20160077177A1

    公开(公告)日:2016-03-17

    申请号:US14787624

    申请日:2014-01-31

    IPC分类号: G01R33/38 G01R33/44

    摘要: In some aspects, polarization of a spin ensemble can be increased using cavity-based techniques. A resonator applies a drive field to a spin ensemble in a sample in a static magnetic field. The drive field couples the spin ensemble with a cavity, and the coupling increases the polarization of the spin ensemble. In some cases, the sample is thermally insulated from the cavity, for example, to maintain the sample at a higher temperature than the cavity. In some implementations, the spin ensemble achieves a polarization that is higher than its thermal equilibrium polarization.

    摘要翻译: 在一些方面,使用基于腔的技术可以增加旋转集合的极化。 谐振器将静态磁场中的驱动场施加到样品中的旋转组合。 驱动场将旋转组合与空腔耦合,并且耦合增加了旋转组合的极化。 在一些情况下,样品与空腔热绝缘,例如,以将样品保持在比空腔更高的温度。 在一些实施方案中,旋转集合实现了高于其热平衡极化的极化。