公开(公告)号：US20170038305A1

公开(公告)日：2017-02-09

申请号：US14819179

申请日：2015-08-05

Applicant: Viavi Solutions Inc.

Inventor： Benjamin F. CATCHING ,  Marc K. VON GUNTEN ,  Curtis R. HRUSKA ,  Paula SMITH ,  Paul G. COOMBS

IPC: G01N21/85 ,  G01N21/27

CPC classification number: G01N21/85 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/12 ,  G01J2003/123 ,  G01J2003/1234 ,  G01N21/27 ,  G01N21/8507 ,  G01N2201/061 ,  G01N2201/062 ,  G01N2201/068

Abstract: Increasing the precision of process monitoring may be improved if the sensors take the form of travelling probes riding along with the flowing materials in the manufacturing process rather than sample only when the process moves passed the sensors fixed location. The probe includes an outer housing hermetically sealed from the flowing materials, and a light source for transmitting light through a window in the housing onto the flowing materials. A spatially variable optical filter (SVF) captures light returning from the flowing materials, and separates the captured light into a spectrum of constituent wavelength signals for transmission to a detector array, which provides a power reading for each constituent wavelength signal.

Abstract translation: 如果传感器在制造过程中采用与流动材料一起骑行的形式，而不是仅在过程移动通过传感器固定位置时采样，则可提高过程监控的精度。 探头包括与流动材料密封的外壳体，以及用于将光通过壳体中的窗口传输到流动材料上的光源。 空间可变滤光器（SVF）捕获从流动材料返回的光，并将捕获的光分离成一组波长信号，以传输到检测器阵列，该检测器阵列为每个构成波长信号提供功率读数。