Abstract:
A linear compressor includes a cylinder block in which a compressing chamber is formed; and an inner core having a plurality of electric steel plates disposed around the cylinder block. The cylinder block extends into spaces between the electric steel plates so that the cylinder block is integrally formed with the inner core. Each of the electric steel plates includes an insertion projection extending from a surface toward the cylinder block and an insertion step extending upward and downward from the insertion projection to form a concave between the surface and the insertion step, the cylinder block extending into the concave to interlock with the inner core.
Abstract:
A rotary compressor includes a cylinder and a motor-driven crankshaft. The crankshaft includes an eccentric portion disposed in the cylinder for forming therewith a compression chamber in which fluid is compressed. A vane is yieldably biased toward the eccentric portion to partition the compression chamber into high and low pressure portions. Consequently, the vane is reciprocated radially during rotation of the crankshaft. The crankshaft is mounted in a bearing which receives oil from an oil delivery system. That system includes an oil chamber communicating with an oil reservoir with which the vane communicates. A check valve is disposed in the oil chamber and is automatically cycled open and closed in response to variations in the fluid pressure in the oil chamber caused by reciprocation of the vane.
Abstract:
Impurities can be eluted simultaneously from a plurality of local areas of a surface layer of a semiconductor substrate. A supporting unit supports the substrate, and a sample plate is disposed on the surface of the substrate. The sample plate has a plurality of holes that expose the local areas of the surface of the substrate. Eluant is provided onto the local areas of the surface layer of the substrate through the holes in the sample plate. The impurities are thus dissolved by the eluant to produce a sample. A nozzle transfers the sample from the local areas of the surface of the substrate to a plurality of sample cups. Therefore, samples from the surface layer of the substrate may be produced in a short amount of time.
Abstract:
An apparatus for manufacturing a semiconductor device includes a chamber and an exhaust system for exhausting byproducts from the chamber and adjusting an internal pressure of the chamber. The exhaust system includes an exhaust pipe connected to the chamber, a pump unit coupled with the exhaust pipe, and a cleaning unit connected to a portion of the exhaust pipe or directly connected to the pump unit to supply a cleaning gas to the pump unit.