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公开(公告)号：US20120013898A1
公开(公告)日：2012-01-19
申请号：US13242065
申请日：2011-09-23
Applicant: Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
Inventor： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 系统还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化而改变输出狭缝的宽度。
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12.发明授权System and method for inspecting a workpiece surface using polarization of scattered light 有权使用散射光偏振检测工件表面的系统和方法公开(公告)号：US07623227B2
公开(公告)日：2009-11-24
申请号：US11311907
申请日：2005-12-17
Applicant: Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
Inventor： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。
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13.发明申请公开(公告)号：US20060192948A1
公开(公告)日：2006-08-31
申请号：US11311907
申请日：2005-12-17
Applicant: Neil Judell , Ian Kohl , Songping Gao , Richard Bills
Inventor： Neil Judell , Ian Kohl , Songping Gao , Richard Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
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公开(公告)号：US08537350B2
公开(公告)日：2013-09-17
申请号：US13242065
申请日：2011-09-23
Applicant: Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
Inventor： Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 系统还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化而改变输出狭缝的宽度。
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公开(公告)号：US20130011928A1
公开(公告)日：2013-01-10
申请号：US13636358
申请日：2010-03-29
Applicant: Songping Gao
Inventor： Songping Gao
CPC classification number: C12Q1/6869 , B01L3/502715 , C12Q1/6883 , G01N21/6428 , Y10T436/143333 , C12Q2563/107 , C12Q2565/102 , C12Q2565/629
Abstract: An optical detection system (100) includes an optical element (116, 202, 502) that directs emission radiation (108), which traverses away from an optical collection path (122), to the path, wherein the emission radiation is emitted by a radiation sensitive material in a sample (204) under study in response to the material absorbing excitation radiation, and the emission radiation has a spectral characteristic that corresponds to the material.
Abstract translation: 一个光学检测系统（100）包括一个光学元件（116,202,502），它将远离光学收集路径（122）的发射辐射（108）引导到路径上，其中发射辐射由 响应于吸收激发辐射的材料研究的样品（204）中的辐射敏感材料，并且发射辐射具有对应于该材料的光谱特性。
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Patent Agency Ranking
公开(公告)号：US20120250003A1
公开(公告)日：2012-10-04
申请号：US13072857
申请日：2011-03-28
Applicant: Songping Gao
Inventor： Songping Gao
CPC classification number: G01N21/65 , C12Q1/6869 , G01N21/6452 , C12Q2535/113 , C12Q2535/122 , C12Q2563/107 , C12Q2565/102 , C12Q2565/629 , C12Q2565/632
Abstract: An optical detection system includes a detector configured to detect a signal emitted from a sample carrier and generate an output indicative of the signal detected by the detector. The sample carrier emits the signal in response to the sample carrier being scanned by an excitation source, the emitted signal is indicative of a structural characteristic of the sample carrier, and the sample carrier includes bulk material, at least one material free chamber and a bulk material/chamber interface for each chamber. The optical detection system further includes a data evaluator that identifies the structural characteristic of the sample carrier based on the output of the detector and generates data indicative of the identified structural characteristic.
Abstract translation: 光学检测系统包括检测器，其被配置为检测从样本载体发射的信号，并产生指示由检测器检测到的信号的输出。 样品载体响应于由激发源扫描的样品载体发射信号，所发射的信号指示样品载体的结构特征，并且样品载体包括散装材料，至少一个材料自由室和体积 每个室的材料/室接口。 光学检测系统还包括基于检测器的输出识别样品载体的结构特征的数据评估器，并产生指示所识别的结构特征的数据。
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公开(公告)号：US08059268B2
公开(公告)日：2011-11-15
申请号：US12604052
申请日：2009-10-22
Applicant: Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
Inventor： Neil Judell , Ian T. Kohl , Songping Gao , Richard E. Bills
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。
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18.发明授权System and method for controlling a beam source in a workpiece surface inspection system 有权用于控制工件表面检查系统中的光束源的系统和方法公开(公告)号：US07839495B2
公开(公告)日：2010-11-23
申请号：US12479939
申请日：2009-06-08
Applicant: Bruce Baran , Chris L. Koliopoulos , Songping Gao , Richard E. Bills , Michael Murphree
Inventor： Bruce Baran , Chris L. Koliopoulos , Songping Gao , Richard E. Bills , Michael Murphree
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变扫描速度波束扫描子系统，优选地使用声光偏转器，具有光束补偿，使得可以实现可变扫描速度。 还包括用于通过使用散射减少补充来改善信噪比的方法和系统，以及用于选择性地和重复扫描表面上的感兴趣区域以便提供感兴趣区域的附加观察的系统和方法。
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19.发明申请System and Method for Controlling a Beam Source in a Workpiece Surface Inspection System 有权用于控制工件表面检测系统中的光束源的系统和方法公开(公告)号：US20100149527A1
公开(公告)日：2010-06-17
申请号：US12479939
申请日：2009-06-08
Applicant: Bruce Baran , Chris L. Koliopoulos , Songping Gao , Richard Earl Bills , Michael Murphree
Inventor： Bruce Baran , Chris L. Koliopoulos , Songping Gao , Richard Earl Bills , Michael Murphree
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变扫描速度波束扫描子系统，优选地使用声光偏转器，具有光束补偿，使得可以实现可变扫描速度。 还包括用于通过使用散射减少补充来改善信噪比的方法和系统，以及用于选择性地和重复扫描表面上的感兴趣区域以便提供感兴趣区域的附加观察的系统和方法。
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20.发明申请System and method for controlling a beam source in a workpiece surface inspection system 有权用于控制工件表面检查系统中的光束源的系统和方法公开(公告)号：US20070252977A1
公开(公告)日：2007-11-01
申请号：US11311924
申请日：2005-12-17
Applicant: Bruce Baran , Chris Koliopoulos , Songping Gao , Richard Bills , Michael Murphree
Inventor： Bruce Baran , Chris Koliopoulos , Songping Gao , Richard Bills , Michael Murphree
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变扫描速度波束扫描子系统，优选地使用声光偏转器，具有光束补偿，使得可以实现可变扫描速度。 还包括用于通过使用散射减少补充来改善信噪比的方法和系统，以及用于选择性地和重复扫描表面上的感兴趣区域以便提供感兴趣区域的附加观察的系统和方法。
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