公开(公告)号：US11193882B2

公开(公告)日：2021-12-07

申请号：US17036185

申请日：2020-09-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yasuhiro Hidaka

IPC: G01N21/21 ,  G01B9/02 ,  G02B27/28 ,  G01B11/00

Abstract: Provided is an ellipsometer including a polarizing optical device configured to separate light, reflected from a sample that is irradiated with illumination light comprising a linearly polarized light, into a first linearly polarized light in a first polarization direction and a second linearly polarized light in a second polarization direction that is orthogonal to the first polarization direction, and a light-receiving optical system configured to calculate an Ψ and Δ, an amplitude ratio and a phase difference of the two polarized light respectively, from an interference fringe formed by interference between the first linearly polarized light and the second linearly polarized light after passing through an analyzing device with transmission axis different from the first polarization direction and the second polarization direction.

公开(公告)号：US20200149961A1

公开(公告)日：2020-05-14

申请号：US16541405

申请日：2019-08-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yasuhiro Hidaka

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/18 ,  G01J3/10

Abstract: Provided are a spectrometer optical system and a semiconductor inspection apparatus, for reducing cost by allowing a wide field of view, high spatial resolution, and high wavelength resolution to be compatible with one another. The spectrometer optical system includes a masking having a slit, a first spherical mirror positioned to reflect light received from the slit, a second spherical mirror positioned to reflect the light reflected from the first spherical mirror, a dispersion element positioned to receive the light reflected from the second spherical mirror, and an image sensor configured to detect the light dispersed by the dispersion element according to wavelengths of the light.