公开(公告)号：US20130122428A1

公开(公告)日：2013-05-16

申请号：US13652911

申请日：2012-10-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jong-Kwang LEE ,  Min KANG ,  Jin-Ho JU ,  Bong-Yeon KIM

IPC: G03F7/20 ,  G03B27/72

CPC classification number: G03F7/70575 ,  G03F1/30 ,  G03F7/70283

Abstract: An exposure system includes an exposure apparatus and a phase shift mask. The exposure apparatus emits a multi-wavelength light including a plurality of wavelengths different from each other. The phase shift mask includes a transparent substrate and a light blocking layer. The transparent substrate includes a first surface, and a second surface opposite to the first surface. The multi-wavelength light is incident into the first surface. The transparent substrate further includes a recess which extends from the second surface toward the first surface. The light blocking layer includes a first opening which exposes the second surface of the transparent substrate, and a second opening which is spaced apart from the first opening and exposes the recess of the transparent substrate.

Abstract translation: 曝光系统包括曝光装置和相移掩模。 曝光装置发射包括彼此不同的多个波长的多波长光。 相移掩模包括透明基板和遮光层。 透明基板包括第一表面和与第一表面相对的第二表面。 多波长光入射到第一表面。 透明基板还包括从第二表面朝向第一表面延伸的凹槽。 遮光层包括暴露透明基板的第二表面的第一开口和与第一开口间隔开并暴露透明基板的凹部的第二开口。

公开(公告)号：US20160197106A1

公开(公告)日：2016-07-07

申请号：US14740378

申请日：2015-06-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kwang-Woo PARK ,  Jeong-Won KIM ,  Jun-Hyuk WOO ,  Gwui-Hyun PARK ,  Jin-Ho JU

IPC: H01L27/12 ,  G03F1/38 ,  G02F1/13 ,  G02B5/30 ,  G02B1/08

CPC classification number: H01L27/1288 ,  G02B1/08 ,  G02B5/3033 ,  G02B5/3058 ,  G02F1/1303 ,  G03F1/38 ,  H01L29/66969 ,  H01L29/7869

Abstract: According to an exemplary embodiment of the present invention, a photomask includes a transparent substrate and a polarizing pattern. A polarizing pattern is disposed on a transparent substrate. The polarizing pattern polarize light.

Abstract translation: 根据本发明的示例性实施例，光掩模包括透明基板和偏振图案。 偏光图案设置在透明基板上。 偏光图案使光线偏光。

公开(公告)号：US20150378224A1

公开(公告)日：2015-12-31

申请号：US14582490

申请日：2014-12-24

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Koichi SUGITANI ,  Hoon KANG ,  Chul-Won PARK ,  Yang-Ho JUNG ,  Jin-Ho JU

IPC: G02F1/1362 ,  G02F1/1333 ,  G02F1/1335 ,  G02F1/1368

CPC classification number: G02F1/136209 ,  G02F1/133377 ,  G02F1/136286 ,  G02F2001/136222

Abstract: A display panel is provided. A plurality of thin-film transistors is disposed on a substrate. A plurality of data lines is disposed on the substrate. Each data line is connected to each thin-film transistor. A plurality of color filters is disposed on the substrate. Each color filter is disposed between two adjacent data lines. A plurality of black matrices is disposed on the substrate. Each black matrix overlaps each data line. A liquid crystal layer is disposed on the plurality of color filters. The liquid crystal layer includes a flat area having a substantially flat surface and a stepped area having a stepped height. The stepped area is adjacent to an edge of the flat area.

Abstract translation: 提供显示面板。 多个薄膜晶体管设置在基板上。 多个数据线设置在基板上。 每个数据线连接到每个薄膜晶体管。 多个滤色器设置在基板上。 每个滤色器设置在两个相邻数据线之间。 多个黑色矩阵设置在基板上。 每个黑矩阵与每条数据线重叠。 液晶层设置在多个滤色器上。 液晶层包括具有大致平坦表面的平坦区域和具有台阶高度的台阶区域。 阶梯区域与平坦区域的边缘相邻。

公开(公告)号：US20150205204A1

公开(公告)日：2015-07-23

申请号：US14573624

申请日：2014-12-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jun CHUN ,  Jeong-Min PARK ,  Sung-Kyun PARK ,  Ji-Hyun KIM ,  Jin-Ho JU ,  Hyoc-Min YOUN ,  Dong-Myung KIM ,  Jin-Sun KIM ,  Tai-Hoon YEO ,  Byung-Uk KIM

IPC: G03F7/038 ,  G03F7/30

CPC classification number: G03F7/0388 ,  C08F212/34 ,  C08F220/10 ,  C08F220/16 ,  C08F220/18 ,  C08F220/26 ,  G02F2001/13625 ,  G03F7/0045 ,  G03F7/0382 ,  G03F7/0392 ,  G03F7/0751 ,  G03F7/30 ,  H01L21/0274 ,  H01L21/31138 ,  H01L51/102

Abstract: A photoresist composition includes an acid-labile polymer that is decomposable by reaction with an acid, a photoacid generator, an organic base having a pKa value of 9 or less and a solvent. Based on 100 parts by weight of the acid-labile polymer, the photoacid generator is about 1 to about 30 parts by weight, and the organic base is about 0.1 to about 5 parts by weight. The solvent is about 50 to about 90 wt % based on the total weight of the composition.

Abstract translation: 光致抗蚀剂组合物包括通过与酸反应可分解的酸不稳定聚合物，光酸产生剂，pKa值为9以下的有机碱和溶剂。 基于100重量份的酸不稳定聚合物，光酸产生剂为约1至约30重量份，有机碱为约0.1至约5重量份。 基于组合物的总重量，溶剂为约50至约90重量％。

公开(公告)号：US20150198872A1

公开(公告)日：2015-07-16

申请号：US14307797

申请日：2014-06-18

Applicant: Samsung Display Co., LTD.

Inventor： Yong SON ,  Min KANG ,  Bong-Yeon KIM ,  Dong-Eon LEE ,  Jun-Hyuk WOO ,  Hyun-Joo LEE ,  Sang-Uk LIM ,  Jin-Ho JU

IPC: G03F1/26 ,  G03F7/40

CPC classification number: G03F1/26 ,  G02F2001/136231 ,  G03F7/20 ,  G03F7/40 ,  H01L27/1288

Abstract: A phase shift device includes a phase shift mask which includes a transparent substrate, and a phase shift pattern which is provided on the transparent substrate, and includes a first area having a first thickness, a second area having a second thickness which is less than the first thickness, a first opening having a first opening width and defined at the first area, and a second opening having a second opening width and defined at the second area.

Abstract translation: 相移装置包括：包括透明基板的相移掩模和设置在透明基板上的相移图案，并且包括具有第一厚度的第一区域，第二区域的第二厚度小于 第一厚度，具有第一开口宽度并限定在第一区域的第一开口，以及具有第二开口宽度并限定在第二区域的第二开口。