Abstract:
A display device includes a substrate, a gate line and a data line on the substrate, a thin film transistor on the substrate, being connected to the gate line and the data line, a pixel electrode connected to the thin film transistor, and an insulating layer on the substrate, wherein the insulating layer has a contact hole extending therethrough and the contact hole has a relatively steep sidewall including a sidewall portion with a sidewall taper angle of about 60° to about 90°.
Abstract:
A phase shift device includes a phase shift mask which includes a transparent substrate, and a phase shift pattern which is provided on the transparent substrate, and includes a first area having a first thickness, a second area having a second thickness which is less than the first thickness, a first opening having a first opening width and defined at the first area, and a second opening having a second opening width and defined at the second area.