Oxide capacitor electro-optical phase shifter
    14.
    发明授权
    Oxide capacitor electro-optical phase shifter 有权
    氧化物电容器电光移相器

    公开(公告)号:US09411176B2

    公开(公告)日:2016-08-09

    申请号:US14492435

    申请日:2014-09-22

    CPC classification number: G02F1/025 G02F1/225 G02F2001/212

    Abstract: An electro-optical phase shifter to be located in an optical waveguide may include a rib of a semiconductor material extending along a length of the optical waveguide and a control structure configured to modify a concentration of carriers in the rib according to a control voltage present between first and second control terminals of the phase shifter. The control structure may include a conductive layer covering a portion of the rib and electrically connected to a first of the control terminals. An insulating layer may be configured to electrically isolate the conductive layer from the rib.

    Abstract translation: 位于光波导中的电光移相器可以包括沿着光波导的长度延伸的半导体材料的肋,以及控制结构,其被配置为根据存在于所述肋之间的控制电压来修改肋中的载流子的浓度 移相器的第一和第二控制端子。 控制结构可以包括覆盖肋的一部分并电连接到第一控制端的导电层。 绝缘层可以被配置为将导电层与肋电隔离。

    Capacitive optical modulator
    15.
    发明授权

    公开(公告)号:US11686992B2

    公开(公告)日:2023-06-27

    申请号:US17476668

    申请日:2021-09-16

    CPC classification number: G02F1/2257 G02F1/025 G02F1/035 G02F2202/103

    Abstract: A capacitive electro-optical modulator includes a silicon layer having a cavity having sidewalls and a floor. A germanium or silicon-germanium strip overlies the silicon layer within the cavity. A silicon strip overlies the germanium or silicon-germanium strip within the cavity. The silicon strip is wider than the germanium or silicon-germanium strip. An insulator fills the cavity laterally adjacent the germanium or silicon-germanium strip and the silicon strip and extending between the sidewalls of the cavity. An upper insulating layer overlies the silicon strip and the insulator. A layer of III-V material overlies the upper insulating layer. The layer of III-V material formed as a third strip is arranged facing the silicon strip and separated therefrom by a portion of the upper insulating layer.

    Photonic IC chip
    16.
    发明授权

    公开(公告)号:US11609378B2

    公开(公告)日:2023-03-21

    申请号:US17649520

    申请日:2022-01-31

    Abstract: A photonic integrated circuit chip includes vertical grating couplers defined in a first layer. Second insulating layers overlie the vertical grating coupler and an interconnection structure with metal levels is embedded in the second insulating layers. A cavity extends in depth through the second insulating layers all the way to an intermediate level between the couplers and the metal level closest to the couplers. The cavity has lateral dimensions such that the cavity is capable of receiving a block for holding an array of optical fibers intended to be optically coupled to the couplers.

    Electro-optic device with multiple photonic layers and related methods

    公开(公告)号:US10042115B2

    公开(公告)日:2018-08-07

    申请号:US15132408

    申请日:2016-04-19

    Abstract: An electro-optic device may include a substrate layer, and a first photonic layer over the substrate layer and having a first photonic device. The electro-optic device may include a second photonic layer over the first photonic layer and having a second photonic device. The electro-optic device may include a dielectric layer over the second photonic layer, and a first electrically conductive via extending through the dielectric layer and the second photonic layer to couple to the first photonic device, and a second electrically conductive via extending through the dielectric layer and coupling to the second photonic device. The electro-optic device may include a third electrically conductive via extending through the substrate layer, the second photonic layer, and the first photonic layer to couple to the substrate layer.

    Method of making a capacitive optical modulator

    公开(公告)号:US12032265B2

    公开(公告)日:2024-07-09

    申请号:US18317705

    申请日:2023-05-15

    CPC classification number: G02F1/2257 G02F1/025 G02F1/035 G02F2202/103

    Abstract: A semiconductor device can be formed by etching a cavity in a first silicon layer that overlies an insulating layer, epitaxially growing a germanium or silicon-germanium layer in the cavity, epitaxially growing a second silicon layer in the cavity, etching the second silicon layer and the germanium or silicon-germanium layer to the floor of the cavity to define a first strip in the second silicon layer and a second strip in the germanium or silicon-germanium layer, selectively etching a portion of the second strip to decrease the width of the second strip, filling cavity portions arranged on either side of the first and second strips with an insulator, depositing an upper insulating layer over the first and second strips, and bonding a layer of III-V material to the upper insulating layer.

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