公开(公告)号：US20140170762A1

公开(公告)日：2014-06-19

申请号：US14096147

申请日：2013-12-04

Applicant: NXP B.V.

Inventor： Dimitri Soccol ,  Youri Victorovitch Ponomarev ,  David van Steenwinckel

IPC: G01N27/02

CPC classification number: G01N33/004 ,  G01N22/00 ,  G01N27/02 ,  Y02A50/243 ,  Y02A50/244 ,  Y02A50/248 ,  Y10T436/20 ,  Y10T436/204998

Abstract: An integrated circuit arrangement (100) is disclosed comprising a substrate (210); and a gas such as a CO2 sensor comprising spatially separated electrodes including at least an excitation electrode (132) and a sensing electrode (142); a volume (120) in contact with said pair of electrodes, said volume including a chemical compound for forming a reaction product with said gas in an acid-base reaction; a signal generator (212) conductively coupled to the excitation electrode and adapted to provide the excitation electrode with a microwave signal; and a signal detector (214) conductively coupled to the sensing electrode and adapted to detect a change in said microwave signal caused by a permittivity change in said volume, said permittivity change being caused by said reaction product. A device comprising such an IC arrangement and a method of sensing the presence of a gas using such an IC arrangement are also disclosed.

Abstract translation: 公开了一种集成电路装置（100），其包括衬底（210）; 以及诸如CO 2传感器的气体，其包括至少包括激励电极（132）和感测电极（142）的空间分离的电极; 与所述一对电极接触的体积（120），所述体积包括用于在酸碱反应中与所述气体形成反应产物的化合物; 导电耦合到激励电极并且适于向激励电极提供微波信号的信号发生器（212）; 以及信号检测器（214），其传导耦合到感测电极并且适于检测由所述体积的介电常数变化引起的所述微波信号的变化，所述介电常数变化是由所述反应产物引起的。 还公开了包括这种IC装置的装置和使用这种IC装置来感测气体的存在的方法。