公开(公告)号：US20230261441A1

公开(公告)日：2023-08-17

申请号：US17656303

申请日：2022-03-24

Applicant: Lumentum Operations LLC

Inventor： Yeyu ZHU ,  Chien-Yao LU

IPC: H01S5/183 ,  H01S5/20

CPC classification number: H01S5/18311 ,  H01S5/18377 ,  H01S5/18394 ,  H01S5/2086

Abstract: In some implementations, a vertical cavity surface emitting laser (VCSEL) device may include a substrate layer and a set of epitaxial layers disposed on the substrate layer. The set of epitaxial layers may include a first mirror and a second mirror. At least one of the first mirror or the second mirror may include at least one reflector pair that includes a semiconductor material layer and an oxidized semiconductor material layer. The set of epitaxial layers may include an oxidation trench axially extending into at least the second mirror, an active region between the first mirror and the second mirror, and an oxidation layer with an oxidation aperture.