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公开(公告)号:US20220416506A1
公开(公告)日:2022-12-29
申请号:US17449365
申请日:2021-09-29
Applicant: Lumentum Operations LLC
Inventor: Qianhuan YU , Ajit Vijay BARVE
Abstract: In some implementations, a vertical cavity surface emitting laser (VCSEL) device includes a substrate; a first mirror disposed over the substrate; a bonding layer disposed over the first mirror; and an active region disposed over the bonding layer. The substrate is a gallium arsenide (GaAs) substrate, and the active region is an indium phosphide (InP)-based active region.
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公开(公告)号:US20170353012A1
公开(公告)日:2017-12-07
申请号:US15171844
申请日:2016-06-02
Applicant: Lumentum Operations LLC
Inventor: Ajit Vijay BARVE , Eric R. HEGBLOM
CPC classification number: H01S5/423 , H01S5/18311 , H01S5/18344 , H01S5/18394
Abstract: A vertical cavity surface emitting laser (VCSEL) array may include a plurality of VCSELs. A size of an emission area of a first VCSEL, of the plurality of VCSELs, may be different from a size of an emission area of a second VCSEL of the plurality of VCSELs. The first VCSEL may be located closer to a center of the VCSEL array than the second VCSEL. A difference between the size of the emission area of the first VCSEL and the size of the emission area of the second VCSEL may be associated with reducing a difference in operating temperature between the first VCSEL and the second VCSEL, or reducing a difference in optical power output between the first VCSEL and the second VCSEL.
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公开(公告)号:US20230094127A1
公开(公告)日:2023-03-30
申请号:US18061593
申请日:2022-12-05
Applicant: Lumentum Operations LLC
Inventor: Ajit Vijay BARVE , Benjamin KESLER , Matthew Glenn PETERS
Abstract: A closely spaced emitter array may include a first emitter comprising a first plurality of structures and a second emitter, adjacent to the first emitter, comprising a second plurality of structures. The first emitter and the second emitter may be configured in the closely spaced emitter array such that different types of structures between the first plurality of structures and the second plurality of structures do not overlap while maintaining close spacing between the first emitter and the second emitter.
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14.
公开(公告)号:US20220416512A1
公开(公告)日:2022-12-29
申请号:US17451167
申请日:2021-10-18
Applicant: Lumentum Operations LLC
Inventor: Jun YANG , Ajit Vijay BARVE , Guowei ZHAO , Matthew Glenn PETERS , Eric R. HEGBLOM
Abstract: A vertical-cavity surface-emitting laser (VCSEL) may include a substrate. The VCSEL may include a bottom mirror structure over the substrate. The VCSEL may include a first dilute nitride active region over the bottom mirror structure. The VCSEL may include a tunnel junction over the first dilute nitride active region. The VCSEL may include a second dilute nitride active region over the tunnel junction. The VCSEL may include a top mirror structure over the second dilute nitride active region.
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公开(公告)号:US20220131346A1
公开(公告)日:2022-04-28
申请号:US17247659
申请日:2020-12-18
Applicant: Lumentum Operations LLC
Inventor: Ajit Vijay BARVE , Eric R. HEGBLOM
Abstract: In some implementations, an emitter array may include a substrate, an epitaxial structure on the substrate, a plurality of bottom-emitting emitters defined in the epitaxial structure, a first electrical contact positioned at a top side of the epitaxial structure, a second electrical contact positioned at the top side of the epitaxial structure, and a metal layer disposed on a bottom side of the substrate. The metal layer may be electrically connected to the second electrical contact. The metal layer may include one or more openings for light emission of the plurality of bottom-emitting emitters.
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公开(公告)号:US20220085572A1
公开(公告)日:2022-03-17
申请号:US17247660
申请日:2020-12-18
Applicant: Lumentum Operations LLC
Inventor: John Michael MILLER , Lijun ZHU , Huanlin ZHU , Benjamin KESLER , Ajit Vijay BARVE
Abstract: In some implementations, an emitter module may include an emitter layer including a first emitter array configured to produce a first beam that provides flood illumination, and a second emitter array configured to produce a second beam that provides spot illumination. The emitter module may include a first optics layer, positioned in front of the emitter layer, that includes a first collimating lens positioned in front of the first emitter array, and a second collimating lens positioned in front of the second emitter array. The emitter module may include a second optics layer, positioned in front of the first optics layer, that includes an optical diffuser positioned in front of the first collimating lens, and a beamsplitter grating positioned in front of the second collimating lens.
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公开(公告)号:US20190067906A1
公开(公告)日:2019-02-28
申请号:US15688218
申请日:2017-08-28
Applicant: Lumentum Operations LLC
Inventor: Albert YUEN , Ajit Vijay BARVE , Guowei ZHAO , Eric R. HEGBLOM
Abstract: In some implementations, a vertical cavity surface emitting laser (VCSEL) includes a substrate layer and epitaxial layers on the substrate layer. The epitaxial layers may include an active layer, a first mirror, a second mirror, and one or more oxidation layers. The active layer may be between the first mirror and the second mirror, and the one or more oxidation layers may be proximate to the active layer. The one or more oxidation layers may be configured to control beam divergence of a laser beam emitted by the VCSEL based on at least one of: a quantity of the one or more oxidation layers, a shape of the one or more oxidation layers, a thickness of the one or more oxidation layers, or a proximity of the one or more oxidation layers to the active layer.
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公开(公告)号:US20170244219A1
公开(公告)日:2017-08-24
申请号:US15050817
申请日:2016-02-23
Applicant: Lumentum Operations LLC
Inventor: Ajit Vijay BARVE , Albert YUEN
CPC classification number: H01S5/18311 , H01S5/18308 , H01S5/18369 , H01S5/2063 , H01S5/423 , H01S2301/176
Abstract: A surface emitting laser may include an isolation layer including a first center portion and a first plurality of outer portions extending from the first center portion, and a metal layer including a second center portion and a second plurality of outer portions extending from the second center portion. The metal layer may be formed on the isolation layer such that a first outer portion, of the second plurality of outer portions, is formed over one of the first plurality of outer portions. The surface emitting laser may include a passivation layer including a plurality of openings. An opening may be formed over the first outer portion. The surface emitting laser may include a plurality of oxidation trenches. An oxidation trench may be positioned at least partially between the first outer portion and a second outer portion of the second plurality of outer portions.
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公开(公告)号:US20240047947A1
公开(公告)日:2024-02-08
申请号:US18468135
申请日:2023-09-15
Applicant: Lumentum Operations LLC
Inventor: Albert YUEN , Ajit Vijay BARVE
CPC classification number: H01S5/423 , H01S5/0425 , H01S5/028 , H01S5/04254 , H01S5/18311 , H01S5/04256 , H01S5/0282 , H01S2301/176 , H01S5/18305 , H01S5/18377
Abstract: An emitter array may comprise a plurality of emitters that includes two adjacent emitters. The emitter array may comprise a plurality of emitters that includes two adjacent emitters. The ohmic metal layer may include a portion that is shared by, and located between, the two adjacent emitters. The emitter array may comprise a protective layer over the ohmic metal layer. The emitter array may comprise a via through the protective layer to the portion. The via is shared by, and located between, the two adjacent emitters.
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20.
公开(公告)号:US20220352693A1
公开(公告)日:2022-11-03
申请号:US17364301
申请日:2021-06-30
Applicant: Lumentum Operations LLC
Inventor: Ajit Vijay BARVE , Matthew Glenn PETERS
IPC: H01S5/183
Abstract: A method of incorporating a control structure within a VCSEL device cavity using a multiphase growth sequence includes forming a first mirror over a substrate, forming an active region over the first mirror, forming a spacer on a surface of the active region, forming a control structure on a surface of the spacer, and forming a second mirror over the control structure. The active region and the spacer are formed using a molecular beam epitaxy (MBE) process during an MBE phase of the multiphase growth sequence. The second mirror is formed using a metal-organic chemical vapor deposition (MOCVD) process during an MOCVD phase of the multiphase growth sequence. The control structure is formed using a chemical etching process during a transition period between the MBE phase and the MOCVD phase of the multiphase growth sequence.
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